0.

(The standard valve has an individual exhaust for the pilot valve.) 15 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (for Cylinder port) C3 C4 C6 C8 C10 Fitting size M5 (VQZ100 only) Model VQZ100/200 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ300 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-C10 Note) Purchasing order is available in units of 10

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Applicable tubing O.D. 3.2 Applicable tubing O.D. 4 Applicable tubing O.D. 6 M5 female thread Straight VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Elbow VVQ1000-F1-LC3 VVQ1000-F1-LC4 08 8 stations Note) 2 pcs. are included in one set. 26 Series ZQ Specific Product Precautions Be sure to read before handling.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Refer to pages 13 to 24 for details. Stainless Steel Brass Aluminum Stainless Steel Brass Normally Closed (N.C.) Normally Closed (N.C.)

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 26 or less 26 or less 18 or less 13 or less 30 or less 30 or less 30 or less 22 or less 13 or less 33 or less 33 or less 33 or less 0.20 0.40 0.20 0.40 0.29 0.38 0.28 0.38 0.41 0.21 0.39 0.21 0.39 0.21 0.33 0.23 0.33 0.28 0.34 0.23 0.34 0.23 0.34 0.19 0.30 0.19 0.30 0.25 0.38 29 or less 34 or less 13 or less 13 or less 40 or less 47 or less 40 or less 47 or less 47

7.4

Applicable tube 2 VVQ0-50A-C2 Applicable tube 3.2 VVQ0-50A-C3 Applicable tube 4 VVQ0-50A-C4 Applicable tube 1/8" VVQ0-50A-N1 Applicable tube 5/32" VVQ0-50A-N3 8.5 mm pitch (One-touch fitting) PR plate Barb fitting 2 SS070-50A-20 Barb fitting 3.2 SS070-50A-32 Barb fitting 4 SS070-50A-40 * Part number is for one fitting assembly.

SQ1000/2000

(A)(B) (A)(B) 4 2 4 2 When ordering with manifolds 5 13 5 13 For adding stations (R1) (P)(R2) (R1) (P)(R2) When only valves are required.

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 VVQ1000-50A-C3 Applicable tube 3.2 VVQ1000-50A-C4 Applicable tube 4 VVQ1000-50A-C6 Applicable tube 6 The minimum order quantity is 10 pcs. Precautions 1) Protect O rings from scratches and dust to prevent air leakage. 2) The tightening torque for inserting fittings to the M5 thread ass'y should be 0.8 to 1.4 Nm.

3 Port Solenoid Valve

KJH01-C1 1/8" one-touch fitting (Straight) 2a, 2b KJH03-C1 5/32" one-touch fitting (Straight) 13 VVQ1000-50A-N3 5/32" one-touch fitting (Straight) 1(P), 3(E) VVQ1000-50A-N7 1/4" one-touch fitting (Straight) 3 3 Port Solenoid Valve Series VV100/D-sub Connector Plug-in Connector Type Manifold How to Order Manifold U 1 VV100 10F C6 05 D A 2 D-sub connector type Mounting option Symbol A B Number

Table of Contents

Since there are other applicable auto switches than listed, refer to page 8-23-13 for details.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

Series VQ Base Mounted Metal Seal/Rubber Seal

Applicable tube O.D VQ0 VQ1000 VVQ1000-51A-C3 VVQ1000-51A-C4 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 Applicable tube 3.2 Applicable tube 4 Applicable tube 6 M5 female thread Push-locking lever style Refer to Options on p.1.10-190 to 1.10-193 for other types of fittings.

Compact Manifold Regulator Series ARM5

Handle Position Symbol Position Handle position Handle position Handle position Front Top Bottom 56 A B C Top Front Bottom 84 42 84 70 70 6 26 (Max. 28) P U S SMC SMC H L 6 O C K SMC SMC 28.5 6 51.5 80 51.5 13 OUT IN 3 28 13 OUT IN 13 OUT IN 3 3 2. OUT Piping Position 3.

ZQ-OM01301

(1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A F1-LC4 4 (Elbow) 8 Bracket assembly ZQ1-BK1-A 24 - Doc.

ZQ-OM01401

(1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A F1-LC3 3.2 () F1-LC4 4 () 9 Assy ZQ1-BK1-A 25 - No.ZQ-OM01401-B 7.3 b a a a 1. (2 ) 2.

VQC

VQC2000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VVQ1000-50A-N1 VVQ1000-50A-N3 VVQ1000-50A-N7 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-N3 VVQ1000-51A-N7 VVQ1000-51A-N9 3.2 4 6 8 M5 1/8" 5/32" 1/4" 5/16" With miswiring prevention mechanism (stop diode) Note) A-side energized: Light (orange) ON B-side energized: Light (green) ON With surge absorbing mechanism

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VK VZ Note) For VQZ100, refer to page 4-14-13.

Valve Single Unit

One-touch fitting for 10 One-touch fitting for 8 VVQ2000-51A-C8 NPTF T VVQ2000-51A-C10 SX7000 Inch size A, B port size Thread piping One-touch fitting for 1/4" One-touch fitting for 5/32" VVQ1000-51A-N3 VVQ1000-50A-N7 SX3000 VVQ1000-50A-N3 Symbol Port size Applicable series M5 01 02 SX3000 SX5000 SX7000 M5 x 0.8 One-touch fitting for 5/32" One-touch fitting for 1/4" One-touch fitting for

JXCx-OMT0023

13.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

(The standard valve has an individual exhaust for the pilot valve.) 2.10-18 Series VQZ Replacement Parts Body Ported One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100, 200 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ300 VVQ1000-51A-C6 VVQ1000-51A-C8 VVQ1000-51A-C10 SY Note) Orders accepted in 10 pcs. units.