32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 MB1 Note 1) Other intermediate strokes can be manufactured upon receipt of order.
Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.
Basic setting mode Main menu Alarm display menu Maintenance notif Power supply ON Circulating fluid outlet temperature Circulating fluid set temperature 200 ALm mANT 200 XXALM MENU MENU MENU / / / M no (N M circulating fluid return temp AL01 mT01 212 Alarm number (Alarm number minimum RET TEMP / / / M n mT02 AL02 014 Alarm number Circulating fluid outlet pressure PRESS / 79 Circulating fluid
Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube Test conditions G, H type: 6 x 4 tube Reference pressure: 150 kPa : Use within the rated pressure range (100 kPa to 200 kPa). It will be impossible to measure the gap when the operating pressure is less than 80 kPa or more than 220 kPa and the output will be OFF.
PLe " ~,I I' : II jNo 2OOVm 'M A64 I-I. 24 V 12 V A33 1 '~ '" V. 200 VI--_ --+-=--t-t I-t I-j-1 ~~~! c--t-1=Relay. 'W ~~~ -=L= I,PLC I ! I. ' ~ Lead wire length symbols: 0.5 m . Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m . .
-(Exanple: A53) 3m .1 (E)mple: A53L) 5n .2 (Example: A534 ' lf loot bckel is required, order 2 pcs. per cylander. " The clevis mounl @mes with clevis pin, llat washer and sPUlpin, $Ecillcalions Model Cyli nder Specif ications For Lock Unit specifications see page 8 217 PSI (1.5 MPa) 14s PSI (1.0 t\.4Pa) 12 PSI (0.08 [,4Pa) -250:'10, 251 -10O0: ia, 1001-1500:i" Basic, Foot.
-(Exanple: A53) 3m .1 (E)mple: A53L) 5n .2 (Example: A534 ' lf loot bckel is required, order 2 pcs. per cylander. " The clevis mounl @mes with clevis pin, llat washer and sPUlpin, $Ecillcalions Model Cyli nder Specif ications For Lock Unit specifications see page 8 217 PSI (1.5 MPa) 14s PSI (1.0 t\.4Pa) 12 PSI (0.08 [,4Pa) -250:'10, 251 -10O0: ia, 1001-1500:i" Basic, Foot.
e: A53L, 5m. .z (Example: A5.JZ) Conooctor K39C K39 SingleClevis CA I.(< CAI-O)5 CA'~ (.A t{XE CAI ': IO Solid State 3wire svsternlNPN 3 wire syslemiPNP F59W GS9W Double C~vls CA l-\)).!
kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5
kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] [mm] [mm] [mm] -19No.PS-OMT0001CN-E 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
Workpiece: Generic term for the object which is to be adsorbedVacuum Pressure Equivalents Chart Unit Conversion Table -14.7 760 29.9 -101.3 -13.5 700 27.6 -93.3 1 1 _ 6 600 23.6 -80.0 -9.7 500 19.7 -66.7 400 15.8 -53.3 -5.8 300 1 1 . 8 -40.0 -3.9 200 7.9 -26.7 100 3.9 .
Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.
Series NVM, NVFM, NVZNI Mechanical Valves l .,:lii::rii.r:t,: Series NVM MECHANICAL VALVES CONTENTS/SPECI FICATION S SPECIFICATIONS Contents Faoe NVM Mechanical Valves NVM 100 Cv 0.14 NVM 200 Cv 1.00 NVM 430 Cv 0.38 NVM 830 Limit Valve Cv 0.33 CHARACTERISTICS NVM100 tNVM2oCNVlt430 Port Size (NPT) 1/a 1/a 1/s 1/e Cy 0 . 1 4 1.00 | 0 38 0 3 3 Max.
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 125mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 350mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 100mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Magnet: D (Built-in), Series: BA2 (with End Lock), Mounting: T (Center Trunnion), Tube Material: Aluminum Tube, Bore Size: 63mm, Port Thread: Rc, Stroke: 75mm, Rod Boot: w/o Gaiter w/Cushion Both Sides, Cushion: Air Cushion, Lock Position: R (Front Lock), Release Type: N (Non-locking Type)
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port
Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 125, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, End Locking: [Included] Presence (Only Rod Side), Cushion: Air cushion, Operating Pressure(MPa): 0.15 to 1.0, Specification: Built-in magnet, Port