Smooth Cylinder/Low Speed Cylinder

50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Electric Actuator/Slider Type

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz.

NCQ8

VESSEL Wire stripper No 3000G TOKYO IDEAL CO., LTD Strip master 45-089 Stripper for a round cable (2.0) can be used for a 2-wire type cable.

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

15

NZ M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NY M4 x 0.7 8 70 50 4 44 89.8 85 M3 x 12 M5 x 45 14 NX M5 x 0.8 9 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NW M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 9 NV M4 x 0.7 8 63 50 5 47.2 89.8 85 M4 x 12 M5 x 45 9 NU M5 x 0.8 9 70 50 5 45 89.8 85 M4 x 12 M5 x 45 11 NT M5 x 0.8 9 70 50 4 44 89.8 85 M3 x 12 M5 x 45 12 NM2 M4 x 0.7

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 1) e ot e g 1 n N 8 a 0 4 e g r + 2 n 7 a 4 n + 0 r + o n 0 5 0 4 N 0 ti o 0 9 ot a N ti 0 e t a e ot 0 1) o g t 1 e n e o R ) a 1 0 ot R r ) N 1 n o e 4 ti 0 + a g 0 t o n 9 R ra e n g n io ra (90) (90) at n io Chamfer ot Plate Plate Plate at R ot R Plate (45) Chamfer Chamfer Note 2) Chamfer (45) B port A port B port A port B port A port

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.)

Integrated Controller

Size Non-rotating accuracy 16 1.1 25 0.8 32 0.7 + Force Conversion Graph (Guide) EQY32 EQY16 800 700 600 500 400 300 200 100 0 160 Lead 4: EQY32C Lead 2.5: EQY16C 140 120 Lead 8: EQY32B Lead 5: EQY16B Force [N] Force [N] 100 Lead 16: EQY32A Lead 10: EQY16A 80 Lead 24: EQY32H 60 40 Min. 25% Max. 45% 20 Min. 30% Max. 70% 0 15 20 25 30 35 40 50 45 10 20 30 40 50 90 70 80 60 Pushing force set

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

. : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48 1.1 33 1.6 t: Rotation time (s) 71 71 54 71 71 1.5 54 2.2 74 107 86 74 78 2.4 78 2.9 Rotary actuator 137 166 197 137 137 4.0 147 4.8 197 233 398 197 363 5.3 196 6.4 296 378 517 296 451 9.7 314 12.0 296 476 12.0 333 493

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

MY1

Refer to page 8-11-59. 1500 Max. operating frequency (cycle/min) 70 80 10 25 45 1.96 4.22 6.86 8.34 8.83 Extended Spring force (N) 4.22 6.86 15.98 20.50 20.01 Retracted Operating temperature range (C) 5 to 60 Made to Order Specifications (For details, refer to page 8-31-1.)

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ8-10Z 25 15 21 9 25 19 37 10 26.5 68.5 4 2 51 61 MXQ8-20Z 25 22 22 16 28 28 40 14 32.5 78.5 4 2 61 71 MXQ8-30Z 26 33 26 27 40 14.5 42 88.5 6 3 71 81 MXQ8-40Z 32 14 45 27 31 31 55 20 52.5 104.5 6 3 87 97 MXQ8-50Z 46 16 45 54 29 58 55 37 62.5 131.5 6 4 114 124 MXQ8-75Z 50 15 45 56 30 60 55 10 91.5 156.5 6 4 116 126 93 Air Slide Table

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

ISO Standard Hydraulic Cylinder

80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18 113 16 M42 x 2 M16 x 1.5 10 162 56 97 56 200 50 25 52 72 22 20 19 45 101 3/4 40 Bore size (mm) RD ZZ S Y Z V SS -0.025 -0.064 32 42 5.5 153.5 93 60 128 35 40 62 6.5 185 118 62 153 35 -0.030 -0.076 50 74 7 199 118 67 159 41 63 82 12 216 120 71

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L