Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Solid state switches marked "" are produced upon receipt of order.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Lead wire length symbols:0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 12-13-25 for solid state switch with pre-wire connector. 12-5-4 5 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 30 Model/Specifications Nominal size 10 15 20 Action Double acting Gripping force (N) (1) External grip 12 24 33 58 (Effective value) at 0.5 MPa Internal grip 12 34

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ MA D491 Series MHR2/MDHR2 Model/Specifications Nominal size 20 10 15 30 Double acting Action Gripping force (N) (1) External grip 33 12 58 24 (Effective value) at 0.5 MPa Internal grip 34 12 59 25 Finger closing width (mm) Finger opening width (mm) 16 10 19 14 Opening/ Closing

Rotary Gripper Series MRHQ

L M9NL 5 m . Z M9NZ Refer to page 731 for further information on auto switches. Order with an auto switch part number when ordering a single auto switch unit. Auto switches marked with a "" are made upon receipt of order.

XLAQ/XLDQ

Example) -M9NL Symbol Nil A B C Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Table of Contents

Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) M9NZ Refer to page 10-12-16 for details on other applicable auto switches than listed above.

Table of Contents

, 12 V A93 A90 M9N M9P M9B F9NW F9PW F9BW A93V A90V M9NV M9PV M9BV F9NWV F9PWV F9BWV 2-wire Relay, PLC IC circuit 100 V or less No 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) 2-wire 12 V Grommet Relay, PLC Yes 24V 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Solid state switch Yes Yes Grommet Relay, PLC A93 A93V 2-wire 12 V 24 V 100 V M9N M9NV 3-wire (NPN) IC circuit 5 V, 12 V M9P M9PV 3-wire (PNP) Relay, PLC M9B M9BV 2-wire 12 V 24 V Grommet F9NW F9NWV 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) F9PW F9PWV 3-wire (PNP) F9BW F9BWV 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 m L (Example) M9NL

Coolant Valve: Air Operated/External Pilot Solenoid VNC Series

10A 15A 20A 25A 32A 1 8 1 4 3 8 3 8 1 2 3 4 220 VAC 50/60 Hz Valve size 1 7 5 6 24 VDC 12 VDC B: Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)2.1 A5 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 100 VAC (50/60 Hz)4.2 A10 A180/200 W 50/60 Hz220 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 200 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?phase 230 VAC (50/60 Hz)4.8 A10 A385/440 W 50/60 Hz420 W0.01 ?m (99.9% filtration efficiency)Particles of 0.3 ?

MXS

MGQ MXS8-50F SMXS8, #3 MGG Axial piping (8) MXS8-llP MGC 15.5 Operating port MGF 40 Max 6.5 (mm) 2-M5 X 0.8 Model J 39 44 55 73 91 141 MXS8-10R MXS8-20R MXS8-30R MXS8-40R MXS8-50R MXS8-75R CY1 MY1 15 6.5 * Dimensions not indicated are the same as the basic style.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

Process Valve: 2 Port Valve For Flow Control VNB Series

Semi-standard Note 3) For other rated voltages, please consult with SMC. 2 15A 1 2 15 14 3 20 16 20A 3 4 25 4 25A 1 Nil: Non-locking push type Valve size 5 to 7 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange 11 2 40A Note) Semi-standard 1 2 1 B 40F Flange Electrical entry/With light/surge voltage suppressor 2 50A 33 Symbol Electrical entry Valve size 1 to 4 Valve size 5 to 7 7 50 2B 50F

Option Nil B ∗ None With bracket L With indicator (visual verification of operation) BL ∗ With bracket and indicator (visual verification of operation) 1 1 Port size Rc 1 8 1 4 3 8 3 8 1 2 3 4 1 4 1 1 2 1 1 4 B Flange 1 1 2 B Flange 2B Flange Rc G NPT NPT

N.C. 6A 8A 10A 10A 15A 20A 25A 32A 32F 40A 40F 50A 50F 1 8 1 4 3 8 3 8 1 2 3 4 7 1 15 2 20 3 25 4 1 1 1 4 32 5 11 4 B Flange 11 2 40 6 11 2 B Flange 2 50 7 2B Flange 634