Body Size: 40, Thread: G, Port Size: 1/2, Option: N.O., Float Type Auto Drain, Semi-Standard 1: 6 + R, Semi-Standard 2: Standard, Made to Order: -

Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Option: BD (B + D), Semi-Standard 1: 6R (6 + R), Semi-Standard 2: Standard

Process Pump

Diaphragm Assembled in a clean room.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: AFM, Body Size: 40, Thread: G, Port Size: 1/2, Mounting: w/Bracket, Float Type Auto Drain: C [N.C. (Normally Closed)], Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: AFM, Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Mounting: B (w/Bracket), Float Type Auto Drain: C [N.C. (Normally Closed)], Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

This is a legacy product.

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Direct Solenoid

y or co.rus'on as io whrch sor6noid is eneroize, 6r somerims happens 'n rhe.ase ot ishls havin0 a sinsle rensbur trobulbs.lhe Enss p.o1rude s 'htry so rhey may b sn rh.ougn 1 1 = For NVS tol|'|. 4!64 ,r = a60/aov6oHz 51= 12 \hi Dc' 52 = 2a \bft oc' 'Nol avairable:C ass 4 5 LensesaGsealsd by a spcialo rin!

Rectangular Multi-Connector Series KDM

With one-touch littings Can t used loi a lacuum of 039 in Hg llOlorf) lo a pressure of lsopsig (9.gkgl/cm?) |\,4ili srze d32.64. d6. d8 lnch size 6'i 6r-,6'r lrregular shape ensures Copper-lree applications Tubs of dilterent srzes can be used Two types are available, 10 or 20 connectors.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

ITV

Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Note) Refer to the table below for possible mixed combination.

rep-modular-e

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

q"s

Nole 5) When mounting a blanking plate and lhe regulator with diflerent pressure set. olease inlorm SI C ol the oder ol a manifold stalion beside a purchase order, Nole) Refer to the table below tor possible mixed combination, Uod.l rvl03tr tTvl05tl tw201tr rTv203tr tw205tr tw10ltr o tw103tr o a a o tTV't05tr o o a a trv20ttr o o tTV203tr o o a a tTV205tr o o a o Pressure response wilh no

An IR3000/3200-03-A (IR-A series precision regulator) can be mounted on an AF40-03-A or an AFM40-03-A with a Y400(T)-A modular connection bracket. IR-A series precision regulators can also be mounted with older Y400(T) and Y40(T) brackets.