MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

MY1

C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

MY1

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

C D Side support B MY-SB 2-J 2-H C D A B (mm) A B C 15 25 35 45 E F G D H J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 Applicable bore size MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16 MY-S20 MY-S25 MY-S32 61 67 81 100 120 142 172 26 38 50 64 4.9 6.4 8 11.7 3 4 5 6 6.5 8 9.5 11 3.4 4.5 5.5 6.6 A B A B A B A B 71.6 79.6 95 118 142 164 202 80 14.8 8.5 14 9 A B 55 MY-S40 M10 x 1.5 A

MY1

C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 100 118 45 64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5 14 9 B 142 164 MY-S63A 172 202

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

67 81 100 120 142 172 26 38 50 64 4.9 6.4 8 11.7 3 4 5 6 6.5 8 9.5 11 3.4 4.5 5.5 6.6 A B A B A B A B 71.6 79.6 95 118 142 164 202 80 14.8 8.5 14 9 A B 55 MY-S40 M10 x 1.5 A B 100 18.3 10.5 17.5 11.5 70 M12 x 1.75 MY-S63 Guide for Side Support Application For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load weight.

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

8 #9 $0 $1 $2 $3 8-13-25 26 Series MY2H/2HT Single Axis Type: 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counterbore C LD through hole 4-MM, depth M Cylinder mounting center line PA Workpiece mounting center line U Long hole depth Y B Guide center line NX PB PC PF QW X 4 x 2square nut J NT NH PE PD LB NW C LW NV LD T-slot for body mounting Courtesy of Steven Engineering

CATALOG

L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !

A

O R E T Y P E S I D E S U P P O R T B: T H R E A D E D T H R O U G H H O L E Part No Cylinder Side Support A Side Support B A B C D E F G H J MY-S16A/B MY1C16 MY-S16A MY-S16B 61 71.6 15 26 4.9 3 6.5 3.4 M4X0.7 MY-S20A/B MY1C20 MY-S20A MY-S20B 67 79.6 25 38 6.4 4 8 4.5 M5X0.8 MY-S25A/B MY1C25 MY-S25A MY-S25B 81 95 35 50 8 5 9.5 5.5 M6X1 MY-S32A/B MY1C32 MY-S32A MY-S32B 100 118 45 64 11.7 6

AR20-B to AR60-B

Set pressure range [MPa] 0.1 to 1.7 Ambient and fluid temperature [C] 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 r BG AR B B X430 30 03 BG q 30 AR

AR Series Modular Type Regulator

Example) AR30-03BG-NR-A-X2068 AF-A AF-A Nq Body size 20 25 30 40 Symbol Description AR -A -B AL-A Nw Pipe thread type Nil Rc V V V V N NPT V V V V F G V V V V + AW -A -B AW 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + AG Ne Port size E AV a Mounting Nil Without mounting option V V V V B Note 2) With bracket V V V V H With set nut (for panel mount) Note 3) V V V V + Option Note

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Applicable cylinder MY3A16, MY3B16 MY3A25, MY3B25 MY3A40, MY3B40 MY3A63, MY3B63 A B A B A B A B MY-S16 MY-S25 MY-S32 MY-S40 63.6 Data 091 130 182 Guide for Using Side Support For long stroke operation, the cylinder tube may be deflected depending on its own weight and the load weight.