Size: 5 (3/4 Basis), Thread: N (NPT), Port Size: 04 (1/2)

Type: Speed Controller, Body Material: [Aluminum] Alloy Aluminum, Control Method: Meter Out / In, Format: [Straight] Straight, Environment, Applications: Standard, Thread Portion Material: [Aluminum] Aluminum Alloy, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Both sides tapped, Connection Dia.: 1/2, Option: None, Types of Screw: NPT, Body Size: 1/2 Standard,

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS421FG-N04 63, 80, 100 NPT 1/2 ASN Note 1) Meter-out and meter-in types can be visually differentiated by the flow direction symbol on the resin body.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

rotations Number of needle rotations OUT-Exhaust Flow IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm 2) Number of needle rotations Number of needle rotations Inlet pressure (MPa) IN-OUT Flow OUT-Exhaust Flow Inlet pressure: 0.5 MPa Effective area (mm 2) Flow rate (l/min

P

Speed Controller/In-line Type AS2000-N02-X800/AS3000-N03-X800/AS4000-N04-X800 P .G. information Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number

100

Max. suction flow rate 3 types available: 100, 300 *1 , and 600 *1 L/min (ANR) *1 Branch + Port exhaust Silencer Air consumption Max. suction flow rate: 600 L/min (ANR) 91% reduction (Under SMCs measurement conditions) ZL6 Series Suction: 300 L ZL3 Suction: 600 L Reduced by the pressure switch for vacuum with energy saving function and efficient ejectors ZL6 10% reduction Suction: 100 L ZL1

IR1000/2000/3000

min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 1.2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 0.9 l/min (ANR) or less (at maximum set pressure) Bleed hole: 9.5 l/min (ANR) or less (Supply pressure: 1.0 MPa) Exhaust port: 2 l/min (ANR) or less (at maximum set pressure) Bleed hole: 3.5 l/min (ANR) or

Dual Speed Controller with One-touch Fitting Series ASD 1

min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530F ASD630F 1500 1000 14 10,11 12 20 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area

ASD

min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500 06,

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N03 (Screw-in NPT 3/8), VAC: N04 (Screw-in NPT 1/2), EXH: N04 (Screw-in NPT 1/2), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 20 (ø2.0mm), Vacuum Pressure: L (-48 kPa: ZH05 to 13D*A; -66 kPa: ZH15 to 20D*A), SUP: N03 (Screw-in NPT 3/8), VAC: N04 (Screw-in NPT 1/2), EXH: N04 (Screw-in NPT 1/2)

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

q"s

*r-r-r --r| | | a High-speed | | | response time I I I specifications t t l | | t---{ Pressure display unit | | t--fMfi--l | | f--fkof/cm, l I I [s-f b "t| | I-+-fEr_--] | | tsT kp " ] t l t l I I Cable connector type I S I Straiqht tvpe 3 m I I L I Riqht anqle tvpe 3 m I I j N lWithout cable connector I l L-Bracket Model 7 . l00O tvoe v : 2000 tvoe Pressure [rPa 2 kqf/cm, 3 bar 4 PSI kPa

Precision Regulator

min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 4.4 L/min (ANR) or less 11.5 L/min (ANR) or less Rc 1/4, 3/8, 1/2 Rc 1/8 (2 locations) Rc 1/4, 3/8, 1/2 Port size Pressure gauge port Rc 1/4 Rc 1/4 Rc 1/8 SRP Ambient and fluid temperature Weight (kg) 5 to 60C (No freezing) 0.64 0.71 0.35 0.30 0.14 SRF Note 1) With the condition of no flow on the output side.

Size: 3/4 Basis, Thread: Rc (Metric thread, M3, M5), Port Size: 1/2, Option: L [Low Temperature (-30 to 60°C)], Lock Nut: -

Size: 3/4 Basis, Thread: NPT, Port Size: 1/4, Option: L [Low Temperature (-30 to 60°C)], Lock Nut: -