ZP2-16UCL ZP (10, 13, 16) U ZP (10, 13, 16) C ZP (10, 13, 16) B ZP (10, 16) D ZPT2-A5, A6 ZPT2-B5, B6 B01, N01 T01 P. 72 P. 73 ZP (20, 25, 32) U ZP (20, 25, 32) C ZP (20, 25, 32) B ZP25D ZP2-B25J ZP2-B30J ZP2-25UCL ZP2-32UCL ZPT3-A6, A8 ZPT3-B5, B6, B8 B01, N01 T01 P. 72 P. 73 ZP (40, 50) U ZP (40, 50) C ZP (40, 50) B ZP40D ZPT4-A6, A8 ZPT4-B6, B8 B01, N01 T01 ZP2-40UCL ZP2-50UCL P. 72 P
5 P-6 C-9 MY1B100 MY1B80 MY1B50 MY1B63 Description Material Qty.
Recommendable Air Flow ln/min Model Port Size NZFA100-T01 18 50 NZFA200-T02 14 200 Cup D I M E N S I O N S A P P L I C AT I O N T O VA C U U M P U M P S Y S T E M H O W T O O R D E R (N)ZFA A I R S U C T I O N F I LT E R (N)ZFA A C C E S S O R I E S TYPE N None L With Bracket -Left R With Bracket -Right 100 500Nl/Min 200 200Nl/Min P O R T S I Z E P O R T T H R E A D 01 1/8 02 1/4 Nil PT*
D Flat Model A E K Model F H J F H J Flat with ribs ZPT40 -B-A14 U C ZPT40D10-B-A14 55 121.5 120 18.5 32 6.5 3.3 40 43 ZPT50 -B-A14 U C ZPT40D20-B-A14 127 65 124 50 19.5 33 7.5 3.8 50 53 137 5 10 6.2 13 ZPT40D30-B-A14 75 134 Dimensions by Stroke ZPT40D50-B-A14 182 95 179 75 1 8 E G: M5 x 0.8 G: Rc 40 50 H J F 40 50 H J F K Model 40 50 U C ZPT 20-B-A14 U C ZPT 30-B-A14 U C ZPT 50-B-A14 U C
Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2
Solenoid Specifications Apparent power VA Inrush Energized Power consumption W (energized) Temperature increase C (rated voltage) 5 50 3.5 35 6 50 8 55 6.5 45 8 50 10.5 60 9.5 50 11.5 55 Frequency Hz 50 25 12 60 20 8 50 45 20 60 40 15 50 60 25 60 50 20 Symbol Model Power supply AC OUT VXD21 DC AC IN VXD22 DC AC VXD23 DC Note 1) The values are for ambient temperature of 20C 5C and rated voltage
Style: CA2GQ NCM NCA 4-FD D4-J 2-P (Rc, NPT, G) B1 G G MM Width across flats KA -X 20D FV FY E Data B H1 AL B C K A N F N S + Stroke H FT FZ FX ZZ + Stroke Without auto switch With auto switch Bore size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 H1 B B FV FD FX FY C A AL B1 D E FT FZ G H J K S S ZZ 157 170 181 215 226 KA MM N P ZZ 147 160 171 205
Grease pack part number: GR-S-010 (10 g) CS2 Basic (B) P Bore size Stroke 20 25 20 CM2B P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 Width across flats B1 H1 H2 32 to 40 P Width across flats KA E (Head side pressure port) I G G NA D Q MM NN AL N N F K H A P QY NA ZZ + Stroke S
R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
Unit Series AC20D to 40D Dimensions AC20D A F N E P K C G G IN OUT Q F.R.L.
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37 28 ( ): Denotes the Normally Open (N.O.) dimensions. 143 VXD Series For Air/Water/Oil 5 C 6 D Dimensions/VXD2 /
(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100
With light/surge voltage suppresser 10-SYJ300 For AC Note) 0.36 23 (AR) For AC M5 x 0.8 With light/surge voltage suppresser 50 60 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 P.659 Push-turn locking slotted type 50 60 DIN terminal 10-SYJ500 1.2 23 (AR) 1/8 (SYJ500, 700 only) Push-turn locking lever type P.671 M8 Connector 10-SYJ700 2.7 23 (AR) 1/81/4 P.684 Note) All standard AC
(g) JIS Symbol Double acting, Spring rod Stroke (mm) Model 40 50 60 70 80 90 100 43 (53) 49 (59) 50 (65) C(D)U6-D 64 (74) 72 (82) 80 (90) C(D)U10-D 92 (122) 104 (134) 116 (146) C(D)U16-D 216 (253) 238 (275) 260 (297) 282 (319) 304 (341) C(D)U20-D Made to Order Specifications (For details, refer to P.43.) 363 (422) 397 (456) 431 (490) 465 (524) 499 (558) C(D)U25-D Symbol Specifications
25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69
Y P E B R A C K E T Spacer with L-type bracket A B C D E F G R L Y10L 20 12 4.5 3 25 5 8 2.25 27 Y20L 24 15 5.5 3 30 5 10 2.75 33 Y30L 35 16 7 4 41 7 11 3.5 45 Y40L 40 22 9 4 50 7 14 4.5 50 Y50L 40 22 9 4 50 7 14 4.5 50 Y60L 50 24 12 4 70 10 15 6 62.5 T TYPE BRACKET H O W T O O R D E R T T Y P E B R A C K E T Spacer with Bracket Bracket Only 1000 S E R I E S Y10T .B110T 2000 S E R I E S Y20T
type B (Tool required) (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center (B) (A) 4 2 Option 4 (EA)(P)(EB) 5 1 3 C : Locking type C (Lever) 3 position pressure center (B) (A) 4 2 5 (EA)(P)(EB) 5 1 3 Option How to Order Pilot Valve Assembly SF4 70 F 1 Coil rated voltage Manual override Symbol Rated voltage Non-locking push type Non-locking push type A (Extended) Nil
43 P 25 40 65 90 P 30 50 70 90 Model CXWM10-25 CXWM10-50 CXWM10-75 CXWM10-100 Model CXWL10-25 CXWL10-50 CXWL10-75 CXWL10-100 53 53 CXWM20, CXWL20, CXWM32, CXWL32 F P 4-J Herical insert thread depth K CXWM25 CXWL25 F 28.5 31 33.5 33.5 46 58.5 71 83.5 F 31.5 31.5 56.5 56.5 69 81.5 94 106.5 P 25 45 65 90 90 90 90 90 P 65 90 65 90 90 90 90 90 I I Stroke 25 mm 50 mm 75 mm 100 mm 125 mm 150 mm
High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for