VFR

How to Order Sub-plate Assembly System Components System Solenoid valve Speed controller Silencer Tube bore x Length Pilot type Nil R External pilot Internal pilot AS2000-01 (S = 2.5 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS3000-02 (S = 12 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) AS4000-02 (S = 21 mm2) AN110-01 (S = 35 mm2) T0425

ZP

J Connection thread Width across flats H N S U F GN GS B3 M3 x 0.5 3 11 6 02 04 06 08 6 10 15 25 J K ZP T U A8 G B5 M5 x 0.8 5 13 8 Dimensions Per Vacuum Inlet: One-touch Fitting Model Vacuum inlet: Barb fitting G H J Fitting part min. hole size Vacuum inlet direction q Pad dia.

CG5-S

hole (mm) Bore size (mm) A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 15 15 12 17 14 4 8 8 5 28 21.5 5.5 14 2.5 33 25 42 M4 x 0.7 M10 x 1.0 12.5 9.5 46 6 9 74 16 15 18 18 20 20 5 8 8 5 28 23 5.5 14 2.5 33 25 42 M5 x 0.8 M12 x 1.0 12.5 9.5 47 6 9 75 4 Series CJ5-S Dimensions R V Front flange type (F)/CJ5FS CA Rod cover side Piping port 2-M5 x 0.8 Piping port M5 x 0.8

AC

Piping adapter Model File E10-M5 E20-01 to03 E30-02 to04 SAC1000, #5 SAC2000, #5 SAC2503, #5 SAC4000, #5 SAC4006, #5 SAC5000, #5 E50-06 E40-02 to06 E60-06.10 Pressure switch with piping adapter Model File IS1000E-201 to 203 IS1000E-302 to 304 IS1000E-402 to 406 SAC2000, #6 SAC2503, #6 SAC4000, #6 1.1-19 Attachments Pressure Switch: (S) Compact pressure switch can be mounted easily.

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Table of Contents

6 6 6 8 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

Micro Mechanical Valve Series VM1000

-36A VM230U-02-36A VM-36A 78 g Twist selector (3 position) 3 port 5 port 3 port 5 port Red VM230-02-35RA VM250-02-35RA VM230U-02-35RA VM250U-02-35RA Black VM230-02-35BA VM250-02-35BA VM230U-02-35BA VM250U-02-35BA Green VM230-02-35GA VM250-02-35GA VM230U-02-35GA VM250U-02-35GA Yellow VM230-02-35YA VM250-02-35YA VM230U-02-35YA VM250U-02-35YA Foot pedal VM220-02-40A VM230-02-40A 340 g 230 g

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

6 02 ( ) 1 4 02 ( ) 03 ( ) 04 ( ) 02 ( ) 03 ( ) 04 ( ) Port no.

VFS

station 5 station Connector terminal no. 5 station 5 station 6 station 6 station 6 station 6 station 7 station 7 station 7 station 7 station Max. 8 stations Max. 8 stations Max. 8 stations Max. 8 stations Note 1) Maximum stations are 8.

Table of Contents

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet A J 3 30 17 M6 x 0.75 10 8 5 4 6 37 20 14 N S U F GN GS ZP3 Y 015 02 035 U B3 K 3 34 17 M8 x 0.75 11 10 7 6 6 40.5 20 14.5 13 B Dimensions Per Vacuum Inlet: One-touch Fitting 7 Model H J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

Modular F.R.L. Units

AD17-A AD27-A AD37-A AD47-A Spacer Y100-A Y200-A Y300-A Y400-A Y500-A Y600-A Spacer with bracket Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Y600T-A Check valve 5 6 AKM2000-01-A (02)-A AKM3000-(01)-A 02-A AKM4000-(02)-A 03-A Pressure switch 6 IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A IS10M-60-A T-spacer 5 6 Y110-M5-A Y210-01-A (02)-A Y310-(01)-A 02-A Y410-(02)-A 03-A Y510-(02)-A 03-A Y610

Speed Controller with One-touch Fitting

(19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6 42 (42) AS321F-02-12(S)A 12 18.5 29.7 40 34.5 17 43 (43) AS321F-03-06(S)A 6

SYJ3000/5000/7000

(Example) SYJ3120-5M-M3 VJ3000-13-1 -+ Single Double Rated voltage 5 port DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

fitting 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 2 position double solenoid 10-SYJ5000 3 position closed center 3 position exhaust center 10-SYJ7000 3 position pressure center 10 SYJ 3 2 5 WAO 1 M3 3 Body ported Base mounted (4 port) 10 SYJ3 3 5 WAO 2 3 (For manifold use only) Base mounted (5 port) 2 5 10 SYJ 4 WAO 3 3 CE-compliant Port size Nil M5 Nil Q CE-compliant Electrical entry Body

Vacuum System Peripherals:

length 0.6 m L Grommet type Lead wire length 3 m 24 VDC 5 12 VDC 6 C Lead wire length 0.6 m 1 Symbol 2 3 4 5 6 7 8 Order of manifold (Station) Connector type 6 VDC V CL CN Lead wire length 3 m Without connector 5 VDC S 05 07 10 Ejector unit nozzle diameter 3 VDC R Note) When F is required, it is Nil.

42

1(P) VVQ4000-P--02: 1/4 VVQ4000-P--03: 3/8 4(A) 2(B) 1(P') 5(R1) 3(R2) Plug-in type Plug lead type Circuit diagram Individual EXH spacer VVQ4000 R 1 02 163 (Plug-in type) Thread type 115.5 (Plug lead type) 25 Manifold Port size Nil Rc F G N NPT T NPTF 73 12.5 02 1/4 03 3/8 1 Plug-in type 5 Plug lead type 26.4 1(P) 4(A) VVQ4000-R--02: 1/4 VVQ4000-R--03: 3/8 2(B) 3(R') 3(R2) 5(R1) Circuit diagram

VM

6-8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

A

16-24 3 0 1.3 1.06 2.19 4 5/8 1 3/8 2.48 5 1/2 1 3 7/8 3/8 3/4-16 7/8 3/8 3/8 2.59 5 7/8 325 (3.25) 1 5/8 3.9 2 1 1/2 5/8 1 1/4 3/8-24 3 3/4 0 1.57 1.18 2.76 5 1/2 1 5/8 2.72 6 1/2 1 3/8 4 11/16 5/8 1-14 1/2 5/8 2.59 5 7/8 400 (4) 1 3/8 1 5/8 4.7 2 1 1/2 5/8 1 1/4 3/8-24 4 1/2 0 1.57 1.18 3.32 6 1/4 1 5/8 2.72 6 1/2 5 7/16 5/8 1-14 1/2 5/8 D I M E N S I O N S O V E R S I Z E D R O D C E N

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor