Body Size: 30, Backflow: w/o Backflow Function, Thread: Rc, Port Size: 3/8, Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Unit: Name Plate and Pressure Gauge in Imperial Units; MPa

Table of Contents

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

IDG

Applicable model 25 25 25 1l/min (ANR) {In case of Inlet air pressure 0.7 MPa} Inlet air temperature (C) Inlet air saturation temperature (C) Ambient temperature (C) BM59 IDG3, 5 BM61 IDG10 Dew point indicator purge air flow rate Port size (Nominal size B) Weight (kg) (With bracket) BM63 IDG20 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 BM64 IDG30/50 0.11 0.25 (0.31) 0.43 (0.51) 0.66 (0.76) 0.74 (

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

ISO Interface

Location and size A, B port 02 Side 1/4 03 Side 3/8 04 Side 1/2 06 Side 3/4 10 Side 1 02B Bottom 1/4 03B Bottom 3/8 04B Bottom 1/2 Size of P, EA, EB port 02 1/4 03 3/8 04 1/2 06 3/4 10 1 Option No option TBU With terminal box SU With SI unit W Splash proof DISTRIBUTED BY: NATIONAL AND WORLDWIDE SERVICE NETWORK FOR A BRANCH OFFICE NEAR YOU, CALL United States Branch Offices Oceania SMC Corporation

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

55 mA or less (at no load) Switch output NPN or PNP open collector output: 1 output ISE70 Max. load current 80 mA Max. applied voltage 30 V (With NPN output) ZSE80 ISE80 Residual voltage 1 V or less (With load current of 80 mA) PS Response time 1 s (0.25, 0.5, 2, 3s selections) Short circuit protection Yes ISA3 1% F.S.

Body Size: 30, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 3/8, Mounting: w/Bracket, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 30, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 03 (3/8), Mounting: B (w/Bracket), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Stations: 3 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: B (Both Sides), Thread: T (NPTF)

1/8, 1/40.25(0.31)

1/8, 1/40.25(0.31)

Size: 3/8, Reverse Flow: Regulator, Standard, Thread: M Thread, Rc(PT), Port Size: 3/8, Accessory: Bracket, Option 1: 0.02~0.2MPa Setting, Option 2: -

Table of Contents

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 2 VNA01 VNA02 VNA03 VNA1 Port 12 (P1) 1 1 1 2 External pilot External pilot External pilot External pilot External pilot Pilot exhaust Bleed port Bleed port 1 4 1 2 10 (P2) Installing a silencer to the

7

VXS 8A 1/2 10 10A 1/4 VXB 15A Stainless steel A N.O. 3/8 B Grommet 100 VAC With surge voltage suppressor 1/2 VXE C 110 VAC G H J K 3/8 D 200 VAC 4 10A C37 N.C. VXP 1/2 E 230 VAC 15 15A 3/8 Stainless steel B N.O. F VXR 24 VDC 1/2 G DIN terminal 24 VDC L M 5 20A C37 N.C. VXH With surge voltage suppressor 3/4 20 H 100 VAC C N.O. Stainless steel J 110 VAC VXF 6 25A N.C.

2/3 Port Valve

N.C. 1 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 1 8 1 4 3 8 3 8 1 2 3 4 7 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 40F 11 2 B Flange 2 50A 50 7 50F 2B Flange 4.2-36 VND Model Model Port size Flange (1) Orifice size (mm) Flow rate Effe. area (mm2) Cv Weight (kg) Rc(PT) VND10D-6A VND10D-8A VND10D-10A VND20D-10A VND20D-15A VND30D-20A VND40D-25A VND50D-32A VND50D-32F VND60D-40A VND60D

Air Slide Table

A C B B stroke operation 1) Initial state (0 stroke position) B stroke A stroke 2) Operation When the air pressure is supplied from the C port, the rod operates the B stroke.

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !