Body Size: 3/8 Basis, Thread: M5 Metric/10-32UNF/R(PT), Port Size: 3/8, Applicable Tube OD: Ø1/4", Sealant: Sealant, Lock Nut: -

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 1/4, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 07 (Ø1/4"), Sealant: S (Sealant)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Applicable Tube OD: 07 (Ø1/4"), Sealant: S (Sealant)

Flow Control Equipment

ASD530F ASD630F / 1 8 / 1 4 4.1-13 / 1 4 / 3 8 / 1 2 Applicable cylinder bore size (mm) Port size on piping side Port size in cylinder side Page Elbow (Metal Body) M3 M5 1 2 1 / 1 8 / 1 4 / 3 8 / 1 2 / 3 4 / 1 4 1 / 1 2 Model AS1200 AS1400 AS2200 AS3200 AS4200 M3/M5 M3 2.5 to 6 6 to 20 20 to 40 40 to 63 63 to 100 4.1-19 / 1 8, / 1 4 / 3 8 / 1 2 In-line M3/M5 / 1 8, / 1 4 / 1 4, / 3 8 2.5

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Min. 1/8" 5/32" 3/16" 1/4" 1/8" 5/32" 3/16" 1/4" 5/16" 5/32" 3/16" 1/4" 5/16" 3/8" AS131FM-U10/32-01 AS131FM-U10/32-03 AS131FM-U10/32-05 AS131FM-U10/32-07 AS231FM-N01-01S AS231FM-N01-03S AS231FM-N01-05S AS231FM-N01-07S AS231FM-N01-09S AS231FM-N02-03S AS231FM-N02-05S AS231FM-N02-07S AS231FM-N02-09S AS231FM-N02-11S 19.8 20.3 21.3 21.6 24.4 24.9 26.8 29.9 30.9 30.6 31.1 34.2 35.2 38.7 8.4 9.3

Micro Mechanical Valve Series VM1000

-01-00 VM430-01-01 VM430-01-01S VM430-01-02 VM430-01-02S Basic VM-08A VM-07AS VM-07A VM-06AS VM-06A VM-05A VM-02AS VM-02A VM-01AS VM-01A Mechanical operation Manual operation Roller lever Hard steel roller Polyacetal roller Hard steel roller One way roller lever Straight plunger VM430-01-05 Polyacetal roller Hard steel roller Roller plunger VM430-01-06 VM430-01-06S VM430-01-07 VM430-01-07S

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

Table of Contents

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

Ejector Valve Unit Series ZYY/ZYX 1

port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector Valve Unit Series ZYY/ZYX Ejector Valve Specifications Series SY3000/SX3000 in manifold/split base combinations DIN rail mount type can be mounted ZY3-07S

Body Size: 3/8 Basis, Thread: NPT, Port Size: 1/4, Applicable Tube OD: Ø1/4", Sealant: Sealant, Lock Nut: Round

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 02 (1/4), Applicable Tube OD: 07 (Ø1/4"), Sealant: S (Sealant), Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: Universal, Environment, Applications: Standard, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Types of Screw: NPT, Applicable Tube O.D. mm(mm): -, Applicable

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 09 (Ø5/16"), Sealant: S (Sealant)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 11 (Ø3/8"), Sealant: S (Sealant)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 09 (5/16"), Sealant: S (Sealant)

Body Size: 5 (3/8 Basis), Thread: N (NPT), Port Size: 03 (3/8), Applicable Tube OD: 11 (3/8"), Sealant: S (Sealant)

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 600, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: With Flat-Blade

Type: Speed Controller, Body Material: [Brass] Brass + Electroless Nickel Plating, Control Method: Meter Out / In, Flow Rate(l/min): 700, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): 0.1～1.0, Knob Type: With Flat-Blade