SMC Corporation of America
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With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01 G1/8 F02 G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I

A side B side COM 3 VFR540 5 A side B side COM Ground 3-5-3 4 Series VFR2000/3000/4000/5000/6000 Precautions Be sure to read before handling.

A side B side COM 3 VFR540 5 A side B side COM Ground 3-5-3 4 Series VFR2000/3000/4000/5000/6000 Precautions Be sure to read before handling.

3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

1.41.6Nm 8 2 VR2110 3 01.0MPa 0.250.8MPa 0.560s (*) 10 (%) F.S. oC( -560 3/ (s C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec

Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm3): 25, Case: [Metal] Metal case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional mounting parts

Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm3): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Manual] With Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional mounting

Dripping Flow Rate(l/min): 15, Oil Storage Capacity(cm3): 25, Case: [Resin] Polycarbonate Case, Inlet Side Connection Type: G, Inlet Side Plumbing Thread Nominal: 1/8, Outlet Side Connection Type: G, Outlet Side Plumbing Thread Nominal: 1/8, Drain Exhaust: [Not Provided] No Drain Cock, Flow Direction: [Right] From Left to Right, Size of Body: 20, Accessory: Without optional mounting

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: C (Bowl Guard), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: 2 (Metal Bowl), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 20, Thread: F (G), Port Size: 01 (1/8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: C (Bowl Guard), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

of a command is not normal. 3.12 Negative response HRS400-A-46 3-16 DOC1003626 Chapter 3 Serial communication Communication example Device Address: No.1 Read seven consecutive data from register 0100h which is out of range.

Chapter 3 Serial communication . 3-1 3.1 Precautions wiring communication . 3-1 3.2 Connected explanation . 3-1 3.3 Communication specification . 3-2 3.4 MODBUS communication function . 3-3 3.5 Precautions for communication . 3-4 3.5.1 Precautions after wiring and before communication . 3-4 3.5.2 Precautions for communicating . 3-4 3.6 Setting method . 3-5 3.7 Communication sequence . 3-

40 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable) R8-5 HRSH250--20 50 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable) R8-5 M5 A HRSH100--40 20 A 3 x 5.5 mm2 (3 x AWG10) (Power supply) 1 x 14 mm2 (1 x AWG6) (Grounding cable) R5.5-5 (Power supply) R14-5 (Grounding cable) HRSH150--40 HRSH200--40 HRSH250--40 3-phase 380 to 415 VAC (50/60 Hz) 30 A Note) An example

Cable size Crimped terminal on the thermo-chiller side Applicable model HRS100-A -20HRS100-W -204 cores x 5.5 mm2 (4 cores x AWG10) (Including grounding cable R5.5-5) R5.5-5 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 30 A M5 HRS150-A -20HRS150-W -2040 A 4 cores x 8 mm2 (4 cores x AWG8) (Including grounding cable R8-5) R8-5 A HRS100-A -40HRS100-W -403-phase 380 to 415 VAC (50/60

phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) 3-phase 380 to 415 VAC (50 Hz/60 Hz) HRS100 Water-cooled 10.0/11.0 refrigeration HRS150 14.5/16.5 94 A Thermo-chiller Standard Type HRS100/150 Series Circulating Fluid Temperature Controller Circulating fluid can be heated without a heater. * For HRS150-A-20 Heating method using discharged heat makes a heater unnecessary.