0.4

(Except double wiring) With name plate External pilot Direct EXH outlet with built-in silencer C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow with 3.2 One-touch fitting Top ported elbow with 4 One-touch fitting Top ported elbow with 6 One-touch fitting M5 thread

Slider Type Ball Screw Drive/11-LEFS Series

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 43 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center

V

Normally Closed 14 or less 18 or less Maximum 12.6 (0.7) Rubber VQZ235 53 Normally Closed 15 or less 20 or less Diameter 10 (0.55) Metal VQZ225 53 Normally Open 14 or less 18 or less 12.6 (0.7) Rubber VQZ245 53 Normally Open 15 or less 20 or less Note 2) 16.2 (0.9 VQZ300 Metal VQZ315 77 Normally Closed 17 or less 22 or less Weight 21.6 (1.2) Rubber VQZ235 77 Normally Closed 25 or less 33

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

70 85 9.5 16 15 9 11 14 114 140 170 54 68 84 24.5 28.5 35 5.6 6.8 8.6 18 22 26.5 40.2 50.2 62.7 40.5 50 62 39 49 61.5 53 64 75 14.5 15 20.5 50 60 80 60 80 100 Rc1/8 Rc1/8 Rc1/4 Centralized piping PF PP PG QW Q RR TT TTT VV WWW Model WW XXX Z YH PD PE ZZ (mm) MY1H25 MY1H32 MY1H40 32 42 37.5 15.5 12 14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12

ZB-OM00301

15V2F.S.7 P3 -100100 15V2F.S.7 8 EA EAM SI 9 NPN2 EAP [psi] 8 0-101 8 EB EBM SI 9 PNP2 EBP [psi] 8 8 FA FAM SI 9 NPN2 FAP [psi] 8 -100100 8 FB FBM SI 9 PNP2 FBP [psi] 8 73m 8 9kPa G 2m V 10 11 12 C2 2 B C4 4 N1 1/8 N3 5/32 K 12 L2 2 L4 4 LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: LL (L-type Plug Connector w/Cover), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 3 (300mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 20 (2000mm), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

Actuation: 4-Position Dual 3 Port Valves, N.C./N.C., Electrical Entry: Terminal Type, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: -

Actuation: 4-Position Dual 3 Port Valves, N.C./N.C., Electrical Entry: L-type Plug Connector w/Cover, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: -

Actuation: 4-Position Dual 3 Port Valves, N.C./N.C., Electrical Entry: Terminal Type, Lead Wire Length: 300mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: -

Actuation: 4-Position Dual 3 Port Valves, N.C./N.C., Electrical Entry: Terminal Type, Lead Wire Length: 2000mm, Manual Override: Non-locking Push Type, A,B Port: 1/8, Thread Type: NPT, Bracket: -

Actuation: A (4-Position Dual 3 Port Valves, N.C./N.C.), Electrical Entry: TT (Terminal Type), Lead Wire Length: 100 (10000mm, Semi-standard), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)

7

D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN OUT M 2 x P Port size (D) L K I F J (mm) Electrical entry M Model Grommet Grommet (with surge C37, Port size P A B C E F I J K L D voltage suppressor) DIN terminal Aluminum body type Stainless steel body T U T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U U V 22 27 55.5 (61) 27 42 (47.5) 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 30 47.5 (53

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

Series VQ Metal Seal/Rubber Seal Body Ported

Example) L6: Elbow with One-touch fittings for 6 Note 2) See Options for One-touch fittings in inch sizes. 100V AC (50/60Hz) 2 position single (1) 200V AC (50/60Hz) SY 1 110V AC (50/60Hz) (1) 220V AC (50/60Hz) 24V DC SYJ 2 position double (latching) 12V DC Note 1) 200/220V AC models are applicabe to the C kit.

Air Fittings Fitting Series For Special Environment

N L1 L2 Port B min. port size L3 L4 L5 L6 D P Q1 Q2 MA MB FA FB KRM11-06-10-10 KRM11-06-10-6 80 10 6 6 10 40 47 23.3 13 19.5 33.5 23.5 33 13.5 19 22 8.5 10 106 6 89 10 120 55 73 53 55 KRM11-08-12-10 KRM11-08-12-6 8 12 25.7 15.5 22.5 37.5 26 36.5 20.5 24 10 11.5 14.7 86 74 KRM12 Weight (g) Applicable tube O.D.(mm) Thread Rc(PT) H (Hex.) Port B min. port size Part No.

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Cassette base I Valve Milsubsh Eeclrc Corpofalion: MELSECNET/I/IlN1 53 Data Link Sysrr. Supply/Exhaust block assembly specif ication SHARPCorooralon Sate rte /O Lnk nierna p oVBu ln srlencer External pi ot specilicaton Edefnalpiottsl] lt'n s lencer E port position .rrr'o slfa t is s n.ldes .d rxl-"r rlh I E eclric co Lld : T L nf. M I l,l.le 2) spe. lrsd r!!