ZP

Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01-A18 ZPX63HBJ25-B01-A18 109 160 120 171 50-B01-A18 50-B01-A18 40 41.4 28.4 43.2 20.5 32 47 69 13 63 65.1 45.5 67.6 31.5 43 58 80

0.4

or D.

IIIIIII

F . 4 6 3 l b s . ( 2 1 k o ) P.T. 0 216 in, (5 5mm) or, 0 039 in (1mm) T T 0 256 in (6 smm) .75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57

Mechanical Valves Series NVM, NVFM, NVZNI

F . 4 6 3 l b s . ( 2 1 k o ) P.T. 0 216 in, (5 5mm) or, 0 039 in (1mm) T T 0 256 in (6 smm) .75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57

NCQ8

D-rod dia.

•

Width across flats 12 ) ' ;=Yw lll ~ ~ '" 1 I rf" >() I / ~ ~()lliJJ M ~~ ~ ,L (mm) .8 (mm) Model M C D E F G ;. K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45 Mounting position U side D side J Symbol U D Ejector/Valve total stations 02 Stations Symbol Number of ejectors 1 to 10 stations A, B port size (Valve only) 2 SUP/EXH block assembly specifications ... ...

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

Compact 5-Port Solenoid Valve

D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.

Free Mount Cylinder

(D)UKC32 Rc 1 8 Rc 1 8 14 18 26 32 40 50 3 4 8 10 9 10 8 10 16 20 20 22 33 43.5 33.5 34 12 5 to 50 19 21.5 15.5 5 to 50 Model H J L P Q QA R S SA T Y Z MM ZC(D)UKC16 ZC(D)UKC20 ZC(D)UKC25 ZC(D)UKC32 ( ): In the case of a mounted auto switch.

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

Smooth Cylinder/Low Speed Cylinder

Auto Switch Mounting Height (mm) Auto switch model D-A9 D-M9 D-M9W D-M9A D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NT D-G5W D-K59W D-G59F D-F5 D-J59 D-F5W D-J59W D-F59F D-F5NT Note 2) D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W D-A3C D-G39C D-K39C D-A44C D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A9V D-M9V D-M9WV D-M9AV Note 2) D-P4DW D-P3DW Hs Ht Hs Ht Hs Hw Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs

Hydraulic

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

SQ1000/2000

Refer to w. r Option Nil 02 to 24 B None DIN rail length specified Note 2) 1 to 12 (24) Note 1) D side P All stations with back pressure check valve Special specification wiring Note 3) (except for double wiring) 1 to 9 (18) K J T D side D side D side U side D side U side D side U side 1 to 8 (16) 1 to 10 (16) Labeling plate (only for valves with side port specification) External pilot specification

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Weight (g) d T H D1 D2 D3 L1 L2 L3 Model 4 ASD230FM-M5-04 9.3 12.9 17.5 29.4 12 29.6 33.8 28.8 34.6 9.6 10 7.8 11.7 M5 x 0.8 8 30.1 25.1 6 ASD230FM-M5-06 11.6 13.7 20.6 32.5 13 34.6 6 ASD330FM-01-06S 39.6 14 11.6 13.7 29 22.9 38.5 35.2 30.2 14.2 11.8 10.6 R 1/8 12 32.1 27.1 15.8 33.9 8 ASD330FM-01-08S 38.9 15.2 18.5 31 28.2 44.8 6 ASD430FM-02-06S 12.8 17 53 25.2 43.5 18 8 ASD430FM-02-08S

LEC-OM02704CN

BMJ-8() 3. 150()RDP(3)RDN(6) 7 4 7MR Configurator 7.3 a (1) (a) (PC20) (2) OK 7 5 7MR Configurator 7.4 g h i j k l c a b d e f (1) (a) (2) (b) (3) (c) 7 6 7MR Configurator (4) (d) (5) (e) (6) (g) (7) (h) , Enter (8) (i) , Enter (9) (j) LECSC, Enter (10)(k) , Enter (11)(l) (12) (13) (14) (15)( ) (1)(4) 7 7 7MR Configurator 7.5 ,PA05STM( )STM()PA05 g f e c a b d h (1) (a)

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

Electric Actuators

D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL N.O.

LEC-OM07605CN

PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.