CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Mechanical Valves Series NVM, NVFM, NVZNI

'A EI 0.69 (17.5) 0.20 (5) 0.59 (15) 0.10 (2.51o.71 (18) 0 3 7 (s 5) (J 0.08 in. (2 0 mm) T T 0-14 rn(3 5 mml -75 PSIG (5 Kgflcm2) Millimeters in Parentheses N\2M450-N01-08 e+ _i i MAX.H ' May be rotated without changing porl location A tJ D E to H 5.24 (1 34) 1 . 1 8 (30) 3.94 (100) 1 3 4 (34t 0.69 (17.5)o.20 {51 ).59 (15) 0.1 t4.5 F-(J-F 3.31 lbs (1.5 Ko) T.T 40" '75 PSIG (5 Kgf/cm2) Millimeters

IIIIIII

'A EI 0.69 (17.5) 0.20 (5) 0.59 (15) 0.10 (2.51o.71 (18) 0 3 7 (s 5) (J 0.08 in. (2 0 mm) T T 0-14 rn(3 5 mml -75 PSIG (5 Kgflcm2) Millimeters in Parentheses N\2M450-N01-08 e+ _i i MAX.H ' May be rotated without changing porl location A tJ D E to H 5.24 (1 34) 1 . 1 8 (30) 3.94 (100) 1 3 4 (34t 0.69 (17.5)o.20 {51 ).59 (15) 0.1 t4.5 F-(J-F 3.31 lbs (1.5 Ko) T.T 40" '75 PSIG (5 Kgf/cm2) Millimeters

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Pad Type Lislf} Vacuum Entry"Mounling SmIxj TlTeEif ~~zeJ n .s ."0-"16 'DiiltiMi) j 04 4 Tube 06 6 Tube ~I 08 B Tube ~20 ':" 32 140-5Il : I 4 h 2 4 6 8 10 13 16 20 25 32 40 50 Ast type T Rat with rib DNptype Bellows type M5 x Q.8 '1\6' M6 x 1 2' U A8 Ma XI I ~1 B4 M4 x 0.7 B5 M5 x O .8 J~ 86 M6 X' , ,'. , Bjj M8xl.25 AS j!

CL

Different side Auto switch model 60C Nylon tarpaulin J 1 pc. Different side 1 pc.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan

0.4

G2 2 sets of regulator unit Note 10) 08 Note 4) Note 8) 8 stations G3 3 sets of regulator unit SI unit specifications SI unit part no. Symbol Note 10) J Note 5) Note 8) Note) Max. 16 stations. (Special wiring specifications) With ejector unit NPN output (+COM.) EX510-S002A Nil N K Note 6) Special wiring spec. (Except double wiring) PNP output (COM.)

V

K L M N ZFB100-04 4 48 26 53 22.5 12.5 24 17.5 15 50 15.5 14.4 12.8 8.5 ZFB100-06 6 ZFB200-06 6 MM size 52 28 65 24.5 13.5 27 19.5 16 61 17.5 16.6 15.2 9.5 ZFB200-08 8 ZFB300-08 8 57 30 69.5 27 14.5 29.5 21 17 65 21.5 18 18.5 11 ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

CQ2

B bracket A bracket YB-03 YU-03 YA-03 32, 40 25 YB-05 YU-05 YA-05 50, 63 40 Bore size (mm) YB-08 YU-08 YA-08 80 90 Part No. B D E J M O YB-10 YU-10 YA-10 100 160 12 YB-03 7 25 9 34 11.5 Depth 7.5 32, 40 12 YB-05 9 32 11 42 14.5 Depth 8.5 50, 63 16 YB-08 11 38 13 52 18 Depth 12 80 19 YB-10 14 50 17 62 21 Depth 14 100 Weight (g) Bore size (mm) Part No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 Bore size (mm) O M J E D B Part no. 100 YU-10 YA-10 YB-10 160 K (Width across flats ) YB-03 32, 40 11.5 depth 7.5 34 9 25 7 12 H (With locking) YB-05 50, 63 14.5 depth 8.5 42 11 32 9 12 YB

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

JIS Standard Hydraulic Cylinder

R J CHM MM MM CHS D E D E CH2 CH2 LH LT Width across flats G CHA Width across flats G 4 x CD C K MA MA Y Y X X K M Related Products LX Z + Stroke SS + Stroke A SS A BB ZZ + 2 strokes D(mm) Bore size (mm) Stroke range (mm) C B BB LX R LW GA LT LH F J Y X SS Z S P M NA CD 32 25 to 800 109 58 38 14 21 11 35 14 37 104 88 M10 x 1.25 13 11 3/8 39 136 57 14 29 40 0.15 0.18 25 to 800 118 65 45 10

VM

Toggle lever VM1010-4N-08 VM1010-4NU-08 VM1110-4N-08 VM1110-4NU-08 JIS Symbol/2 port 3 port Panel mounting hole T.T. (Total Travel) 40 Lock nut thick 2 0.5 MPa supply Lock nut thick 2, across flats 14 Applicable tubing T0425 TU0425, T0403, TS0425 VM1110-4N-08 VM1010-4N-08 Bottom ported 3 port 2 port VM1110-4NU-08 VM1010-4NU-08 Applicable tube 4 N F.O.F. 40 T.T.

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

Fluoropolymer Piping Equipment

Dimensions Panel mount union reducing: LQ1P-R Panel thickness (Max. t) J W1 W2 M1 M2 B side A side H2 H1 E2 E1 L1 L2 Class 4 and 5 Panel hole diameter K Metric Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

BH2-080 BH2-100 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BDS-04M BDS-05M BDS-06M BDS-08M BDS-10M BD1-04M BD1-05M BD1-06M BH1-080 BH1-100 40 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 50 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 2) CH2E

Table of Contents

Fluid Name and Option Fluid Name and Option Option symbol and body material Brass or BC6 Stainless steel J A H A H A H D N G, J E P A H A H B J E N, P Option symbol and body material Brass or BC6 Stainless steel F, B L, J B J J A H A H A H D N G, J E P A H A H A H B J D, E N, P Fluid (Application) Fluid (Application) Caustic soda (25% ) Gas oil Silicon oil Fuel oil (up to 60C) Fuel oil (

Table of Contents

W K CY1RG50/63 HB HC N X MX H MTS CB HA 2-P (Piping port) 4-J x E (Depth) 4-Counterbore dia.