Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 8 (Metal Bowl w/Level Gauge), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: R (Flow Direction Right to Left), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2 (Metal Bowl), Semi-Standard 2: Standard

Process Pump

Diaphragm Assembled in a clean room.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

CATALOG

All three series, VQ, SX and SY, are c o m p a c t , l i g h t w e i g h t a n d a e s t h e t i c i n a p p e a r a n c e .

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

CLK1

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

KR

(mm) Model N L A N-applicable tubing O.D.

RLQ

A A1 E1 L1 MM RR1 U1 Part No.

Clamp Cylinder with Lock Series CLK1

17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 Part No.

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Body Size: 40, Thread: Rc, Port Size: 03 (3/8), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 04 (1/2), Option: BC (B + C), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 03 (3/8), Option: D (N.O., Float Type Auto Drain), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 06 (3/4), Option: D (N.O., Float Type Auto Drain), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Option: C (N.C., Float Type Auto Drain), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc, Port Size: 03 (3/8), Option: B (Bracket), Semi-Standard 1: 2R (2 + R), Semi-Standard 2: Standard