Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Series VQ Base Mounted Metal Seal/Rubber Seal

A combination of J and N is unavailable. Indicate R for the valve with external pilot. 8 stations 08 Note 1) Insert L (top piping) or B (bottom piping) for elbow type. (VQ1000 only) Example) B6 (Elbow One-touch fittings for 6, bottom piping.) Indicate LM for models with elbow fittings and mixed cylinder port sizes.

Table of Contents

IS1000M-50 IS1000M-60 IS1000M-60 IS1000M-60 Y21001 (02) Y310-(01) 02 Y310-(01) 02 Y410-(02) 03 Y510-(02) 03 Y61003 (04) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01

Prevents Micro-Bubbles

A (OUT) port A A LLH2A-03-02-C 1 set 1 set Manifold base part no. Non-locking Locking LVH20A-02-C 2 sets 2 sets Valve part no. (stations 1 & 2) LVH20AL-02-C 1 set 1 set Valve part no.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21

V

Wiring Specs 16 16 Applicable up to 16 Solenoids 10 Pole (PH) Connector Symbol Station Note 02 2 Single .. .. Wiring Specs 08 08 Applicable up to 8 Solenoids 26 Pole (P) Connector Symbol Station Note 02 2 Single .. ..

Table of Contents

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

Vacuum Unit

P With manifold common release pressure supply (PD) port Cannot be selected when e is J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping. u Vacuum (V) port W With exhaust interference prevention valve Exhaust interference prevention valve Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" 5 When more than one option is selected, list

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

18.5 25.2 18.5 34.5 34.9 34.4 29.4 39.9 34 34 13.2 18.5 (17.5) AS221F-02-10 AS221F-02-09 10 5/16" 18.3 44.5 35.3 18.5 21 27.2 21 36.4 18.2 36 36 15.2 1/4 1/4 AS321F-02-06 AS221F-02-11 6 3/8" 12.8 17 35.3 21 18.8 44.5 27.8 36 60 18.5 39.3 AS321F-02-08 AS321F-02-07 8 1/4" 15.2 18.5 27.8 17 41 29.5 39.3 63 13.2 60 48.3 43.3 42.8 37.8 21.3 23 AS321F-02-10 AS321F-02-09 10 5/16" 23 18.5 21 43.3

Compact and Lightweight

One-touch One-touch One-touch 06 01 08 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH10DA07 07 09 One-touch One-touch One-touch 07 N01 09 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH13DA08 10 10 One-touch One-touch One-touch 08 02 10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch

LEC-OM07605CN

0.01 0.02 0.02 1 [J] 5.6 22 64 [J] 56 220 640 (5) [] 2.5 1.2 0.9 (3) [] 20 1 [J] 5.6 22 64 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

5

Applicable mounting bracket T2 V M W Type A mounting bracket Type B mounting bracket Joint 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 T1 80 YU-08 YA-08 YB-08 2 x O counterbore 2 x D through B J 100 YU-10 YA-10 YB-10 E K (Width across flats ) H (With locking) Material: Stainless steel (mm) Part no.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Adjustment of Cushion Effect (Smooth Start-up, Soft Stop) Caution Since the external slider and piston slider are directional for size 10, refer to the drawings below when performing disassembly or maintenance.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

08 AS221FG-N02-05 17.7 24.9 34.2 34 18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3

Secondary Batteries

Enclosure: IP65 compliant Series 2 4 90-SV2000 90-SV4000 SUP/EXH block assembly specifications SI unit Protocol type DeviceNet Symbol Q Internal pilot External pilot Nil R Valve stations P, E port location U D B Note Symbol 02 Stations U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) 2 stations (1) Double wiring specifications 08 02 8 stations 2 stations (

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

With Factory Installed

AI Inlel pressure 0.7MPa /71 kgf/cm21 , outlel pressure 0.2MPa 1 2.0kgflcm21. flow rale 20 / min (ANR) AR2001-02 AR2001-02 0.25 -r-=:: lf~1 ~ "'" ~ :'.. ::;; 0.2 ~r. " 5 OJ> ~ o . 3k-1-j.-:=.