Size: 60, Standard Dew Point: -60°C, Type: A, Thread: Rc(PT), Port Size: 1/2, Accessory: -, Option: -

Flow Control Equipment

AS43l1F-04 R(PT)1/2 Note 1) Only elbow style.

A

40 BM1-05 50 BM1-06 63 BA-01 20 BA-02 25 BA-32 32 BA-04 40 BA-05 50 BA-06 63 BA-08 80 BA-10 100 Courtesy of Steven Engineering, Inc. !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L plug connector (L): VQZ115-L-C3/C4/C6/M5-PR M plug connector (M): VQZ115-M-C3/C4/C6/M5-PR Cover diameter 1.5 Cross section 0.23 mm2 (Lead wire length) 54 <59> 300 Indicator light Indicator light 60.5 <65.5> 300 (Lead wire length) 41 35 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC < >: AC 4-14-8 9 Body Ported 3 Port Solenoid Valve (Valve Single Unit) Metal/Rubber Seal, Body Ported,

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT A One-touch fitting d Part No. A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail AXT100-DR-l 12.5 (Pitch) 5.25 7.5 VQ Enter suffix number into l from the table below.

Direct Solenoid

NPTF Bottom 04 sP0105 %,,NPTF SidE 5 AXT 333-21 Terminal Block Subolate ME4OI SLR Lell and Right end plates-Shorl w/o conduil NPT threads. Includes (3)O-rings AFP 568-015 1 pr.

PF-OMN0009_C

20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T

2/3 Port Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

Air Pilot Operated Series NVSA

Op.r.Sng Pr..rur..! 28 'Vacuuh to 30o FSIG (20 Kglrcm?).

Precision Regulator

In addition, the product for the following specifications is also available: Prefix (10-): Clean series Prefix (25A-): Secondary battery compatible Prefix (80-): Ozone resistant (Fluororubber specification) IRM: Manifold specifications (For IR1000 and IR2000 series only.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R PR R 3 5 1 4 2 4 2 5 1 A B A B 7 7 R1 P R2 R1 P R2 6 3 position closed center/exhaust center/pressure center 3 position closed center A B 4 2 5 1 PR2 R A 3 position exhaust center A B B PR R 3 position pressure center A B 7 R1 P R2 PR R (This construction shows closed center type.)

7.4

O-ring Port plug Body Ported Base Mounted Blanking plug (For One-touch fittings) KJP-02 A L Dimensions [mm] Applicable fitting size d Model A L D Weight [g] 2 KJP-02 8.2 17 3 0.1 3.2 KQ2P-23 16 31.5 5 1 4 KQ2P-04 16 32 6 1 23 KQ2P-04 D Silencer (For manifold EXH port) Body Ported Base Mounted Silencer is installed in the EXH port.

Process Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

70pvvna

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

AC Servo Motor Driver (SSCNET Type)

82 232 382 532 1:Pr.25 Acceleration time 1 2:Pr.26 Acceleration time 2 3:Pr.27 Acceleration time 3 Pr.51 OPR acceleration time selection 0:Pr.10 Deceleration time 0 0 83 233 383 533 1:Pr.28 Deceleration time 1 2:Pr.29 Deceleration time 2 3:Pr.30 Deceleration time 3 Pr.52 OPR deceleration time selection Pr.53 OP shift amount The setting value range differs according to the "Pr.1 Unit setting

DOC1020530

PB09 Speed loop gain] [Pr. PB10 Speed integral compensation] _ _ _ 2 Auto tuning mode 2 [Pr. PB07 Model loop gain] [Pr. PB08 Position loop gain] [Pr. PB09 Speed loop gain] [Pr. PB10 Speed integral compensation] _ _ _ 3 Manual mode _ _ _ 4 2 gain adjustment [Pr. PB08 Position loop gain] [Pr. PB09 Speed loop gain] [Pr.

7ND9071en

The C calculates a new value for prestage (PR) coil current based on the information from the input signal and from the sensors. Changed current to the PR changes the pilot pressure to the spool valve. Reduced pilot pressure moves the spool and the actuator pressures change accordingly.

5 Port Solenoid Valve, Series VQC

in alphabetical order. 3-position pressure center A B 5 EB P EA 3-position perfect A B Seal type 6 0 1 Metal seal Rubber seal EB P EA Manifold Options Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102 03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 ^{Residual pressure release valve perfect spacer VVQ4000-25A}

Model: JSXF, Piping: E (Compression Fitting Type), Tank Size: None, Port Size: 10 [1 (25A], Port Thread: N (NPT), OUT Port Piping: None, Rated Voltage: 5 (24 VDC), Electric Control: PR (Board Type: Remote; External Input, Differential Pressure Sensor: without 2 Holes), Fluid and Ambient Temperature: B (-40 to 60°C)

Model: JSXF, Piping: E (Compression Fitting Type), Tank Size: None, Port Size: 10 [1 (25A], Port Thread: F (G), OUT Port Piping: None, Rated Voltage: 5 (24 VDC), Electric Control: PR (Board Type: Remote; External Input, Differential Pressure Sensor: without 2 Holes), Fluid and Ambient Temperature: B (-40 to 60°C)