Fieldbus system (DeviceNet compliant)

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Series VS 8-2/VS 8-4 S R S R

connector) kit (Flat ribbon cable) 25 pins 26 pins IP40 compliant IP40 compliant FD0 FD1 FD2 FD3 PD0 PD1 PD2 PD3 Flat ribbon cable (26P) without cable Flat ribbon cable (26P) with 1.5 m cable Flat ribbon cable (26P) with 3.0 m cable Flat ribbon cable (26P) with 5.0 m cable D-sub connector (25P) without cable D-sub connector (25P) with 1.5 m cable D-sub connector (25P) with 3.0 m cable D-sub

Process Pump

D-DN

ISO Interface

C US How to order ISO 5599/2 Plug-in Manifold VV8 1 5 02 03 D T Size 1 Size 1 2 Size 2 3 Size 3 Port Thread Rc(Pt) T NPTF F G(PF) Number of Stations 1 1 Station Location of P, EA, EB port D Bottom U Top 10 10 Station Note) SU and TBU require one station.

Series VS

Series VS R8 S HOW TO ORDER ISO5599/2 VALVE MANIFOLD VV8 2 5 03 TU1 03 D T W1 W1=NEMA 4 ISO Size 1 Size 1 Port Thread Code 2 Size 2 3 Size 3 NIL Rc (PT) T NPTF F G(PF) Location of port 1(P), 5(EA), 3(EB) Number of Stations D D side 2 2 stations U U side B Both side 9 9 stations Size of port 1(P), 5(EA), 3(EB) Symbol Size Applicable ISO size 02 1/4 Size 1 U side option 03 3/8 Size 1

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 1/4, Options: w/Bracket, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

AWM20 to AWM40

D-DN This catalog is printed on recycled paper with concern for the global environment.

AWM20 to AWM40

D-DN This catalog is printed on recycled paper with concern for the global environment.

rep-modular-e

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

Regulator AR30 to 60

Regulator AR30 to 60 Related Equipment How to Order AR 30 BE F 1N 03 Optional specifications Regulator Contents 0.02 to 0.2MPa setting Non-relieving Flow direction: Right to left Symbol 1 N R Z Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 60 Note 1) Body size 30 40 50 60 1 3 8 1 2 3 4 Display units for product name plate and pressure gauge: PSI, F.

VP500/700 Series How to Order VP 5 1 7 5 D Y 1 Modular connection type Flow direction Series Nil Left to right 5 VP500 R Right to left 7 VP700 Bracket Pressure specification Nil Without bracket Nil Standard (0.7 MPa) With bracket*1 B K High-pressure type

VP500/700 Series RoHS How to Order VP 5 1 7 5 D 1 Y Modular connection type Flow direction Series Nil Left to right R Right to left 5 VP500 7 VP700 Bracket Pressure specication Nil Without bracket B With bracket*1 Nil Standard (0.7 MPa) K High-pressure type (1.0 MPa) *1 Brackets are supplied loose, not assembled, at time of shipment. Includes 2 mounting screws.

AR10-A: Rc1/16
AR20-A to AR40-A, AR20(K)-B to AR60(K)-B, and AR20(K)-D to AR40(K)-D: Rc1/8
Old AR10: Rc1/16
Old AR20(K) to AR30(K): Rc1/8
Old AR40(K) to AR60(K): Rc1/4
Old AR1000: Rc1/16
Old AR2000 to AR3000: Rc1/8
Old AR4000 to AR6000: Rc1/4

AR10-A: Rc1/16
AR20-A to AR40-A, AR20(K)-B to AR60(K)-B, and AR20(K)-D to AR40(K)-D: Rc1/8
Old AR10: Rc1/16
Old AR20(K) to AR30(K): Rc1/8
Old AR40(K) to AR60(K): Rc1/4
Old AR1000: Rc1/16
Old AR2000 to AR3000: Rc1/8
Old AR4000 to AR6000: Rc1/4

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 02 (1/4), Options: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 1/4, Options: w/Bracket, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Non-relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Table of Contents

10A, 15A, 20A, 25A LVD Vacuum pilot LVQ Applicable cable O.D. 6 to 8 (D, DL) LQ LVN TI/ TIL M (Terminal with indicator light: DL) Manual override (Non-locking) PA PAX N (Conduit terminal: T) L (DIN terminal: D) K (Conduit: C) PB Pilot port J (Grommet: G) F (Air operated) (Back side P2) Bracket Main port G (Grommet: G, Conduit: C) H (Conduit terminal: T) I (DIN terminal: D, DIN terminal with

7

E U 300 1.2 7.5 T 5.5 5.5 A b a IN OUT B 2 x P Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet