Body Size: 50, Backflow: K (w/Backflow Function), Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

Body Size: 50, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale)

PFxx-OMJ0005CN

1.1.21.6.2 -5No.PF-OMJ0005CN-I * 14 FG (49 N () IN () -6No.PF-OMJ0005CN-I * () 6 33 () () 30 m DC(-)() -7No.PF-OMJ0005CN-I * () () CE 0~50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V

PF-OMN0009_C

./(15V) 3 DC() 4 (1~5V420mA) PF3W5 M8 PF3W5--1/2 15 V/420 mA DC(+) 15 V 1 k 420 mA 15V/420mA NC DC(-) 12 V 300 24 V 600 PF3W5--1T 15 V DC(+) 15V 15 V 1 k 15V DC(-) -22No.PF-OMN0009CN-F 1 3 OFF 2 1 PF3W5--1(15 V ) 2 PF3W5--2(420 mA ) 3 PF3W5--1T(15 V ) LED() -23No.PF-OMN0009CN-F , -24No.PF-OMN0009CN-F PF3W5 , ,, (), DC(+) DC(-) (OUT1) (OUT2) 40 () -25No.PF-OMN0009CN-F

HRX-OM-W060

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRL Series 3-20 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.3.5 Wiring of Run/Stop signal input This product can be remotely controlled by the

HRX-OM-Y098

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-10 Circuit diagram 3.3 Installation HRL Series 3-20 HRX-OM-Y098 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be remotely controlled by

HRX-OM-X037

11 100 + Analog output 1 : CH2 Circulating fluid temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig. 3-11 Circuit diagram HRL Series 3.3 Installation 3-21 HRX-OM-X037 Chapter 3 Transport and Setting Up 3.3.5 Wiring of the Run/Stop signal input This product can be remotely controlled by

DOC1003626

11 100 + Analog output 1 : Circulating fluid discharge temperature -15V 23 Analog output 1 common ANALOG COM +15V 10 100 + Analog output 2 : Circulating fluid discharge temperature -15V 22 Analog output 2 common ANALOG COM Fig.2-2 Circuit diagram 2.2 Communication specification HRS400-A-46 2-4 DOC1003626 Chapter 2 Contact input/output communication / Analog output communication 2.3 Contact

HRX-OM-W069

11 100 + Analog output 1 : CH2 Circulating fluid discharge temperature -15V 23 Analog output1common ANALOG COM +15V 10 100 + Analog output 2 : CH2 Circulating fluid electric conductivity -15V 22 Analog output 2 common ANALOG COM Fig.2-1 Circuit diagram 2.2 Communication specification HRL Series 2-4 HRX-OM-W069 Chapter 2 Contact input/output communication /Analog output communication 2.3

Body Size: 60, Backflow: w/o Backflow Function, Thread: N (NPT), Port Size: 10 (1), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Y (Upward), Pressure Units: Z (Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale), Made to Order: X406 (0.4 MPa Setting

Body Size: 60, Backflow: w/o Backflow Function, Thread: NPT, Port Size: 1, Options: Square Embedded Type Pressure Gauge, w/Limit Indicator, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Upward, Pressure Units: Unit on Product Label: psi, Pressure Gauge: MPa/psi Dual Scale, Made to Order: 0.4 MPa Setting

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

Table of Contents

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

VFS

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

V100

DC EZ, TZ, DZ, YZ (100 VDC or more) EZ, TZ, DZ, YZ (100 VDC or more) Z EZ, TZ, DZ, YZ (24 VDC or less) Note) W/ surge voltage suppressor is available only for grommet type. 4-8-3 4 Series VP300/500/700 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. Caution Change of Actuation Caution How to Use DIN Terminal 1.

VQ7-6/7-8

Instructions P.37 5 Port Solenoid Valve/Precautions P.38 to 40 Specific Product Precautions P.41, 42 Series VQ7-6 ISO Standard Solenoid Valve Size 1/Single Unit How to Order Valves VQ7 6 FG S 3 Passage symbol (A) 4 (B) 2 Connector Nil O SC DIN terminal block (with connector) DIN terminal block (without connector) Prewired connector FG 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Sub plate port size YZ

VQ7-6/7-8

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 Sub-plate port size Thread type Rc Nil Without sub-plate Side ported Rc 1/4 Nil A02 A03 B02 B03 YZ NPTF T G F Side ported Rc 3/8 Bottom ported Rc 1/4 1 (P) 5 (R1) 3 (R2) Bottom ported Rc 3/8 (A) 4 (B) 2 Port R is Rc

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is

Cost effective and clean looking, series AR regulators offer various pressure range settings to accommodate most applications. The locking adjustment knob prevents accidental setting changes. The modular design of the AR series connects with other SMC air preparation equipment.Modular type regulator, Optional embedded pressure gauge , Available with built-in backflow mechanism , Knob is