Part Number Description: PACKING FOR ALD900   Product Line: E   Product Line Description: AIRLINE EQUIPMENT   Family Code: 106   Family Description: ALD DP LUBE UNIT   Class Code: 21   Part Code: 2   Reference Code:  J   Click here to report information errorImage shown may not match exact part number

Air Slide Table

.) * Dimensions other than those listed above are the same as those for the standard type. 64 MXQB Series Dimensions: MXQ 20B [Standard] MXQ 20B-Z Standard type *1 If long bolts are used, they may touch the guide block and cause a malfunction, etc. Use a screw which has an intermediate length between the maximum screw-in depth and minimum screw-in depth.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table (3) Guide block L3 L3 End face L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B Tightening torque (Nm) Model MXP10 MXP12 MXP16 1.67 8-8-5 5 Series MXP Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Enumerate the operating conditions considering the mounting position and workpiece configuration.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Max. 5 Without magnet and switch rail 2-M2 x 0.4 depth 3 2-M3 x 0.5 depth 3.5 For rail mounting For magnet mounting 8 2.5 L 4.7 6-M3 x 0.5 depth 4 15 15 (mm) MA Z W V S M L K J H N Model 6 60 40 44 10 21 20 20 52.4 32 6.5 MXP10-10B 18 90 65 74 20 39 36 36 82.4 50 7.5 MXP10-20B 10 Series MXP Dimensions MXP12 2-M4 x 0.7 depth 6 2-M3 x 0.5 depth 4 Z 3 With metal stopper V K 5 4 G Max. 4 Max

Table of Contents

Model Selection Series CY3B/CY3R Dimensions Basic type CY3B15 to 40 4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN MX MTS ( I ) D X MY CY NA R Mounting nut MG N W K N Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F S + Stroke F CX ZZ + Stroke D-X H 20B

ISG

Contacts/Bulb gland Pressure Source Nil W Nil B C 1a1b (Standard) 2ab Contact Warning Enclosure Type A 20a (Standard) Type A 20b Type A 20c Bulb gland 1.

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

Made to Order

CQ2 series Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A B + Stroke S2 L B + Stroke S1 L B + Stroke S2 L L B + Stroke S1 A + Stroke (S1 + S2) A + Stroke (S1 + S2) Note) In the case of bore sizes 12 to 25 with auto switch, port directions are different.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

CDRBU2W10, 15-S CDRBU2W20, 30-S CRB2 CRBU2 CRB1 2 x S2 2 x S1 2 x S1 MSU 2 x S2 CRJ Rotary actuator CRA1 CRQ2 2 x S1 2 x S1 2 x S1 2 x S1 Rotary actuator MSQ (34.5: Connector type) MSZ A port B port CRQ2X MSQX 2 x R A port B port 2 x R MRQ 1 Auto switch Auto switch 2 5 20.5 (26.5: Connector type) 1.

1

Series CQ2 Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Stroke S2 Part no. denotation B Stroke S1 Part no. denotation A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B + Stroke S2 B + Stroke S1 B + Stroke S2 B + Stroke S1 A + Stroke (S1 + S2)

SV

S2 R1 R2 SG FG 24 V 0 V S1 S2 SG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V S1 S2 R1 R2 SG FG 24 V 0 V Ground either the reception side or the transmission side of the shielding wire shield.

Table of Contents

S2 S3 S0 S1 S2 S3 U0 U1 U2 U3 S0 S1 S2 S3 Without cable Without cable Without cable (2) Max. 16 stations (2) Max. 16 stations (2) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) Max. 16 stations Kit P Kit P Kit J Kit J Kit F Kit F L S The valve is equipped with an indicator light

PC Wiring System Series PCW

8 9 A B C D E F 1 4.1 + *S2 S1 DC24V MADE IN JAPAN 2 3 4 (48.5) (50) 133 10.5 10.5 5.1 4.5 5 5 Models Output unit can be used for mixed connection with PCW series.

Series SV

S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end male thread CQS CQM Rod end nut CQ2 Rod Side Flange Style Rod side flange style: CDQ2F RQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FZ L L1 MU 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 41.5 28 4.5 5.5 25 45 55 13.5 24 44 30.5 4.5 5.5 30 45 55 13.5 25.5 46 31.5 6.6 8 39 48 60 14.5 28.5 D47.5 32.5 6.6 8 42 52 64 15 32.5 Flange bracket material: Carbon steel -X Rod end nut 20B

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 CRQ2 MSQ MRQ Adjustment bolt DA port 20B port 2-M3 x 0.5 (Port location: Side ported type only) 24 1 60 (69) 2 D-97/93A 30 1 If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane

RSQ

QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

: (800) 258-9200-www.stevenengineering.com Rod Side Flange Style Rod side flange style: CDQ2F RQ Bore size (mm) Stroke range (mm) A B FD FT FV FX FZ L L1 MU 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 41.5 28 4.5 5.5 25 45 55 13.5 24 44 30.5 4.5 5.5 30 45 55 13.5 25.5 46 31.5 6.6 8 39 48 60 14.5 28.5 D47.5 32.5 6.6 8 42 52 64 15 32.5 Flange bracket material: Carbon steel -X Rod end nut 20B