CA2

, 16 85 + 40 (n 4) 2 n = 4, 8, 12, 16 90 + 40 (n 4) 2 n = 4, 8, 12, 16 105 + 40 (n 4) 2 95 + 40 (n 4) 2 n = 4, 8, 12, 16 n n = 4, 8, 12, 16 2 (Different sides and same side) With 1 10 65 75 80 90 D-Y69/Y7PV D-Y7WV n 90 + 30 (n 4) 2 80 + 30 (n 4) 2 n = 4, 8, 12, 16 10 + 30 (n 2) 2 n = 2, 4, 6, 8 65 + 30 (n 4) 2 n = 4, 8, 12, 16 75 + 30 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 (

HRX-OM-W038

The weight will increase by 1kg when option J [Automatic fluid filling] is selected. 12 For option J [Automatic fluid filling port]. 13 Copper, bronze and brass is not included when option M [DI water piping] is selected. 14 In case of option B [Earth leakage breaker], the breaker is changed to an earth leakage breaker. 15 This fitting is not included when option T [High pressure pump] are

HRX-OM-M090

Projection is not included. 12 Weight when the circulating fluid and facility water (for water-cooled type) is not included. The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

HRX-OM-R005

The weight will increase by 1kg when option J [Automatic fluid filling] is selected. 12 For option J [Automatic fluid filling port]. 13 Copper, bronze and brass is not included when option M [DI water piping] is selected. 14 In case of option B [Earth leakage breaker], the breaker is changed to an earth leakage breaker. 15 For water -cooled type.

HRX-OM-O021

The weight will increase by 1kg when option J [Automatic fluid filling] is selected. 12 For option J [Automatic fluid filling port]. 13 Copper, bronze and brass is not included when option M [DI water piping] is selected. 14 In case of option B [Earth leakage breaker], the breaker is changed to an earth leakage breaker. 15 For water -cooled type.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

HRX-OM-R016

Projection is not included. 12 Weight when the circulating fluid and facility water (for water-cooled type) is not included. The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

Smooth Cylinder/Low Speed Cylinder

12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth Cylinder Series CG1Y With Mounting

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

size 1(IN), 2(OUT) port G 2 x M thread depth N [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5 8 Size Port size Grommet Grommet with PCB Conduit J K J K J K 20 1/8, 1/4 34.6 28.5 40.3 38 41.9 48.9 30 1/4, 3/8 43 31.1 48.7 41 50.3 51.9 21 Direct Operated 2-Port Solenoid Valve JSX Series JSX20, 30 Dimensions

5

Bore size (mm) B D E J M O d1 d2 YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 L UT YB-08 80 16 11 38 13 52 18 depth 12 C UA YB-10 100 19 14 50 17 62 21 depth 14 Material: Chromium molybdenum steel (Nickel plating) Part no. Bore size (mm) T1 T2 V W RS Weight (g) Part no.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

15.8 3.5 19 20.95 110 52.45 42 15.8 3.5 19 20.95 124.6 60.95 47.7 15.8 3.5 24 26.75 124.6 60.95 47.7 15.8 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 Rc 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Dimensions Applicable tubing O.D. d Inch Size Metric Size L3 (1) Model L3 Model Weight (g) Weight (g) M1 d M1 D1 D2 L2 L1 D2 D1 L2 L1 d Min. 24.9 25.5 Min. 24.9 25.5 26.6 27.6 28.7 30.2 31.5 Max. 27.7 28.5 Max. 27.7 28.5 29.8 32.6 33.7 35.2 36.5 6 7 8 9 12 18 21 24 26 31 3.2 4 6 4 6 6 8 6 7 8 12 13 26 31 AS1001FM-23 AS1001FM-04 AS1001FM-06 AS2001FM-04 AS2001FM-06 AS2051FM-06 AS2051FM-08 AS1001FM

REA/REB

wire (NPN) 2-wire Relay, PLC CV 5 V, 12 V IC circuit 3-wire (PNP) MVGQ 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) CC 2-wire 12 V RB For 25, 32, 40 Lead wire length (m) Load voltage Indicator light J Pre-wire connector Special function Type Electrical entry Wiring (Output) Applicable load AC DC Auto switch

REA/REB

wire (NPN) 2-wire Relay, PLC CV 5 V, 12 V IC circuit 3-wire (PNP) MVGQ 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) CC 2-wire 12 V RB For 25, 32, 40 Lead wire length (m) Load voltage Indicator light J Pre-wire connector Special function Type Electrical entry Wiring (Output) Applicable load AC DC Auto switch

Fluoropolymer Piping Equipment

E H J L N M W (T) X Min. port size LQ1F41 12 28 30 53 60 21 33.1 34 12 10 9.4 LQ1F42 10 58 7.4 LQ1F51 19 32 36 58 65.2 26 40 41 14 16 15 LQ1F52 12 63.2 9.4 LQ1F61 25 39.5 36 69 81.5 49 51 14 22.5 21.2 LQ1F62 19 15 3 SMC (W) (M) N J SMC 3/4 19 X H (E) (T) Class 4, 5 JIS 10K flange W Note) H Inch sizes Model Applicable tubing O.D.

NCQ8

J M2 bolt circle W M1 E I dia.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

I J 25.3 37 26 5 14 8 12.5 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 40 31 28.3 10 12.5 6 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 38 43 12 6 31.3 12 19.5 20 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 47 8 38.3 52.5 15 27 26 16 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 44.5 58.5 58 11 32 20 16.5 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth