PFxx-OMJ0005CN

1.1.21.6.2 -5No.PF-OMJ0005CN-I * 14 FG (49 N () IN () -6No.PF-OMJ0005CN-I * () 6 33 () () 30 m DC(-)() -7No.PF-OMJ0005CN-I * () () CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V

HRX-OM-Y098

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRL Series 3-20 HRX-OM-Y098 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be remotely controlled by

DOC1003626

11 100 + Analog output 1 : Circulating fluid discharge temperature -15V 23 Analog output 1 common ANALOG COM +15V 10 100 + Analog output 2 : Circulating fluid discharge temperature -15V 22 Analog output 2 common ANALOG COM Fig.2-2 Circuit diagram 2.2 Communication specification HRS400-A-46 2-4 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.3 Contact

HRX-OM-W069

11 100 + Analog output 1 : CH2 Circulating fluid discharge temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Circulating fluid electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig.2-1 Circuit diagram 2.2 Communication specification HRL Series 2-4 HRX-OM-W069 Chapter 2 Contact input/output communication /Analog output communication 2.3

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is

PSxx-OMT0005CN

( ) () CE -1060 * 2030 10 1% * -7No.PS-OMT0005CN-A 7 02 PSE57 / M12(3m) 5 (02MPa) L M12(3m) 6 (05MPa) N 7 (010MPa) (1~5V) 02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V

PFxx-OMK0003CN

PF-OMK0003CN-E FG DC(+) OUT() DC(-) 15V 1k -17No. PF-OMK0003CN-E DC(+)DC(+) (OUT1) IN (20 ) -18No.

LFE-OMY0008

3/8 F G 4 1/2 6 3/4 8 1 11 No.LFE*-OMY0008 M12 M12 / / / / M12 LFE-1-A3 3 m 175g LFE-1-D LFE1 (310) 4 45g LFE-2-D LFE2 (310) 4 70g LFE-3-D LFE3 (310) 4 70g 12 No.LFE*-OMY0008 M12 M12 M12 M12 4 4 4 4 M12 IN OUT ( ( ( (2 2 2 2 ) ) ) ) ( ( ( ( ) ) ) ) UP UP UP UP SET SET SET SET DOWN DOWN DOWN DOWN (2 ) () OUT1OUT2 ON : UP ON/OFF SET DOWN ON/OFF 13 No.LFE*-OMY0008 F F.S.( 15V

PSxx-OMG0005CN

UL1585 2 30[Vrms] 42.4[V ]2 UL SUS316L , (ZS-31-X175X186X188X189) () NG NG -5No.PS-OMG0005CN-E * (Nm) RNPTRc1/8 79 RNPT1/4 1214 TSJ Crawford fitting (Swagelock )URJ Cajon (VCR ) FG (50N () () 6 33 ( ) () -6No.PS-OMG0005CN-E 30m DC(-)() () * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMG0005CN-E 0 01 28 C2 PSE56 0 (01MPa) (1) C2 1 (0-101kPa) 3 (-100100kPa) *PSE200 4 (0500KPa) (15V

PSxx-OME0003CN

.=514[V] (1%F.S.40.010.04[V]) F.S. ( 25[]ON-OFF (1 k 1 M A/D 5 V A/D 5(V)1(M)/(1(k)+1(M))4.995(V)0.005V ) Ripple -8No.PS-OME0003CN-F 1 (DC+) 2 3 (DC-) 4 (IN15 V) A A PSE200/PSE300 (ZS-28-C) M() 37104-3101-000FL Tyco Electronics() 3-1473562-4 () XN2A-1430 () -9No.PS-OME0003CN-F PSE200 PSE300 15V 1 k () -10No.PS-OME0003CN-F (A/D ) () 20 2030 -11No.PS-OME0003CN-F PSE530 PSE531 PSE532

EX500-GPR1A.eng

Logical "0" input voltage 0V 5V 19V 26.4V Logical "1" input voltage 15V 26.4V 0V 8V Rated voltage DC24V No. of input points 2 points/8 points ( for M8 connector only ) Specification Wiring Specifications for Input unit Specifications for input block Item Specification Item Specification 100mA or less ( at rated voltage ) 0.65A Max.

Pressure Range: 9 (-1 to -100kPa), Power Voltage: 1 (DC12~15V), Input Signal: 2 (Voltage Style 0~5VDC), Built-in One-touch Fitting: Metric Size One-touch Fitting, Base Type: Single Unit [Standard Base Type], Bracket: B (Flat Bracket for Standard Base Type), Cable Connector: S (Straight Type 3m)

Pressure Range: 3 (.001 to 0.5MPa), Power Voltage: 1 (DC12~15V), Input Signal: 2 (Voltage Style 0~5VDC), Built-in One-touch Fitting: U (Inch Size One-touch Fitting), Base Type: Single Unit [Standard Base Type], Bracket: C (L Type Bracket for Standard Base Type), Cable Connector: L (Right Angle Style 3m)

Pressure Range: 5 (.001 to 0.9MPa), Power Voltage: 1 (DC12~15V), Input Signal: 3 (Voltage Style 0~10VDC), Built-in One-touch Fitting: Metric Size One-touch Fitting, Base Type: Single Unit [Standard Base Type], Bracket: B (Flat Bracket for Standard Base Type), Cable Connector: L (Right Angle Style 3m)

Pressure Range: 1 (.001 to 0.1MPa), Power Voltage: 1 (DC12~15V), Input Signal: 2 (Voltage Style 0~5VDC), Built-in One-touch Fitting: U (Inch Size One-touch Fitting), Base Type: Single Unit [Standard Base Type], Bracket: C (L Type Bracket for Standard Base Type), Cable Connector: L (Right Angle Style 3m)

Pressure Range: 3 (.001 to 0.5MPa), Power Voltage: 1 (DC12~15V), Input Signal: 3 (Voltage Style 0~10VDC), Built-in One-touch Fitting: Metric Size One-touch Fitting, Base Type: Single Unit [Standard Base Type], Bracket: None, Cable Connector: S (Straight Type 3m)

Pressure Range: 1 (.001 to 0.1MPa), Power Voltage: 1 (DC12~15V), Input Signal: 2 (Voltage Style 0~5VDC), Built-in One-touch Fitting: U (Inch Size One-touch Fitting), Base Type: Single Unit [Standard Base Type], Bracket: C (L Type Bracket for Standard Base Type), Cable Connector: S (Straight Type 3m)

Pressure Range: 1 (.001 to 0.1MPa), Power Voltage: 1 (DC12~15V), Input Signal: 3 (Voltage Style 0~10VDC), Built-in One-touch Fitting: Metric Size One-touch Fitting, Base Type: Single Unit [Standard Base Type], Bracket: None, Cable Connector: N (w/oCable Connector)

Pressure Range: 1 (.001 to 0.1MPa), Power Voltage: 1 (DC12~15V), Input Signal: 3 (Voltage Style 0~10VDC), Built-in One-touch Fitting: Metric Size One-touch Fitting, Base Type: Single Unit [Standard Base Type], Bracket: None, Cable Connector: S (Straight Type 3m)