SMC Corporation of America
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Suction flow rate When obtaining the suction flow rate at a vacuum pressure of 53 kPa from the ZH07DS flow rate characteristics graph, the suction flow rate is 5 L/min (ANR).

MY 500 500 500 Load weight (kg) m1 CY 300 300 300 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MY1HT63 CX Moment (Nm) Moment (Nm) Moment (Nm) MY1HT63 MY1HT63 m2 m3 Moment (Nm) D100 100 100 MY1HT50 MY1HT50 MY1HT50 M2 = F2 x L2 F3 M3 = F3 x L3 F2 M1 = F1 x L1

EXH Flow Rate Characteristics Model Port size Flow rate characteristics Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH

) 63 (37) 81 (55) 84 (58) 0.36 0.12 0.46 0.35 0.12 0.46 2 position 5 port Base mounted 0.33 0.39 0.12 0.10 0.47 0.59 [0.40] 0.46 0.31 0.12 0.47 0.36 0.58 [0.32] M5 x 0.8 M5 x 0.8 (with sub-plate) 0.43 [0.33] 0.32 0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55

Up to 1000 1/4 181 10 11 53 77 236.5 247 26.5 The dimension NA(42.5) is wider than dimension TX(40).

Refer to page 100 for part numbers. 53 54 Non-standard Motor Series LJ1H20 High Rigidity Direct Acting Guide Rolled Ball Screw Motor Output 100W 15mm/10mm lead Horizontal Mount How to Order Stroke 2 LJ1H20 G NA 1 F W X10 Cable entry direction Top entry Cable entry direction Power supply voltage Motor specification Matsushita Electric Industrial Co., Ltd.

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

SX5000-50-1A-Q C4 C6 C8 Manifold block assembly SX3000-50-1A-Q C4 C6 1 SUP/EXH block assembly SY3000 P, R ports 8 One-touch fitting SY5000 P, R ports 10 One-touch fitting 2 SX3000-51-1A-Q SX5000-51-1A-Q 3 End block assembly R SX3000-52-1A-Q SX5000-52-1A-Q For D side 4 End block assembly L SX3000-53-1A-Q SX5000-53-1A-Q For U side M3 x 26 (Flat nickel plated) Round head combination screw 5

Product Precautions p. 165 26 Variations Basic Pad ZP Series Vacuum inlet direction Flat type Flat type with ribs Bellows type Thin flat type Thin flat type with ribs Deep type Vacuum inlet direction Single unit p. 32 p. 51 p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53

: VQC530 0 1 3-position exhaust center: VQC540 0 1 3-position pressure center: VQC550 0 1 Indicator light Indicator light 2 73 (78.5) 121.8 59.5 194.8 (200.3) 91.7 121.8 213.5 2 105.8 4(A) port 17.5 105.8 59.5 13.5 2(B) port 13.5 (B port) (A port) 17.5 SMC 2 4 2 4 SMC A B A B 66 53 40 53 66 40 A B A B 1 3 5 14 12 14 5 1 3 12 35 53 2 x 6.5 Mounting hole 2 x 6.5 Mounting hole 53 35 Manual override

VVQ2000-51A-N9 VVQ4000-50B-N9 N9 One-touch fitting VVQ2000-51A-N11 VVQ4000-50B-N11 N11 One-touch fitting SY9000-58A-02 1/4 threaded type port block assembly SY9000-58A-03 3/8 threaded type port block assembly VVQ1000-51A-C8 8 One-touch fitting VVQ2000-51A-C10 10 One-touch fitting VVQ4000-50B-C12 VVQ4000-50B-C12 12 One-touch fitting VVQ1000-51A-N9 N9 One-touch fitting VVQ2000-51A-N11

Base mounted (with sub-plate) 53(32) 58(37) M5 x 0.8 54(33) Note) Value for DC.

Nickel plated Chromium molybdenum steel Hexagon socket head cap screw @1 Aluminum alloy Switch mounting rail @2 Note) Brass for 6, 10 and 15 8-15-53 53 Series CY1S Dimensions Slider type/Slide bearing CY1S6/10 4-J x K (Depth) 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

) 63 (37) 81 (55) 84 (58) 0.36 0.12 0.46 0.35 0.12 0.46 2 position 5 port Base mounted 0.33 0.39 0.12 0.10 0.47 0.59 [0.40] 0.46 0.31 0.12 0.47 0.36 0.58 [0.32] M5 x 0.8 M5 x 0.8 (with sub-plate) 0.43 [0.33] 0.32 0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55

C8: 8 (SMC) N9: 5/16" (SMC) One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)

A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table

Applicable strokes: 550, 650, 750, 850, 950 Example) LJ1H2021PC-550-F2-X2 Body weight Operating temperature range Work load Rated thrust Maximum speed Note) Performance 1000 1000 930 740 600 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 20mm lead High rigidity direct acting guide With coupling LC1-1B2H(Refer to page 185 for details.)