Process Pump

Diaphragm Assembled in a clean room.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

rep-modular-e

Hold the element with a spanner to rotate it counterclockwise and remove the element. Spanner Nominal: 7 AFM20 AFD20 Assembly 3) Mount the element. Hold the element with a spanner to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Tightening torque: 0.35 0.05 Nm Spanner Nominal: 7 4) Remove the bowl assembly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Hold the element with a spanner to rotate it counterclockwise and remove the element. Spanner Nominal: 7 AFM20 AFD20 Assembly 3) Mount the element. Hold the element with a spanner to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Tightening torque: 0.35 0.05 Nm Spanner Nominal: 7 4) Remove the bowl assembly.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 1/4, Filtration Level: 5μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Metal with Level Gauge] Metal Case with Level Gauge, Bowl Guard

Type: [Related Components (Replacement Parts)] Related Components (Replacement Elements), Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 1/4, Filtration Level: 5μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Manual] Manual, Bowl Material: [Metal

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 1/4, Filtration Level: 5μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Metal with Level Gauge] Metal Case with Level Gauge, Bowl Guard

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 1/4, Filtration Level: 0.01μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Metal with Level Gauge] Metal Case with Level Gauge, Bowl

Type: -, Connection Method: -, Compressed Air Quality: General Dry Air, Connection Type: [NPT] NPT, Plumbing Thread Nominal: 1/4, Filtration Level: 0.3μm, Operating Environment: Standard, Operating Pressure Range(MPa): -, Flow Direction: [Right] From Left to Right, Drain Cock: [Auto Float Type] N.C. Automatic Drain, Bowl Material: [Metal with Level Gauge] Metal Case with Level Gauge, Bowl

Body Size: 40, Thread: NPT, Port Size: 1/4, Option: B + C, Semi-Standard 1: Metal Bowl, Semi-Standard 2: Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -

Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 40, Thread: N (NPT), Port Size: 02 (1/4), Option: BC (B + C), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Z (NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F)

Body Size: 30, Thread: NPT, Port Size: 1/4, Option: B + C, Semi-Standard 1: Metal Bowl, Semi-Standard 2: NPT Porting requires Z, Name Plate, Caution Plate for Bowl, & Pressure Gauge in Imperial Units: psi, °F, Made to Order: -