7

3/8 Stainless steel E 230 VAC B N.O. 1/2 F 24 VDC L M 5 20A C37 N.C.

Air Slide Table

D B B E C A P F Single rubber stopper M M G D A A MXQA-A27 Model Adjuster part no.

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: w/o Lead Wire w/Connector, Option: -

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Battery-less

Model (L) B D E F G J K LES25DEm-30mm-m 214 48 4 133.5 81 4 19 121.5 LES25DEm-30Bmm-m 254.5 LES25DEm-50mm-m 240 42 6 159.5 87 4 39 147.5 LES25DEm-50Bmm-m 280.5 LES25DEm-75mm-m 274 55 6 193.5 96 4 64 181.5 LES25DEm-75Bmm-m 314.5 LES25DEm-100mm-m 347 50 8 266.5 144 4 89 254.5 LES25DEm-100Bmm-m 387.5 LES25DEm-125mm-m 372 55 8 291.5 144 6 57 279.5 LES25DEm-125Bmm-m 412.5 LES25DEm-150mm-m 397

2/3 Port Valve

Main port Rc(PT) Model E F G L M N P Q D U C T B S A H I J K R 3 8 1 2 3 4 1 VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 52 26 4.5 72.5 80.5 74.5 79.5 82.5 125.5 142.5 24.3 14 55 28 34 42 25 63 124 2.3 83.5 89.5 88.5 94.5 91.5 97.5 28.3 33.3 17.5 20 84 100 92 108 135.5 137 153 154 170 62 72 31 36 5.5 6.5 60.5 73 35 40 43 49 50 60 30 35 80 90 2.3 2.3 151.5 10A, 15A, 20A, 25A Port size Vacuum pilot

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Bottom Side, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Panel Mount

Environment

1 Cable length* [m] !

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: A (2 NPN Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber)

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: -

Pulse Valve

-06m-B-m JSXF-06B-KT 55-JSXFA(E, F)-06m-B-mA JSXF-06B-A-KT 55-JSXFA(E, F)-10m-B-m JSXF-10B-KT 55-JSXFA(E, F)-10m-B-mA JSXF-10B-A-KT 55-JSXFA(E, F)-14m-B-m JSXF-14B-KT JSXF-14B-KT2 AN30-03 (14R, 14F), AN30-N03 (14N) 13 Dedicated Controller for Operation VXFC Series [Excludes the VXFCmA] Dedicated Controller for Operation / VXFC Series How to Order Controller [Application example] D

Fluoropolymer Piping Equipment

Connection threads Rc/NPT B E E F G H L1 L1 L2 M Min. port size Y L1, L1 2 x B LQ3R11-F 4 1/8" 3.5 10 9 4.8 9.5 11 28.5 27.5 19.5 14 2.5 18.5 LQ3R12-F 3 2 LQ3R21-F 6 1/8" 4 17 16 6 12 16 34.5 33.5 20 20 4 18.5 LQ3R22-F 1/4" 22 21.5 LQ3R31-F 10 1/8" M F Y G (E, E) H 7.5 18.5 LQ3R32-F 8 6.4 LQ3R33-F 10 1/4" 24 7.5 21.5 LQ3R34-F 8 6.4 LQ3R35-F 10 3/8" 25.5 7.5 25 LQ3R36-F 8 6.4 LQ3R41-F 12 1

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: N02 (NPT1/4), Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber

Coolant Valve

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

Lightweight and Compact

Altitude [m] q Upper limit of ambient temperature [C] w Cooling capacity coefficient Less than 1000 m 45 1.00 Less than 1500 m 42 0.85 Less than 2000 m 38 0.80 Less than 2500 m 35 0.75 Less than 3000 m 32 0.70 15. In locations where strong impacts or vibrations occur. 16.