Special Application: 21-AW (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory (Not Attached): BG (B+G), Option 1: None, Option 2: JZ (Drain Guide+Name & Caution Plates for Bowl & Gauge in Imperail Units)

Special Application: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 04 [1/2 (Size 40)], Accessory (Not Attached): B+G, Option 1: None, Option 2: Drain Guide+Name & Caution Plates for Bowl & Gauge in Imperail Units

Special Applications: 21-AR (Copper, Fluorine & Silicon-free+Low Particle Generation), Body Size: 40, Reverse Flow: No, Thread: N (NPT), Port Size: 04 [1/2 (Size 40)], Accessory, Not Attached: BG [B+G (Size 20 to 60)], Option: 1Z (1+Z)

Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?

1

NB Z + Stroke (A + B) S + Stroke B S + Stroke A C B Stroke B D A When air pressure is supplied to ports and , B out strokes. (mm) Bore size NB S Z 10 21 36.5 150 16 21 37.5 152 When air pressure is supplied to ports and , both strokes A and B out strokes.

CATALOG

21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40 1/2 126 0 Bore Without gaiter With gaiter size (mm) PR U CDH10 CX H Z ZZ e f h l Z ZZ 40 10 16 10+0.058 0 15.0-0.1 -0.3 51 165 175 43 11.2 59 1/4 stroke 173 183 50 12 19 12+0.070 0 18.0-0.1 -0.3 58 183 195 52 11.2 66 1/4 stroke 191 203 63 16 23 16+0.070 0 25.0-0.1 -0.3 58

2

L, Z) is 0.2 to 0.6 MPa (30 to 90 psi).

A

40 10 17 17 M 8 x 1.25 7 M 18 x 1.5 30 3/8 90 0 63 ~ 600 20 ~ 600 32 35 85 64 20 40 10 17 17 M 10 x 1.25 7 M 18 x 1.5 31 3/8 98 0 80 ~ 750 20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 M 26 x 1.5 40 1/2 126 0 Bore Size (mm) Without gaiter With gaiter TDe8 TT TX TY TZ H Z ZZ * e f h l Z ZZ 40 15 -0.032

Table of Contents

25 94 164 25 58 90 56 152 115 103 55 194 50 182 11 12 M10 x 1.5 depth 21 Bore size (mm) Rod end lock Head end lock Bore size (mm) For lock type For non-lock type Bore size (mm) Z X W HR HN Y Y R Q R Q 157 30 40 25.3 37 20 20 20 107 (115) 12 (14) 104 11 21 47.5 175 37 46 28.3 40 25 25 25 107 (115) 12 (14) 104 11 21 48 201 37 52 31.3 43 32 32 32 110 (118) 12 (14) 106 11 21 49 238 44 62 38.3

Table of Contents

/Flange Rod end width across flats 10 10 21 21 46 46 Data Part no.

Made to Order

Packing set (8) w-1 From P. 23 Pin cylinder Double acting, Single rod CJP2 CJ2-Z CJ2W-Z CM2-Z CM2W-Z CM2K-Z CM2KW-Z CM2R-Z CM2RK-Z CBM2 CG1-Z CG1W-Z CG1R-Z MB-Z MBW-Z MB1-Z MB1W-Z CA2-Z CA2W-Z CBA2 CS1N CS1WN CS2 CS2W CUJ CU CUK CU CUK CQS CQSW CQ2-Z CQ2W-Z CQP2 CQ2K-Z CQ2KW-Z CG5 CY3B MK-Z MGPM-Z MGQ MGG MGC CXSJ CXS Except with air cushion and auto switch, rod end bracket T, U Except with

Air Slide Table

100 21 88 21 125 7 88 21 150 33 88 21 Dimensions other than those shown below are the same as the standard product.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

31.4 41.9 B B B B EB P EA X 26 26.6 21 21 80.1 110.2 112.2 PE A A A A (P , EA, EB port) 1/4 + + + + M5 x 0.8 Output no.

1

cylinder Mechanically Jointed Rodless Cylinder with Brake: Series ML1 z -X416/-X417 Holder mounting bracket I, II Sine Rodless Cylinder: Series REA, REB z -X168 Helical insert thread specifications -21-112 x -X206 Additional moving element mounting taps -21-112 c -X210 Non-lubricated exterior specifications -21-112 v -X324 Non-lubricated exterior specifications with dust seal -21-113

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

) Z: Positive common specifications only.

V100

VVZ400-32A-21 pc.

Compact 5-Port Solenoid Valve

With power-saving circuit JSY 1 0 1 0 Z 5 T Made to Order (Refer to page 135 for details.)

Air Cylinder

13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) (Effective thread length 2 x FL) MM 2 x LC LZ LX D D I 20, 25 Width across flats KA Standard port Width across flats NA MM Relief port (10-, 21-) Vacuum port (11-, 22-) 45 45 Width across flats B2 LT 4 x LD Y ZZ + 2 x Stroke LS + Stroke S + Stroke X Z + Stroke Z X Y 32, 40 (mm) 11 8 8 8 Z H H2 H1 S P I F A 12 10 8 6 KA MM NA NN B1 B2 G 4 4 4 4

Hydraulic

Z (Example) C73CZ None .