1)MXQ16 (L)MXQ-AS16 (L)-X122511361713.544.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)-X111511361713.534.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)-X122511361713.544.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-AS16 (L)511361713.524.51/45M10 x 1M5 x 16211315M5 x 16

1)MXQ16 (L)MXQ-BS16 (L)2211361713.546.771/41.4M10 x 1M5 x 162313.51621M5 x 16

CATALOG

Piece n n Pieces * Not Available with MXQ6 F U N C T I O N A L O P T I O N S ACCESSORIES SHOCK ABSORBER SERIES MXQ -l Standard F With Buffer R* With End Lock P Axial Piping FR* With Buffer and End Lock FP With Buffer and Axial Piping T Y P E O F A U T O S W I T C H E S Without *With Auto Switch, see Accessories Section Type Model RB0805 MXQ8 RB0806 MXQ12 * Not Available for MXQ6 RB1007 MXQ16

1)MXQ16 (L)MXQ-BS16 (L)2211361713.546.771/41.4M10 x 1M5 x 162313.51621M5 x 16

XLAQ/XLDQ

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

212

Regulator for Chemical Liquids New New Compatible with acid, alkali and DI water Fluid temperature MAX.212F (100c) Set pressure range 2.9 to 58 psi (0.02 to 0.4 MPa) Material Body New PFA Diaphragm PTFE Housing/End plate PVDF No-slide diaphragm eliminates particle generation. Integral fittings type/ tube extensions type are available.

Lock-Up Valve IL201/211/220 Series

How to Order IL 02 201 Action Suffix 201 Single acting 211 Double acting 220 3 Port Accessories Nil Standard T High temperature (5 to 100C) L Low temperature (30 to 60C) S External parts copper-free Nil None B With bracket Thread type Port size ST External parts copper-free/ High temperature (5 to 100C) Nil Rc N NPT* 02 1/4 IP F G* SL External parts copper-free/ Low temperature (30 to 60C

Electric Actuators

Regenerative voltage input mis-wiring protection Over current protection, Overheating protection (Normally closed, Radiator sensor OFF at 100C) Protective circuit Danger 1. Contact SMC if the connected controller power supply voltage will be 110VAC or 220VAC, as this may cause fire or malfunction.

HAA

Fluid Operating pressure(1) Compressed air 0.05 to 1.0MPa Proof pressure Inlet air temperature Ambient temperature Cooler Coating Installation 1.5MPa 5 to 100C 2 to 50C Aluminum plate tube w/fins Mansel N-8 (White), Mansel 2.5PB5/8.5 (Blue) Indoor Note 1) With auto drain: 0.15 to 1.0MPa Accessories (Equipped as Standard) HAA15 Drain valve Applicable Model HAA15 HAA22 HAA37 HAA7 B 3 8 B 3

KJ

Liquid dripping: 0.02 to 0.06 cm3 at each removal Aeration: 0.1 to 0.2 cm3 at each removal VMG Socket valve Plug valve Non-greased specifications (standard) O-ring: Fluorine coated Sliding parts of plug and socket: Plated with fluorine-contained material Allows smooth installation and removal even without grease Fluid: Water, Air Operating temperature range: 5 to 100C Note) Do not use

Table of Contents

Liquid dripping: 0.02 to 0.06 cm3 at each removal Aeration: 0.1 to 0.2 cm3 at each removal VMG Socket valve Plug valve Non-greased specifications (standard) O-ring: Fluorine coated Sliding parts of plug and socket: Plated with fluorine-contained material Allows smooth installation and removal even without grease Fluid: Water, Air Operating temperature range: 5 to 100C Note) Do not use

Process Pump <Fluororesin Type> Series PA3000

(with no freezing or heat cycle) Ambient temperature 0 to 100C (with no freezing or heat cycle) Pilot air pressure 0.2 to 0.5MPa Proof pressure 0.75MPa Mounting orientation Horizontal (with mounting hole on the bottom) Weight 2.1kg (without foot) PA: Standard Assembled and packaged in a standard environment Assembling environment PAP: Clean room Assembled and double-packaged in clean-room

Air/Manually Operated High Purity Chemical Valve Series LV

Table symbols : Can be used : Depends on conditions X: Cannot be used Compatibility is indicated for fluid temperatures of 100C or less. Consult P/A regarding fluids other than the above. Consult P/A regarding operating conditions. 1.12-6

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

(-4 to 212F) Ambient temperature Note 1) 10 to 60 (14 to 140F) (with no freezing) 10 to 100C (14 to 212F) Fluid temperature Splash-proof (equivalent to IP65) Enclosure Location without corrosive or explosive gases Environment 0 (with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC

Soft Nylon Tubing TS/TISA Series

There is a possibility of plasticizer and other materials precipitating on the tube surface and detracting from the cleanliness level of the room. 40 to +100C, Water: 0 to +50C (No freezing) Nylon 12 Operating temperature Note 2) Material Note 1) Refer to the Printing/Fluid.

T/TIA

(mm) 2.5 3 4 4.5 6 7.5 9 13 2.18 3.48 4.57 6.99 9.56 Black (B) Max. operating pressure (MPa) White (W) TIA Series Red (R) Blue (BU) T1613 Yellow (Y) Green (G) T0403 Other metric size Nominal size (inch) 5 32" 5 16" 1 4 3 8 " 3 16" 1 8 " 1 2 " " Nominal size (mm) 0.0 40 20 0 20 40 60 80 100 Specifications 3.2 Operating temperature (C) Fluid Air/Water 20C or less 40C 60C 80C 100C 3.3 2.3 1.65

The VC enclosure is IP65 equivalent.Multipurpose valve for oil, Withstand pressure: 5.0MPa, Ambient temperature: -20 to 60C (Standard) -20 to 100C (High temp.), Fluid temperature: -10 to 60C (Standard) -10 to 100C (High temp.), Valve leakage cm¦/min: 0 (with oil pressure), VALVE, COMPACT FOR OIL, VALVE, VC* VALVE, 2-PORT SOLENOID, 2A, VC* NO SIZE RATING, 0.97003 lb