Modular F.R.L. Unit

) 06 (10) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS40-06 02 03 04 E600VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) 06 10 06 10 E60006 10 E600E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02

smcmaintenancepartslist

) 04 T-interface Note 6) Note 7) Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure switch with piping adapter Note 7) Y24-01 02 Y34-01 02 Y54-03 04 Cross spacer Note 7) Y14-M5 Note 1) in part numbers for a round

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

V 02 ( ) 1 4 02 ( ) 03 ( ) 04 ( ) 02 ( ) 03 ( ) 04 ( ) Port no.

A

21 ANA1-04 1/2 60 36 98 30 24 ANA1-06 3/4 90 110 111 46 36 ANA1-10 1 160 180 132 50 41 ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871

SQ1000/2000

When ordering with manifolds, add "-N" at the end of the manifold number. 1 2 3 4 5 6 7 8 ... n: Stations 53 Silencer cover Blanking plug (for One-touch fitting) L Dimensions 04 06 08 10 Applicable fitting size d 4 6 8 10 A Model A L D KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 This is inserted into the cylinder port and SUP and EXH ports that are not used.

•

ll~l m ~10 1 Dw l Width across flats 12 I '" '-i j=,l1, >-IO~:~ 1 I , !

CV/MVGQ

ML2B 0.030 0.060 + 0.048 0 Y-J010B 3.2 8 10 3.3 3.3 0.030 0.060 + 0.048 0 Y-J016B 6.5 12 10 5 5 C J G5-S CV MVGQ CC RB J D-X 20Data 10-15-9 10 Valve Mounted Cylinder Single Acting, Single Rod, Spring Return/Extend Series CVJ3 10, 16 How to Order Stroke (mm) Electrical entry G L M Grommet L plug connector M plug connector 10 16 15, 30, 45, 60 15, 30, 45, 60 Bore size 10 16 10 mm 16 mm Light

CV/MVGQ

10-15-31 10-15-44 ML2B Nonrotating rod C J G5-S CV Series CV3/CV3K 40, 50 63, 80 100 Standard 10-15-50 MVGQ Double acting Nonrotating rod 40, 50 63 CC 10-15-63 RB Series CVS1/CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 2 Series CV Valve Mounted Cylinder

Table of Contents

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

CL

38 49 61 64 54 59 67 72 76 10 13 18 23 25 32 40 40 52 52 10 12 15 17 19 10 10 10 14 14 85 95 102 113 124 27 32 32 37 37 16 20 20 25 30 to 500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

CA2

size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B B1 C A AL D E F G H H1 J K KA M MM N S S ZZ 156 169 180 214 225 ZZ 146 159 170 204 215 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 11 11 14

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

HRX-OM-M090

9.6.3 HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018-10-MT 0.8 80 0.7 70 Circulating fluid pressure [MPa] 0.6 60 0.5 Pump head [m] Available area 50 0.4 Outlet60Hz 40 0.3 30 Outlet50Hz 0.2 20 Return port 0.1 10 Available area 0.0 0 0 5 10 15 20 25 5 Circulating fluid flow [L/min] Fig 9.6-3 Pump capacity(HRS012--10-T, HRS018--10-T, HRS012--10-MT, HRS018--10-MT) 9.6.4 HRS012--20-T, HRS018

HRX-OM-O021

(When automatic fluid filling [Option J] is selected.) Overflow port This is necessary when automatic fluid filling function.Discharge excess circulating fluid when the fluid level in the tank rises. (When automatic fluid filling [Option J] is selected.)

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

HRX-OM-R016

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

Vacuum

{check leakage). 98 lloninntal Type Uacuum Entny: Witlrout BullcD lrllilh 0ne-Iouch Tube litting Specif ications 2, 4,6, 8, 10, 13, 16, 10,13,16,20 10, 16,25, 4D 6,8, 10, 13, 16,20 NBR (black), Silicone (white), Urethane (brown), Ftuorine (black with mark), Conductive NBR (black with mark), Conductive Silicone {black with NBR (50 J Silicone rubber (40"J. Urethane rubber.