Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

VFS Y 5 3 37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B

Compressed Air Preparation Filter

Regulator AR30-03-D 1 pc. Spacer with Bracket Y300T-D 1 pc.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Model *1 Port size A B D E300-03-A 3/8 31.8 30 30 E400-04-A 1/2 31.8 36 36 Port size B *1 in model numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. * Separate spacers are required for modular units.

Process Pump

(A) 2 23 (AR) (A) 2 Refer to Best Pneumatics No. 1 for further details. 3 (R) 1 (P) 3 (R) 1 (P) Regulator Series AR Model Specifications Model AR20 Port size 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 AR20 AR25 AR30 AR40 Model Proof pressure 1.5 MPa 1.0 MPa 0.05 to 0.85 MPa 1/4, 3/8, 1/2 Max. operating pressure Pressure gauge port size 1/8 1/4 Set pressure range Ambient and 5 to 60C (No freezing

Knob Cover

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1) , and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines .

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Options: B (w/Bracket), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control Side

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 3/8, Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

Membrane Air Dryer

purge air flow rate Port size (Nominal size B) 1/8, 1/4 1/4, 3/8 3/8, 1/2 1/2 Weight (kg) (With bracket) 0.25 0.43 0.66 0.78 0.81 1.50 1.50 1.55 (0.31) (0.51) (0.76) (0.91) (0.94) (1.65) (1.65) (1.70) Note 1) When using the product in the temperature range between 5oC and 5oC, prevent water droplets from entering the inlet port.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AR20-B to AR60-B

Standard Specications Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size *1 1/8 Fluid Air Ambient and uid temperature *2 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85 MPa Construction Relieving type Weight [kg] 0.16 0.21 0.29

ISO Interface

Location and size A, B port 02 Side 1/4 03 Side 3/8 04 Side 1/2 06 Side 3/4 10 Side 1 02B Bottom 1/4 03B Bottom 3/8 04B Bottom 1/2 Size of P, EA, EB port 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Option No option TBU With terminal box SU With SI unit W Splash proof DISTRIBUTED BY: NATIONAL AND WORLDWIDE SERVICE NETWORK FOR A BRANCH OFFICE NEAR YOU, CALL United States Branch Offices Oceania SMC Corporation

Series VS

1/2 Size 1, 2, 3 06 Side 3/4 Size 2, 3 10 Side 1 Size 3 02B Bottom and side 1/4 with plug on side Size 1 03B Bottom and side 3/8 with plug on side Size 1, 2 04B Bottom and side1/2 with plug on side Size 2, 3 06B Bottom and side 3/4 with plug on side Size 3 02S Side and bottom 1/4 with plug on bottom Size 1 03S Side and bottom 3/8 with plug on bottom Size 1, 2 04S Side and bottom 1/2 with

Body Size: 30, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 3/8, Mounting: w/Bracket, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa