AMX-OM-Q015E

Specifications 1) Standard dew point: -20oC, -15oC 2) Standard dew point: -40oC, -60oC Model Specifications IDG3V4 IDG5V4 IDG10V4 IDG20V4 IDG30AV4 IDG50AV4 IDG3HV4 IDG5HV4 IDG10HV4 IDG20HV4 IDG30HAV4 IDG50HAV4 AFM30-A AFM20-A Mist separator AFM40-A AFM30-A AFM20-A AFM40-A Micro mist separator AFD40-A AFD30-A AFD20-A AFD30-A AFD20-A AFD40-A Component equipment Micro mist separator regulator

Series: AFM, Body Size: 40, Thread: F (G), Port Size: 04 (1/2), Mounting: B (w/Bracket), Float Type Auto Drain: C [N.C. (Normally Closed)], Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: -, Body Size: -, Thread: -, Port Size: -, Mounting: -, Float Type Auto Drain: -, Bowl Type: -, Bowl Guard: -, Drain Port: -, Indicator: -, Flow Direction: -, Drain Cock w/Barb Fitting: -, Pressure Unit: -

Series: AFM, Body Size: 40, Thread: G, Port Size: 1/2, Mounting: w/Bracket, Float Type Auto Drain: C [N.C. (Normally Closed)], Bowl Type: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Pressure Unit: MPa; Temp Unit: °C

Process Pump

Diaphragm Assembled in a clean room.

Modular Type Air Filters Series AF

Description Note AF800 AF900 Buffer 9 1 Body Housing Platinum silver painted 1 6 Aluminum die-casted Aluminum die-casted Aluminum casted Aluminum casted Platinum silver painted A bowl, bowl guard, clamp ring and drain cock are assembled. ( ): A bowl and a drain cock are assembled. -9 does not include a drain cock.

Membrane Air Dryer

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

ITV

-A B310L B410L Y30 Y40 189 Y30L Y40L 133 Y40T For ITV10, use a modular adapter (Refer to page 585 for details). eL-bracket Accessories (Option)/Part No. 178 [Bracket] qAF30-A wAFM30-A Part No.

Micro Mist Separator

: 8 Semi-standard: 8J Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc C4LF-8J-A C4LF-8-A G G C4LFF-8J-A NPT C4LF-8(Z)-A NPT C4LFN-8J(Z)-A Appearance and part No.

Precision Regulator

Fluororubber is used for rubber seal materials. 80 IR 0 Ozone resistant X170 IR 0 Compatible with modular connection brackets Modular Combination Example Description Applicable model IR100--X170 AF20-A AFM20-A Y200-A Y200T-A IR20--X170 AF30-A AFM30-A Y300-A Y300T-A IR30--X170 AF40-A AFM40-A Y400-A Y400T-A qRegulator wAir filter eMist separator rInterface tInterface with bracket Note 1) The

ITV

Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Note) Refer to the table below for possible mixed combination.

rep-modular-e

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

Hold the element with a round cutting to rotate it counterclockwise and remove the element. Round cutting AFM30 AFM40 AFD30 AFD40 Assembly 3) Mount the element. Hold the element with a round cutting to rotate it clockwise and mount the element. Refer to the Check item for the tightening torque. Round cutting Tightening torque: 0.35 0.05 Nm 4) Mount the bowl assembly.

Precision Regulator Series IR1000/2000/3000

(A set of above nos. q to !5.)

q"s

Nole 5) When mounting a blanking plate and lhe regulator with diflerent pressure set. olease inlorm SI C ol the oder ol a manifold stalion beside a purchase order, Nole) Refer to the table below tor possible mixed combination, Uod.l rvl03tr tTvl05tl tw201tr rTv203tr tw205tr tw10ltr o tw103tr o a a o tTV't05tr o o a a trv20ttr o o tTV203tr o o a a tTV205tr o o a o Pressure response wilh no