4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Locking type C (Manual) 3(R) port PE port 3 position exhaust center Rated voltage 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 4 1 0 1 0 4 5 24 VDC 12 VDC 3 position pressure center Manual override/Non plug-in type 6 9 Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Other 5 Option Electrical entry Grommet L plug connector

MGP

200st 75st 200st 24 28 34 54 70 78 25 30 38 M5 X 0.8 10 12 12 44 44 44 62 81 91 5 17 17 110 120 120 200 200 46 54 64 27 39 39 56 72 82 60 77 77 117 117 38 44 50 25, 50, 75, 100 3 3 4 16 20 25 3.5 3.5 4.5 M6 X 1.0 25, 50, 75, 100, 125, 150, 175, 200 M6 X 1.0 MGPM (Slide Bearing)/Dimensions A, DB, E MGPL (Ball Bushing Bearing)/Dimensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 25st 125st

Electric Actuator with Integrated Guide

D A B Traveling accuracy (mm) Model D side against B side C side against A side LTF8 LTF6 0.02/200 or less 0.02/200 or less 0.02/200 or less 0.02/200 or less Simplified Selection Flow Chart Simplified Selection Flow Chart Simplified Selection Flow Chart Single Axis Electric Actuator Series LTF (AC Servomotor) Single Axis Electric Actuator Series LTF (AC Servomotor) Work load kg Maximum speed

Table of Contents

C D E F Dimensions Part no.

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

15

E C x 200 (= D) 20 Note) When mounting the actuator using the body mounting reference plane, use a pin.

CA2

boot 2-P (Rc, NPT, G) 4-LD G G 4-J 2-cushion valve MM B1 Width across flats KA FV FY E D B e H1 AL B C f h + l l H A F N K N 9 FT S + Stroke FZ FX ZZ + l + Stroke ZZ + Stroke Stroke range (mm) A Bore size (mm) B B FV FD FX FY C AL B1 D E F FT FZ G H1 J Without rod boot With rod boot Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Smooth Cylinder/Low Speed Cylinder

-X 1233 Series CS2Y Dimensions Rod flange: CS2YF Port With rod boot V W G G 4 x J Cushion valve Width across flats KA 2 x P (Rc, NPT, G) 4 x FD MM FY D E E e B H K A AL ZZ1 + l + Stroke h + l l f FT B C N N F FZ FX ZZ + Stroke M S + Stroke (mm) Bore size (mm) Stroke range (mm) B C A AL B D E F FD FT FX FY FZ G J V 125 140 160 50 47 143 145 115 32 71 43 19 14 190 100 230 15 M14 x 1.5 15 Up

NCA1

TD UV E B AA A C FA G TT J LF + STROKE ZB + STROKE R WF TL TM TL E X119 Option (in) TD 0.001 0 Bore (in) MM KK A AA B BA C D DD E EA EE FA G J R TL TM TT UM UV WF Y LF P XI ZB 200 (2) 1 3/4-16 1 1/8 2.6 1.5 1 1/8 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1.26 1.06 1.84 1 1 3 1.18 5 2.56 1 3/8 2.09 3 5/8 2.40 3.29 5 1/8 250 (2.50 1 3/4-16 1 1/8 3.1 1.5 1 1/8 1/2 7/8 5/16-24 3 0 3/8 3/8 1.30 1.06 2.19

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

CV/MVGQ

CVS1K40-PS CVS1K50-PS CVS1K63-PS Contents Set of nos. above @7, @8, #0, #1, #3, #6 CE1 CE2 Basic Style: CVS1K ML2B 157.8 212.4 C J G5-S CV 59 28 HX MVGQ Width across flats KA 69.4 Width across flats B1 16.5 4-J 12 CC H1 24.5 20 MM W E D KA e RB Connecting port A 2-Rc 1/4 34.5 AL J l f 8 h + l ZZ + l + Stroke C B H A F N 73.6 S + Stroke M ZZ + Stroke D-X Bore size (mm) Stroke range (mm) A

CV/MVGQ

CVS1K40-PS CVS1K50-PS CVS1K63-PS Contents Set of nos. above @7, @8, #0, #1, #3, #6 CE1 CE2 Basic Style: CVS1K ML2B 157.8 212.4 C J G5-S CV 59 28 HX MVGQ Width across flats KA 69.4 Width across flats B1 16.5 4-J 12 CC H1 24.5 20 MM W E D KA e RB Connecting port A 2-Rc 1/4 34.5 AL J l f 8 h + l ZZ + l + Stroke C B H A F N 73.6 S + Stroke M ZZ + Stroke D-X Bore size (mm) Stroke range (mm) A

Table of Contents

D E G 1 2 3 6 8 C J N R AC25C AC60 AC40A AC40C AC40D AC20A C Float type auto-drain (N.C.)

2 Phase Stepper Motor/Without Motor Brake Series LXP

+0.030 0 depth 6 E Note) A contact protection circuit is required when connecting a brake. 12 6 Model LXPB2BC-50 LXPB2BC-75 LXPB2BC-100 LXPB2BC-125 LXPB2BC-150 LXPB2BC-175 LXPB2BC-200 D E 3.5 2 5 1 34 44 52 Section F detail (Scale: 2/1) 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

NCA1

NCM LF + Stroke WF C R 4-DD J G 2-EE (NPTF) NCA SB Screw D(4) Hole EA MM -X B E/2 20ST KK Data D across flats TS SU SW SW SU US XS SS + Stroke SY Bore size (in) MM KK A B C D DD E EA EE G J LF P R SB SS ST SU SW SY TS US WF XS Y ZB 150 (1.5) 5/8 7/16-20 3/4 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 1.1 3.63 2.36 1.43 3/8 2.88 5/8 0.94 3/8 0.94 2.75 3.50 1 1.38 1.71 5.19 200 (2) 5/8 7/16-20 3/4

NCA1

AA KK EA MM BA B R E/2 4-NT WF G J TN Depth ND E XT SN + Stroke A ZB + Stroke EA E/2 E DD D Bore size (in) MM KK NT TN WF XT Y LF P SN ZB C BA B AA ND A J G EE R 150 (1.5") 5/8 7/16-20 1/4-20 5/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 2 1/4-28 9/16 3/8 1 1/8 1 1/8 2.02 9/32 3/4 1.1 1.26 3/8 1.43 2.36 200 (2") 5/8 7/16-20 5/16-18 7/8 1 1 15/16 1.71 3 5/8 2 1/4 4 3/4 0.3 1 1/4 2 1/2 5/16-24

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

5

c, d, e) BMA3-040S (A set of b, c, d, e) BMA3-050S (A set of b, c, d, e) BMA3-063S (A set of b, c, d, e) RZQ Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch a e White (PBT) b Switch holder d Auto switch mounting screw c Auto switch mounting band * Band (c) is mounted so that the projected part is on the internal side (contact side with the tube).

Vacuum System Peripherals:

(for special specifications) n r e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.