This is a legacy product, and replaced byASV310F-N01-07S, SPEED EXHAUST CONTROLLER *LQA, AIRLINE EQUIPMENT, ASV 1/8 INCH STANDARD (NPT), .05280 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores,

This is a legacy product, and replaced byAS2201F-N01-07S, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, CD, AS***F 1/8INCSTANDARD (NPT), .04188 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable

This is a legacy product, and replaced byAS2201F-N01-07S, INVALID P/N (SGL P/N SYST *LQA, AIRLINE EQUIPMENT, AS***F 1/8INCSTANDARD (NPT), .03968 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores

This is a legacy product, and replaced byAS2201FG-N01-07S

This is a legacy product, and replaced byAS2311F-N01-07S, FLOW CONTROL W/FITTING *LQA, AIRLINE EQUIPMENT, AS***F 1/8INCSTANDARD (NPT), .04254 lb, ModelPort sizeMaterialSensor cableMassWith sensor cableWithout sensor cable01R 1/8M5 x 0.8Case: C3604 + nickel plated, Piping port/pressure sensor: Stainless steel 316LPSE56 - : Oil proof heavy-duty vinyl cable with air tube, 3 cores,

VM

VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM120-01-30B VM-30AG Green VM120-01-

Proposals for Energy Saving

VM132-M5-07 VM132-M5-07S Toggle lever VM130-01-08 VM132-M5-08 VM-30AR Red Push button (Mushroom) VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM-30AB Black VM-30AG Green VM-30AY Yellow VM-32AR Red Push button (Extended) VM130-01-32R VM130-01-32B VM130-01-32G VM130-01-32Y VM132-M5-32R VM132-M5-32B VM132-M5-32G VM132-M5-32Y VM-32AB

Flow Control Equipment

AS13l1F AS13l1F AS23l1F AS33l1F AS43l1F / 1 8, / 1 4 / 1 4, / 3 8 / 1 2 Elbow (Metal Body) M5 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS12l1 AS22l1 AS22l1 AS32l1 AS42l1 / 1 8 4.1-7 / 1 4 / 3 8 / 1 2 In-line 6 to 20 20 to 32 20 to 40 40 to 63 63 to 100 AS1001F AS2001F AS2051F AS3001F AS4001F 4.1-9 Dual Speed Controller 6 to 20 20 to 32 20 to 40 20 to 40 40 to 63 63 to 100 M5 ASD230F ASD330F

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

Table of Contents

-ASD330F-01-08 10-ASD230F-M5-06 2.

CYP

Since alignment variations increase as the stroke gets longer, use a connection method which can absorb these variations and consider measures to control particulate generation. 10-AS2301F-01-06-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) 10-ASD330F-01-08 10-ASD230F-M5

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

Table of Contents

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Ejector Valve Unit Series ZYY/ZYX 1

port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector Valve Unit Series ZYY/ZYX Ejector Valve Specifications Series SY3000/SX3000 in manifold/split base combinations DIN rail mount type can be mounted ZY3-07S

Body Size: 1/8 Basis, Thread: NPT, Port Size: 1/8, Applicable Tube OD: 3/16", Sealant: Sealant

Body Size: 1/8 Basis, Thread: NPT, Port Size: 1/8, Applicable Tube OD: 5/16", Sealant: Sealant

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/8, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/8, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable