0.4

C6: 6 (SMC) N7: 1/4" (SMC) One-touch fitting [PE: Pilot EXH port] Applicable tube O.D. C6: 6 (SMC) N7: 1/4" (SMC) Applicable tube O.D.

PFxx-OMJ0005CN

C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: N9 (ø5/16" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector w/Cover, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: ø5/16" One-touch Fitting, Inch, Thread Type: Rc, Bracket: w/Foot Bracket, 2-position, Single Only

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector w/Cover, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: w/Foot Bracket, 2-position, Single Only

Actuation: 1 (2-Position Single), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: N7 (ø1/4" One-touch Fitting, Inch)

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector w/Cover, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: ø1/4" One-touch Fitting, Inch, Thread Type: -, Bracket: -

MY1

MY1 HT m2 m3 MY1 W MY1 W Moment (Nm) M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 MY2C L2 L1 L3 Maximum Load Mass MY2 H/HT Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

Table of Contents

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

AC

AR1 (Exhaust air) PB (Supply air) ON state PA (Supply air) BR2 (Exhaust air) { Immediately after turning on F1> F2: See figure 3. Thereafter F1 = F2: See figure 2.

Table of Contents

Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

Mechanically Jointed Rodless Cylinder Series MY1

MY2C MY2H Load mass (kg) m1 MY3A MY3B Caution MY3M The cylinder should be mounted in m1 orientation if maximum dustproofing is required. m2 m3 Moment (Nm) M3=F3 x L3 F3 F2 M1=F1 x L1 F1 M2=F2 x L2 L2 L1 L3 Maximum Load Mass Select the load from within the range of limits shown in the graphs.

Stability of suction position,

Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Nickel plated Chromium molybdenum steel Hexagon socket head cap screw @1 Aluminum alloy Switch mounting rail @2 Note) Brass for 6, 10 and 15 8-15-53 53 Series CY1S Dimensions Slider type/Slide bearing CY1S6/10 4-J x K (Depth) 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

REA/REB

Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)

REA/REB

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table