Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

V100

VQZ Model Weight Weight (g) VFN200N/Flow Characteristics VZ Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN212N-5D-02F 240 380 VS C 2.68 2.68 b 0.40 0.40 Cv 0.72 0.72 C 5.41 5.41 b 0.31 0.31 Cv 1.38 1.38 VFN212N-5D-02F-D 2 position Single solenoid VFN Double solenoid How to Order VFN212 5 D N 02 F Z NAMUR Interface Solenoid Voltage Nil D Single solenoid Double solenoid Thread

Battery-less

3 A-A B B @1 !8 B-B w Component Parts No. Description Material Note No.

Compact and Lightweight

-N03 17.46 22.23 22.23 108.2 63.3 34.3 37.1 NPT1/4 NPT3/8 NPT3/8 ZH18DA-N03-N03-N03 22.23 131 73.6 41.1 39 NPT3/8 ZH20DA-N03-N04-N04 23.81 23.81 142.6 74.9 44.1 NPT1/2 NPT1/2 Inch Dimensions when the standard bracket is mounted 229 A ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L L-bracket (Bracket on a single side) K J H E F G 2 x D t C B A Long clamping screw set for 1 station required

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

ITV

x, c: 4 Metric size For single unit z, x, c: 5/32" Inch size Connection size z, c: 6, x: 4 Metric size Manifold z, c: 1/4", x: 5/32" Inch size (1) Weight 100 g or less (without options) Note 1) Indicates the weight of a single unit.

MLGP

9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

VH Series, 4 Way Hand Valve

Scale: 35% 2 (A) 4 (B) 25 25 25 4 (B) 1 (P) 3 (R) 74 1 (P) 62 62 49 2 (A) 45.5 46.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-1/4NPT 13.5 4-1/4,3/8NPT VH32 -N02/N03 (Bottom porting) 2 (A) 44 3 (R) 1 (P) 4-1/4,3/8NPT 4 (B) 5 Series VH Body Mount/Dimensions (mm) / Body mount type Dimensions VH40 -N02/N03/N04 VH40 -N06 Scale: 35% 4 (B) 2 (A) 4 (B) 2 (A) 25 25

Tamper Proof and Flat Head Screw

(Refer to CAT.E501-B "Air Fittings and Tubing" pages 143 and 144 for details.)

Compressed Air Preparation Filter

20 0.19 b 0.3 37 30 0.39 b 0.48 19 40 0.79 b 0.8 1.3 1 Compared with existing products (AFFmC, AMmC, and AMDmC series) 2 Compared with existing products (AMFmC series) 50 1.25 b 1.3 4 60 1.50 b 2.0 25 Color-identifiable elements This eliminates the accumulation of condensate.

Pressure Relief 3 Port Valve with Locking Holes

Example) VHS30-N03-RZ-D Symbol Description Body size 20 30 40 Thread type Nil Rc*1 N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Flow direction: Left to right a Flow direction Semi-standard R Flow direction: Right to left Nil Name plate in imperial units: MPa b Pressure unit Z*2 Name plate in imperial units: psi *3 *3 *3 *1 EXH port thread type: G *2 For thread type: NPT This product

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Description Material Note ASR ASQ Body A Body A 1 1 PBT PBT Body B Elbow body Electroless nickel plated 2 2 Brass PBT Needle Body B Electroless nickel plated Electroless nickel plated 3 3 Brass Brass Needle Seat ring Electroless nickel plated Electroless nickel plated 4 4 Brass Brass Seat ring Spring Electroless nickel plated Steel wire (1) 5 5 Brass U seal Spring Steel wire (1) 6 6 HNBR

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-07SD 8 15.2 41 18.5 29.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 18.5 43.3 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 21 31.8 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 22 32.8 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21 33.6 3/8" 17.9 33.6 47.9 21 1/2" NPT 1/2 23.8 21.7 28.6 12.4 35.2 49.5 25.4

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !6 Needle Spacer Electroless nickel plated Brass POM (2) t !7 Seat ring Gasket Electroless nickel plated Brass NBR, Stainless steel y !8 Spring Retaining ring for hole type C Steel wire Tool steel u !

AS-FG/ASD-FG

(For details, refer to CAT.E501-B "Air Fittings and Tubing" pages 143 through 145.)

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS321FG-N03 NPT 3/8 AS431FG-N04 AS421FG-N04 NPT 1/2 Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.