Digital Pressure Switch

Dimensions Z/ISE80(F)-02/N02/F02/C01/A2/B2/-C01: Rc1/8 -F02: G1/4 -A2: URJ1/4 -B2: TSJ1/4 -52No.PS-OMM0003-J Z/ISE80(F)-02L/N02L/C01L/A2L/B2L/-C01L: Rc1/8 -A2L: URJ1/4 -B2L: TSJ1/4 -53No.PS-OMM0003-J With bracket (Rear piping) ZS-24-A With bracket (Rear piping) ZS-24-D -54No.PS-OMM0003-J With bracket (Bottom piping) ZS-35-A -55No.PS-OMM0003-J Panel mount adapter (Rear piping) ZS-35-C Panel

Digital Flow Switch (Remote type sensor unit)

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

Table of Contents

Piping port ZSM 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179) PF2 IF 2 1 Data 4 3 With bracket Connector Pin Assignments 44.5 9 34 Output -43 MPa 1 Brown DC (+) 2 White OUT1 (PNP) 3 Blue DC () OUT1 4 Black OUT1 (NPN) U P DOWN SET Output -65 14.5 90 1 Brown DC (+) 2 White NC 3 Blue DC () 26.5 4 Black OUT1 (PNP) 18.3 6 (28.7) 35 46 (38.2) 60 24 Piping port 02: Rc1/4 N02: NPT1/4 F02: G1/4 (ISO1179

This is a legacy product. Please contact us for the latest version.sales@ocaire.com

Table of Contents

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

Body Size: 4 (1/4 Basis), Port Size: F02 [Cylinder Side (R(PT)1/4) Pilot Port (G(PF)1/8)], Applicable Tube OD: Ø6, Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter Out / In, Flow Rate(l/min): 330, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [316 Stainless Steel] Stainless Steel, Operating Pressure Range(MPa): 0.1～1, Knob Type: Resin, Lock Nut Option: Round Shape Lock Nut, Joint

VM

Note 3) The handle of the selector (2 position and 3 position) cannot be removed or replaced alone. 5-6-20 19 2/3 Port Mechanical Valve Series VM200 How to Order S 01 02 3 0 VM2 Suffix for actuator Actuator type R S G B Red Hard steel roller Port size Basic 00 Color of push button selector Rc 02 NPT N02 G F02 1 4 Roller lever 01 Black 1 4 One way roller lever 02 Green SA 1 4 Straight plunger

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

All mounting brackets Weight per each 50 mm of stroke 0.18 0.21 0.28 0.39 0.59 0.78 Bore size (mm) 20 32 40 25 Foot MGZ-L02 MGZ-L25 MGZ-L03 MGZ-L04 Flange MGZ-F02 MGZ-F25 MGZ-F03 MGZ-F04 Theoretical Output (N) direction Piston area (mm2) Operating pressure (MPa) Bore size (mm) Model Rod size (mm) Operating Bore size (mm) 50 80 63 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 726 236 1085 378 1621 603

High-Precision Digital Pressure Switch

J Setting of security code (F81) The user can select whether a security code must be entered to release the key-lock function. At the time of shipment from the factory, it is set such that a security code is not required. 31 Function Details ZSE20(F)/ISE20 Series The F in ( ) shows the function code number.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

J Setting of security code (F81) The user can select whether a security code must be entered to release the key lock. At a time of shipment from the factory, it is set such that a security code is not required. Made to Order 36 ZSE20(F)/ISE20 Series The F in ( ) shows the function code number. Refer to the operation manual for details about operation procedures and function codes.

PFxx-OMJ0005CN

G1/4 C4 4(5/32") C6 6 C8 8(5/16") N7 1/4 -10No.PF-OMJ0005CN-I 1 W Z (2 m) (2 m) + () 2 R S () () T V () () A A B B -11No.PF-OMJ0005CN-I IN OUT X693 IN OUT 73 IN OUT X694 IN OUT 73 X731 (Ar)(CO2) (ArCO2) 92:890:1080:2070:3060:40 75 / ZS-33-D 2 m () ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () 2 ZS-33-MS () 3 ZS-33-R DIN 1 2 3 4 5 DIN F02(G1/4)DIN -12No.PF-OMJ0005CN-I

PFxx-OMO0004CN

*1 G1/4*2 SI 1 2ISO1179-1 7:L/min :L 1 (11) L*3 3 OUT1 OU2 A NPN NPN B PNP PNP C NPN (1~5V) D NPN (4~20mA) E*4 PNP (1~5V) F*4 PNP (4~20mA) G*4 NPN *5 H*4 PNP *5 4 5 -10No.PF-OMO0004CN-E 1 W N (2 m) (2 m) + () 2 R S () () T V () () -11No.PF-OMO0004CN-E / ZS-33-D 2m ZS-33-F ZS-33-J () ZS-33-JS () ZS-33-M () (3.02 ) ZS-33-MS () (3.03 ) ZS-33-R DIN 1 2 3 4 5 DIN F02

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

DIN rail is not suitable for port size F02 (G1/4).

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

J Power-saving mode (F9) Internal data error The numerical value disappears and the decimal points blink. OUT 1 Internal data error OUT 2 Power-saving mode can be selected. It shifts to the power-saving mode without button operation for 30 seconds. It is set to the normal mode (Power-saving mode is OFF.) when ex-factory.

PFM7

DIN Rail Mounting Bracket (Order Separately) ZS 33 R Stations 1 2 3 4 5 1 station 2 stations 3 stations 4 stations 5 stations DIN rail (supplied by customers) Port size F02: G1/4 cannot be mounted on the DIN rail. 907

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

J Power-saving mode (F80) Power saving mode can be selected. It shifts to the power-saving mode without button operation for 30 seconds. It is set to the normal mode (Power-saving mode is OFF.) at a time of shipment from the factory. (During power-saving mode, [ECo] will flash in the sub screen and the operation light is ON (only when the switch is ON).)

1

0.035 J 0.090 J Air cushion Allowable kinetic energy (Effective cushion length) 0.07 J (9.4 mm) 0.18 J (9.4 mm) Stroke length tolerance +1.0 0 Made to Order (For details, refer to pages 463 to 472.)

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45 Mounting position U side D side J Symbol U D Ejector/Valve total stations 02 Stations Symbol Number of ejectors 1 to 10 stations A, B port size (Valve only) 2 SUP/EXH block assembly specifications ... ...

Digital Flow Switch

The straight piping length shall be 8 cm or longer in order to maintain 3%F.S. of the specification. -70No.PF-OMO0005-F Dimensions (in mm) PFMB7201-02 PFMB7201-N02 -71No.PF-OMO0005-F PFMB7201-02L PFMB7201-N02L -72No.PF-OMO0005-F PFMB7201S-02 PFMB7201S-N02 -73No.PF-OMO0005-F PFMB7201S-02L PFMB7201S-N02L -74No.PF-OMO0005-F PFMB7201-F02 -75No.PF-OMO0005-F PFMB7201-F02L -76No.PF-OMO0005-F PFMB7201S-F02