0.4

2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 97 130 152 31 42 53 64 75 86 108 119 141 125 150 175 50 62.5 75 87.5 100 125 112.5

PFxx-OMJ0005CN

8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3

PSxx-OMM0006CN

No.PS-OMM0006CN-E // ZSE40A(F) ISE40A 2 9 12 13 16 16 18 20 23 23 25 25 25 F0 27 F1 OUT1 28 F2 OUT2 31 F3 33 F4 34 F5 / 36 F6 38 F11 39 F80 40 F81 41 42 F90 42 F97 44 F98 46 F99 48 49 52 52 53 60 60 63 -1No.PS-OMM0006CN-E (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Digital Pressure Switch

-I With bracket Bracket A 01/N01 type W1/WF1 type -66No.PS-OMM0007-I Bracket B W1/WF1 type -67No.PS-OMM0007-I Bracket D 01/N01 type W1/WF1 type -68No.PS-OMM0007-I Panel mount adapter 01/N01 type W1/WF1/M5/C4/C6 type -69No.PS-OMM0007-I Panel mount adapter + Front protective cover 01/N01 type W1/WF1/M5/C4/C6 type -70No.PS-OMM0007-I Panel cut-out dimensions -71No.PS-OMM0007-I 01/N01 type (products

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: C6 (ø6 One-touch Fitting, Metric)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø6 One-touch Fitting, Metric, Thread Type: -, Bracket: -

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: T (NPTF), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: F (G), Bracket: F2 (w/Side Bracket)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPTF, Bracket: w/Side Bracket

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: w/Side Bracket

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: G, Bracket: w/Side Bracket

Actuation: 1 (2-Position Single), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: C6 (ø6 One-touch Fitting, Metric), Thread Type: Rc, Bracket: F1 (w/Foot Bracket, 2-position, Single Only)

Actuation: 2-Position Single, Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: ø6 One-touch Fitting, Metric, Thread Type: Rc, Bracket: w/Foot Bracket, 2-position, Single Only

AC

F2: The force that is created by the port A pressure (PA) that passes through the feedback passage and acts on the spool surface, and the spring force. OFF state { F1< F2 condition: See figure 1. AR1 (Exhaust air) PB (Supply air) ON state PA (Supply air) BR2 (Exhaust air) { Immediately after turning on F1> F2: See figure 3. Thereafter F1 = F2: See figure 2.

Table of Contents

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)

Electric Actuators

Refer to page 100 for part numbers. 53 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order G NA 1 F W X10 Stroke 2 LJ1H20 Cable entry direction Top entry Cable entry direction Power supply voltage Motor specification Matsushita Electric Industrial Co., Ltd.

LJ1H

Applicable strokes: 150, 250, 350, 450 Example) LJ1H1011PB-150-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Positioning repeatability Motor Encoder Lead screw Guide Motor/Screw connection Model Performance 0.02 AC servomotor (50W) Incremental system Ground ball screw 12mm, 12mm lead High rigidity direct acting guide With coupling LC1-1B1H(Refer to page

Stability of suction position,

Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).