5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

L8 L6 B4 L5 B6 B3 B8 B4 LM B6 B5 LM Note 1) For CM and LM, indicate in the specification table. Note 2) Inch sizes use the following symbols. VQ1000 N1: 1/8" N3: 5/32" N7: 1/4" N5T: 10-32UNF NM: Mixed Top ported elbows are LN and bottom ported elbows are BN.

SX

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

5 Port Solenoid Valve, Series VQC

Note 2) Symbols for inch sizes are as follows: N7: 1/4" N9: 5/16" N11: 3/8" NM: Mixed n 8 7 6 5 4 3 2 1 Note) Leave the box blank for the SI unit COM without input block (SD0).

VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported U-side end plate assembly !2 U-side end plate assembly part no.

A

Bore MM *NA P S W X Y LC LD LH LS LT LX LZ Without gaiter (mm) H ZZ 20 M8x1.25 24 1/8 77 10 15 7 4 5.5 20 53 3 32 44 35 147 25 M10x1.25 29 1/8 77 10 15 7 4 5.5 22 53 3 36 49 40 157 32 M10x1.25 36 1/8 79 10 16 8 4 6.6 25 53 3 44 58 40 159 40 M14x1.5 44 1/8 87 10 16.5 9 4 6.6 30 60 3 54 71 50 187 50 M18x1.5 55 1/4 102 17.5 22 11 5 9 40 67 4.5 66 86 58 218 63 M18x1.5 69 1/4 102 17.5 22 13 5

Slider Type Ball Screw Drive/11-LEFS Series

L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 43 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center

Serial Transmission System Series EX250 Series EX500

N9 N11 02N 03N 02T 03T M 1/8" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/32" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 1/4" One-touch fitting 5/16" One-touch fitting 3/8" One-touch fitting 5/16" One-touch fitting 5/16" One-touch fitting SV1000 SV1000 10 One-touch fitting 3/8" One-touch fitting SV2000 SV2000 12 One-touch fitting 3/8" One-touch

V100

PVT317-53-1A 1 pc.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

70 85 9.5 16 15 9 11 14 114 140 170 54 68 84 24.5 28.5 35 5.6 6.8 8.6 18 22 26.5 40.2 50.2 62.7 40.5 50 62 39 49 61.5 53 64 75 14.5 15 20.5 50 60 80 60 80 100 Rc1/8 Rc1/8 Rc1/4 Centralized piping PF PP PG QW Q RR TT TTT VV WWW Model WW XXX Z YH PD PE ZZ (mm) MY1H25 MY1H32 MY1H40 32 42 37.5 15.5 12 14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12

VQC

A-side light circuit assembly (orange) B-side light circuit assembly (green) DC: Double VVQ4000-50B-C8 VVQ4000-50B-C10 VVQ4000-50B-C12 VVQ4000-50B-N7 VVQ4000-50B-N9 VVQ4000-50B-N11 8 10 12 1/4" 5/16" 3/8" How to Calculate the Flow Rate Refer to pages 2-1-8 to 2-1-11. 2-2-3 Base Mounted 4 Series VQC Precautions 3 Be sure to read before handling.

7

D) DIN terminal U V E Cable 6 to 12 30 G1/2 (44) 31.5 T A B IN OUT M 2 x P Port size (D) L K I F J (mm) Electrical entry M Model Grommet Grommet (with surge C37, Port size P A B C E F I J K L D voltage suppressor) DIN terminal Aluminum body type Stainless steel body T U T T 1/4, 3/8 1/2 88 (93.5) 22.5 30 U U V 22 27 55.5 (61) 27 42 (47.5) 24 30 50 20 4.5 5 11 13 37.5 42.5 25 25 30 47.5 (53

17

A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.

Series VQ Metal Seal/Rubber Seal Body Ported

Example) L6: Elbow with One-touch fittings for 6 Note 2) See Options for One-touch fittings in inch sizes. 100V AC (50/60Hz) 2 position single (1) 200V AC (50/60Hz) SY 1 110V AC (50/60Hz) (1) 220V AC (50/60Hz) 24V DC SYJ 2 position double (latching) 12V DC Note 1) 200/220V AC models are applicabe to the C kit.

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port Size: 3/8", Thread Type: NPT

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port Size: 1/4, Thread Type: NPT

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port Size: 3/8", Thread Type: NPTF

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port Size: 03 (3/8"), Thread Type: N (NPT)

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port Size: 02 (1/4), Thread Type: N (NPT)

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port Size: 03 (3/8"), Thread Type: T (NPTF)

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port Size: 03 (3/8")