ZP

D Model A B2 C D E Vacuum inlet direction q Pad dia.

ZP

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-

ZP

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

ZP

2.5 Deep H: M6 x 1 H: M8 x 1 Y Model A B C E F G I C E F G I D ZPT25D 25 28 20 3 25 25 51 8 3.5 30 15 46 12 10 Elliptic Model a ZPT2004U 4 2 2.6 4.6 1.2 0.3 7 3.5 4.3 7.8 1.8 0.5 10 4 5 11 2 0.8 ZPT3507U ZPT4010U b c d e Y Dimensions of D, E, G are the same.

Table of Contents

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

Hydraulic

D E e Width across flats G l 10 f Air release SS + Q + l + Stroke W W CX U +0.4 +0.1 NA T NB ZZ + Q + l + Stroke L K F S + Stroke MA B RR SS + Stroke A ZZ + Stroke (mm) With rod boot Stroke range (mm) Bore size (mm) l e CX J B C F GA GB NA NB P R S T CD RR SS L U W f Q B-rod C-rod B-rod C-rod 32 M10 x 1.25 52 58 38 16 32 15 37 31 3/8 39 141 11 25 16 16 209 38 22 12.5 21.5 15 25 to 1400

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Table of Contents

MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 75 to 200 st 250 to 400 st 25 st 75 to 200 st 250 to 400 st 50 st 32 40 50 63 97 102 140 17.5 55.5 127 12.5 42.5 20 97 102 140 11 49 127 6 36 20 106.5 118 161 21 64 131.5 9.5 34.5 25 106.5 118 161 16 59 131.5 4.5 29.5 25 MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 25 st 125 to

Fluoropolymer Piping Equipment

B C E E H L L M Min. port size LVA C (E, E) B L, L LQ3E11 4 3.5 4.8 10 9 11 28.5 27.5 14 2.5 LQ3E12 3 2 LQ3E21 6 4 6 17 16 16 34.5 33.5 20 4 LQ3E31 10 5 9 22.5 19.5 21 47.5 44.5 25 7.5 LQ3E32 8 6.4 LQ3E41 12 6 10 24 22 24 52.5 50.5 29 9.5 LQ3E51 19 7 14 26.5 24 32 64 61.5 37 16 LQ3E61 25 8 18 30 26 41 78 74 49 22 LVH M LVD LVQ C H (E, E) L, L LVP LVW Inch Size (E,E): Reference dimension for

smcmaintenancepartslist

-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MH-G01 (contents quantity 30 g) Main parts No. e (1 pc.) !

V

G H H Flat Flat with rib G ZPR25 U C 25 28 14 29 39.8 57.6 25 83.5 73.5 4 1.8 15 ZPR40 U C 40 43 18.5 32 42.8 60.6 25 86.5 76.5 6.5 3.3 15 ZPR32 U C 32 35 14.5 29.5 40.3 58.1 25 84 74 4.5 2.3 15 ZPR50 U C 50 53 19.5 33 43.8 61.6 25 87.5 77.5 7.5 3.8 15 D E E P T Y P E D E E P T Y P E I: M8X1 I: M6X1 I: M8X1 I: M6X1 Model A B C D E F Y Model A B C D E F Y G H H G G H H G ZPR25D 25 28 20 35

Made to Order

-XC88 -XC89 CA2 Basic: CA2B G 2 x P 2 x Cushion valve G Width across flats KA 4 x J MM D E B C H1 AL WA WA B C B1 A K N ZZ + Stroke S + Stroke N F M H (mm) Bore size (mm) 40 50 63 80 100 AL B B1 C D E F G H1 J K KA M MM N P S WA H ZZ A 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 17.5 15 15 19 19 15 17 17 21 21 8 11 11 13 16 M8

Battery-less

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

Table of Contents

(X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port 2-3/8 1/8 P Port 1/4, 3/8 R1, R2 port 2-3/8 P port 1/4, 3/8 X(PE) port 3-10-9 10 Series VQ7-6 Construction DIN Terminal Type Metal seal type Rubber seal type VQ7-6-FG-SVQ7-6-FG-S-R o o t r u t r u w y e q w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main

F

A G E G A S K E T: N I P P L E: M-3N M-5N U N I V E R S A L T E E: M-3UT M-5UT P L U G: M-3P M-5P M-5G1 M-3G P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R E L B O W: M-5L G A S K E T: M-5GH T E E: M-5T H O S E N I P P L E: M-5H-4 M-5H-6 H O S E E L B O W: M-5HL-4 M-5HL-6 Similar to Picture

Smooth Cylinder/Low Speed Cylinder

Y-020B Y-032B Y-040B size +0.2 +0.1 9 Type C 9 for axis 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 +0.2 +0.1 M10 x 1.25 25, 32 9 Type C 9 for axis 48 18 20 25 38 9 18 5 14 CDP-1 +0.3 +0.1 3 x 18 L 49.7 M14 x 1.5 40 16 68 22 24 55 12 38 13 25 CDP-3 Clevis pin and retaining ring (cotter pin for 40) are attached.

V100

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

Electric Actuators

F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-M6 thread depth 13 58 52 27 19 [18] (39) 15 Stroke + 127 58