High Vacuum Angle Valve

How to Order [Option] XLGV M9N 16 A 1 G L Flange size 16, 25, 40 1 q e u r t XLGV M9N 50 A 1 G L Flange size 50, 63, 80 i w y o !0 !

Air Slide Table

Weight of Centralized Adjuster [g] Model Standard stroke [mm] Reduction only when the product comes with a retraction stroke end adjuster 10 20 30 40 50 75 100 125 150 MXQ6A 175 180 225 245 265 10 MXQ8A 190 210 230 260 320 350 10 MXQ12A 355 385 405 465 495 635 705 20 MXQ16A 640 680 720 800 840 980 1,170 1,270 40 MXQ20A 1,110 (60) 1,140 (60) 1,170 (60) 1,250 (60) 1,400 (60) 1,600 (60)

2

Applicable air dryer IDF100F IDF125F, 150F IDF190D, 240D IDF370D Capacity Type 360 400 400 400 7 kVA 9 kVA 14 kVA 18 kVA 540 650 650 650 400 450 450 450 260 300 300 300 300 350 350 350 11 13 13 13 30 40 40 40 94 kg Three220, 240, 380, 400, 415, 440 V (50/60 Hz) phase 109 kg 200V (50/60 Hz) D 4 x F A Double152 kg turn (mm) 179 kg 43 Optional Accessories Series IDF/IDU Air Preparation Equipment

Compact Cylinder Series NCQ8

Nil (Example) M9N 118in (3 m) . L M9NL 197in (5 m) .

Smooth Cylinder/Low Speed Cylinder

, 400, 450, 500 40 Symbol Specifications Change of rod end shape 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 -XA -XC6 Made of stainless steel 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 Tie-rod, cushion valve and tie-rod nut made of stainless steel -XC7 Note 1) Intermediate strokes not listed above are also available

REA/REB

, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

400, 450, 500 15 1000 (2) 20 1500 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Please contact SMC if the maximum stroke will be exceeded.

REA/REB

, 400, 450, 500, 600, 700, 800 4000 32 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 40 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 6000 63 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 Made to Order Specifications (For details, refer to page 10-21-1.)

Cylinder with Lock

[mm] Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Up to 1200 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500,

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) M9B M9BV 2-wire 12 V 24 V Relay PLC Yes Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire Lead wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ 12 V Solid state switches marked are produced

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: H (Rear Locking), Release Type: L (Locking)

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 400mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: H (Rear Locking), Release Type: L (Locking)

Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: L (Axial Foot), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 300mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: H (Rear Locking), Release Type: L (Locking)

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 300, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port

Magnet: Built-in, Series: with End Lock, Mounting: Axial Foot, Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 400mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: Rear Locking, Release Type: Locking, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Environment

Foot, Flange: Body mounting bolt, Double clevis: Clevis pin, Type C retaining ring for axis, Body mounting bolt * Applicable stroke table : Standard Stroke [mm] Model 30 50 100 150 200 250 300 350 400 450 500 Manufacturable Solid state auto switches should be ordered separately.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.