This is a legacy product, and replaced byMXH20-60Z, CYL, COMPACT SLIDE TABLE, ACTUATOR, MXH HIGH RIGIDITY GUIDE CYL, HE, 20MM MXH DBL-ACT AUTO-SW, 1.53448 lb, ModelBore size (mm)Standard stroke (mm)Made to Order 51015202530405060MXH2020------------------XB13 : Low-speed cylinder (5 to 50 mm/s)XC3 : Special port positionsXC19 : Intermediate stroke (Spacer type)XC22 : Fluororubber

This is a legacy product, and replaced byCJ2B16-60Z, CYL, RND BODY, DBL-ACT, ACTUATOR, CJ2 ROUND BODY CYLINDER, GD, 16MM CJ2 DOUBLE-ACTING, .21812 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CJ2Air cylinderCJ2Double acting, Single rodExcept with air cushion666

This is a legacy product, and replaced byCJ2D10-60Z, CYL, DBL ACT, ACTUATOR, CJ2 ROUND BODY CYLINDER, ED, 10MM CJ2 DOUBLE-ACTING, .19455 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CJ2Air cylinderCJ2Double acting, Single rodExcept with air cushion666

This is a legacy product, and replaced byCJ2ZD16-60Z, CYL, RND BODY, D/CLV, SPD/CNTL, ACTUATOR, CJ2 ROUND BODY CYLINDER, GC, 16MM CJ2 OTHERS (COMBO), .28552 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CJ2Air cylinderCJ2Double acting, Single rodExcept with air cushion666

This is a legacy product, and replaced byCDG1BA40-60Z, CYL, AIR, DBL ACT, AUTO-SW, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, ME, 40MM CG DBL-ACT AUTO-SW, 1.80532 lb

This is a legacy product, and replaced byCJ2L16-60Z CJ2 ROUND BODY CYLINDER. CYL, ROUND BODY, DBL ACTING. ACTUATOR. 16MM CJ2 DOUBLE-ACTING. .24760 lb. GD.

This is a legacy product, and replaced byMXH10-60Z MXH HIGH RIGIDITY GUIDE CYL. CYL, COMPACT SLIDE TABLE. ACTUATOR. 10MM MXH DBL-ACT AUTO-SW. .53757 lb. EE.

This is a legacy product, and replaced byCJ2KB16-60Z CJ2 ROUND BODY CYLINDER. CYL, ROUND BODY, NON ROT. ACTUATOR. 16MM CJ2 NON-ROTATING. .25192 lb. GK.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Table of Contents

resin Wear ring B !

Modular F.R.L. Units

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

2

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

MY1

C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to