VQ7-6/7-8

) 2 position/Double : VQ7-6-FG-D-SC Double (reverse pressure): VQ7-6-YZ-D-SC 3 position/Closed center : VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired

Serial Transmission System Series EX250 Series EX500

Note 6) The built-in silencer type does not satisfy the IP67 standard. Note 7) The supply and exhaust ports on U side are branched (to the cylinder port side and coil side). A One-touch fitting for 12 is attached to each port.

DOC1003626

A signal type for contact output signal 4 to 6 can be selected by the customer. Refer to Table 2.4-3 Signal type for contact output signal 4 to 6. (1) (2) (3) Setting for contact output signal 4 to 6 Selection of signal type Table 2.4-2 Setting for output signal 4 to 6 No.

HRX-OM-W069

Indication Item Signal type Contact type A contact (normally open) (1) Output 4 Function Contact output signal 4 B contact (normally closed) Select from Table 2.4-3 Signal type for contact output signal 4 to 6 [OFF] A contact (normally open) (2) Output 5 Function Contact output signal 5 B contact (normally closed) A contact (normally open) (3) Output 6 Function Contact output signal 6

Thermo-chiller

x Width 925 x Depth 955] HRS150-W -20-A 459 [208] HRS150-A-20 A> 4.

energy saving effect

Height 1710 x Width 1185 x Depth 955 HRSH150-Al-A 268 HRSH200-Al-A HRSH250-Al-A HRSH300-Al-A 344 Height 2020 x Width 1230 x Depth 1040 HRSH100-Wl-A 197 Height 1610 x Width 925 x Depth 955 HRSH150-Wl-A 227 HRSH200-Wl-A HRSH250-Wl-A Mounting/Installation Warning 2.

HRS100/150

HRSH 6 Signal for the completion of preparation A signal is output when the circulating fluid temperature reaches the set temperature, when using contact input/output and serial communication. !0 !1 !2 !3 !4 !5 !6 HRSE No.

53

HRSH 090 HRSH 090 6 Signal for the completion of preparation A signal is output when the circulating fluid temperature reaches the set temperature, when using contact input/output and serial communication. !0 !1 !2 !3 !4 !5 !6 HRSH No.

Lightweight and Compact

No anchor bolt is included. 77 A HRS090 Series Standard Type Cooling Capacity HRS090-A-20/40 (50 Hz) HRS090-A-20/40 (60 Hz) 12 12 10 10 Ambient temperature 32C Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 8 8 Ambient temperature 40C Ambient temperature 40C 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature

Table of Contents

double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 4 8 10 12 Rc(PT) Rc(PT) 6 8 10 6, R(PT) 6, R(PT) 6, R(PT) 8 ,R(PT) 8, R(PT) 8, R(PT) 10, R(PT) 10, R(PT) 10, R(PT) 6 8 10 4 6 6 8 One-touch fitting One-touch fitting 6, 10 KM11 1 4 3 8 Rc(PT)female thread 6, 10 One-touch fitting KM12 One-touch fitting One-touch fitting 3 KM13 1 8 1 4 3 8 1 8 1 4 3 8 KM11 One-touch fitting

Proposals for Energy Saving

A 6% reduction of industrial CO emissions from 1990 levels is targeted for 2010. However, presentation of a plan for 10% or more reduction will be demanded.

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

VM

4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !

VQ7-6/7-8

double : VQ7-6-FG-D-SC double (Reverse pressure): VQ7-6-YZ-D-SC 3 position closed center : VQ7-6-FHG-D-SC exhaust center : VQ7-6-FJG-D-SC pressure center: VQ7-6-FIG-D-SC 145 155 76.5 68.5 68.5 86.5 50 50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with

Micro Mechanical Valve Series VM1000

OFF 45 Max. 6 ON 44 Symbol 3 port 24.5 38 (A) 2 (A) 2 12 12 1 (P) (78.5) 50.5 14.5 3 1.5 1.5 28 5 port (A) 2 (A) 2 12 12 3 (R) 3 (R) 1 (P) 14.5 47.8 37.2 17 R port (5 port only) 3 x 1/8 44 * 0.5 MPa supply F .O.F .* 20 N T.T. 45 6 A Series VM100 Series VM100/Side Ported With bracket VM120-01-A-B VM130-01-A-B VM121-01-A-B VM131-01-A-B With bottom mounting thread VM120U-01-A VM130U-01-A VM121U

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

VFS Y 5 3 37 25 22 14 1 VS4 25 25 3/8-2 port 3, 5 port 1/4, 3/8 1 port 9 1/4, 3/8-2 port 2, 4 port 1/8 12 port 1/8 14 port VQ7 VV71-(M Connector type) EVS VFN 100 80 100 80 37 23 U-side 9 2n-1/4, 3/8 14 9 U-side 15 PE port Indicator light Manual override R 4.5 R 4.5 53.5 53.5 9 9 38 9 B B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

in a manifold.

VM

6 Stainless steel Valve spring y POM Piston A !7 Stainless steel Return spring u POM Plunger POM Piston B i POM Valve seat (A) o POM Valve seat (B) 3.5-35 VZM400 Series VZM400 Basic/VZM450-01-00 JIS Symbol SlA VlA SlA VlA 16N F.O.F. 0.5MPa supply 1mm P.T. 2mm O.T. VM/VR 3mm T.T.

ZMA

10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.