MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3.3 12.2 15.2 1.2 0.3 3 6, 10 5 18.3 22.7 1.5 0.7 4.8 16 9 19.2 25 1.75 1.15 8.6 20, 25 18 Series MQQ/MQM Safety

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

Clamp Cylinder with Lock Series CLK1

Applicable double knuckle joint 0.040 0.076 0.050 0.093 CDP-2 41.2 10 For 32 C1K040-23-54806 57 12 For 40, 50, 63 13 Clamp Cylinder with Lock With Magnetic Field Resistant Auto Switch Series CLK1P/CLK1G Accessory Dimensions (mm) 1in = 25.4mm Limit Switch Mounting Base/Dog Fitting CKM040-48-16070A 75 50 5 58.7 17 4-M5 x 0.8 30.2 20 15 4.5 60 45 40 17 45 20 30 97 42.5 Note 1) Limit switch

Shock Absorbers and Rate Controls

nt ng accessories, see paes 914 Shaek &bsrrfuers q i s r c , Adjustable Hydraulic Series I OEM low Profile Series lmperial QEM 3/4 "+ OElvl 1 1/8 *'I Adjustment Knob A '\ole: A, d1d T aooy _o Jrerl^are srri.er cdp dclesso y. (h) Illox. 5ho

AC Servo Motor Driver (SSCNET Type)

converted into the motor speed and displayed. 0.1r/min (Note 1) 22 Speed command (by 0.1 r/min) The speed command to be given to the motor is displayed. 0.1r/min (Note 1) 23 Torque command Control the torque at the torque control or stopper control. 0.1% (Note 1) 24 Speed limit Control the speed at the torque control or stopper control. 1r/min (Note 1) Digital waveforms CSON, PC, EMG, EM1, CDP

Prefix: CDP (Applicable to 32mm Bore), Suffix: 2 (Applicable to 32mm Bore)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

(Bushing assembly: Not available for SY5000-52-3A) VFS 5 Bushing assembly SY5000-52-3A 6 VZ1000-11-1VFR Refer to page 186.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

SY

How to Order Connector Assemblies Type 43P Type 45 3 port valve Air operated For 12, 24VDC Specification SY3000 SY5000/7000 Single solenoid SY3000-37-3A Double solenoid/ 3 position SY3000-37-4A SY5000-37-3A SY5000-37-4A Single solenoid with spacer assembly SY5000-37-3A SY5000-37-5A Double solenoid/3 position with spacer assembly SY3000-37-6A SY5000-37-6A For 100VAC Specification SY3000 SY5000

Table of Contents

1 Non plug-in type VVF4000-3A-1 Plug-in type End plate (D side) assembly !

Vacuum System Peripherals:

Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-A Individual SUP spacer assembly: SY3000-38-3A SUP/EXH block assembly (for R): SX3000-51-6A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-3A SUP/EXH block assembly (for S): SX3000-51-7A SUP/EXH block assembly (for RS): SX3000-51-8A 2 pcs 1 location EXH block disk: SX3000-77-1A SUP/EXH

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

SY3000-37-3A 3 sets (Connector assembly part no.)

V100

For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A To detach a connector, remove the pawl from the groove by pushing the lever downward with your thumb, and pull the connector straight out.

Table of Contents

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

How to Order Valve How to Order Connector Assembly Rated voltage Light/Surge voltage suppressor For single solenoid 12V, 24 VDC Z With light/surge voltage suppressor With light/surge voltage suppressor (Non-polar type) SY3000-37-3A SY3000-37-4A SY3000-37-3A SY3000-37-6A SY3000-37-3A 5 6 24 VDC 12 VDC U For double solenoid 3 position type For single solenoid, individual SUP/EXH spacer Note

SYJ3000/5000/7000

(Valve) SYJ7000-21-3A 1 pc. (Blanking plate assembly) SY3000-37-3A 3 pcs. (Connector assembly) SY3000-37-4A 3 pcs. (Connector assembly) Example: The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc. Use manifold specification sheet.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-3A-1U t VZ1000-2A-1M SUP/EXH block assembly y Note) Block pin (2 pcs.) is attached for q, e, t, y.

SQ1000/2000

B White 3A SOL.

42

However, the maximum number of stations is 16. 1B 2A 2B 3A 3B 4A VFR 4B 5A 5B 6A 6B 7A 7B VQ7 1.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Valve) SYJ7000-21-3A (-Q) 1 pc. (Blanking plate assembly) SY3000-37-3A 3 pcs. (Connector assembly) SY3000-37-4A 3 pcs. (Connector assembly) Example: The asterisk denotes the symbol for assembly. Prefix it to the part no. of the solenoid valve, etc. Note) Please indicate the connector assembly part no. below that connects the valve and the manifold.