Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

18 36 36 35 1" Inch sizes (A) shows the reference dimension after connection.

High Purity Fluoropolymer

Class Size combination Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Connection threads Symbol 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Connection threads A A B C D E F A B C D A B C D A B C D A B C D Applicable tubing size (inch) No.

CQ2

W/o auto switch With auto switch A 62.2 72.2 75 85 88 98 W/o auto switch With auto switch A 53 63 64.5 74.5 76 86 Bore (mm) Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Stroke range (mm) 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 Bore (mm) L1 L LX LT LS LH LG LD L L1 B 36 46 43.5 53.5 53 63 A B A 33.5 8 72.2 46 63 18 95 3.2 20 46 5 11 43.5 63 63 43.5 10 85

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

1

Construction ZZ CXW 20/32 M L A 10 ZZ 15, 16, 25 (mm) A (Max.)

Table of Contents

Reed switch Solid state switch A B HS D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-A7H D-A80H 32, 40 D-F7, D-J79W D-J79, D-F7BAL D-F7W, D-F79F D-F7NTL Auto switch model D-A7H D-A80H A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 9.5 13.5 32.5 36 6.5 9 6.5 9 32.5 36 9.5 13.5 10.5 13 32.5 36 14.5 18.5 Long Stroke Bore size (mm) 32 40 10 13.5 32.5 36 18 24 10 13.5 18 24

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A B 5 st 8.5 8.5 9.5 10 L Bore size (mm) 5 st 45.9 44 46 47.5 O N M K H E D Q V U S C 10 st 42.4 40.5 41.5 42.5 5 st 37.4 35.5 36.5 37.5 10 st 55.9 54 56 57.5 10 st 13.5 13.5 14.5 15 12 16 20 25 3.5 3.5 5.5 5.5 22 28 36 40 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 6 8 10 12 6 8 7 12 11 10 10.5 11 25 29 36 40 19.5 22.5 24.5 27.5 35.5 41.5 48 53.5 6.5 depth 3.5 6.5

Table of Contents

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Air Slide Table

[mm] Rubber Stopper Model A B C D E F MXQ6(A) 41.5 27 17 25 15 10 MXQ8(A, C) MXQ6B 41.5 27 16 25 14 10 MXQ12(A, C) MXQ8B 46.5 28 17 27 16 11 MXQ16(A) MXQ12B 51.5 30 16 28 15 13 MXQ20(A) MXQ16B 58.5 32 19 31 18 13 MXQ25(A) MXQ20B 65.5 34 15 33 15 18 Cap bracket Stroke A RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

Electric Actuators

m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 10 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PC Scale: 10% When two dimensions are shown, the top

Smooth Cylinder/Low Speed Cylinder

B A B A B A B A B A B A B A B A B A B A B Bore size 40 50 63 80 100 6 4 3.5 1.5 6 3 1 0 0.5 6.5 2 4 11.5 10 3 0 0 4.5 0 2 9.5 8 3.5 1.5 5.5 3 1 0 0.5 6.5 2 4 11.5 10 3.5 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 3 5.5 4 2.5 3 9 4.5 6.5 14 12.5 1.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 9 7 6 6.5 4.5 8 10 17.5 16 4.5 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 8 10.5 9 7.5 8 14 9.5 11.5 19 17.5 6.5 6.5

5

D-M9mAV D-A3m D-A44 D-G39 D-K39 D-A9m D-A9mV D-A5m D-A6m D-A59W D-F5m D-J59 D-F59F D-F5NT REA D-P3DWA D-P4DW REB REC A B A B A B A B A B A B A B A B A B A B Bore size 32 10 8 6 4 0 0 4 2 6.5 4.5 11.5 9.5 0 0 3.5 1.5 5.5 3.5 3 1 Smooth Smooth 40 9 9 5 5 0 0 3 3 5.5 5.5 10.5 10.5 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 0 0 4 3 6.5 5.5 11.5 10.5 0 0 3.5 2.5 5.5 4.5 3 2 Low Speed 63 10 9 6 5 0 0

Air Cylinder

Applicable bore size A A1 E1 LB MM NDH10 NX R1 U1 I-020B 20 46 16 20 36 M8 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 I-032B 25, 32 48 18 20 38 M10 x 1.25 9 +0.058 0 9 0.1 0.2 10 14 I-040B 40 69 22 24 55 M14 x 1.5 12 +0.070 0 16 0.1 0.3 15.5 20 Bore size A H MM NDH10 NX1 U1 R2 Y Z 20 18 41 M8 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 11 66 25, 32 22 45 M10 x 1.25 9 +0.058 0 9 0.1 0.2 14 10 14 69 40 24 50

CL

CG-020-24A CG-025-24A CG-032-24A CG-040-24A 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 8 +0.036 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 20 25 32 40 10 10 10 10 (29.3) (33.1) (40.4) (49.2) 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 10+0.036 0 10 12 14 12+0.036 0 14+0.043 0 Tube dia. (mm) Tube dia.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

5 6 6 5 ~ = 10 10 10 11 11 Since this is a guideline including hysteresis, not meant to be guaranteed.

Table of Contents

10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o o g g 1 O-ring seals separate vacuum and atmosphere. t Employs a magnetically coupled rodless cylinder with no air leakage from moving parts. n 1 r a L L e e e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and low particulate

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

Table of Contents

Mep 2000 a = 1000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer

Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10