• (mm) 42 18 M1 6x 1.5 15 20 ,Bore size LT LX LV MM N P S (mm) X I V Without rOO boot" With rod bOot H ZZ f h t ZZl 133 l,t. stroke 296 45 I 20 110 273 75 40 125 8 1{)() 156.5 M30 x 1.5 305 1/2 98 45 1 30 110 283 75 40 140 9 112 178.5 M30 x 1.5 30,S 1/2 98 133 I ; stroke 306 so l 25 120 301 75 40 160 9 118 194.5 M36 x 1.5 345 3/4 106 141 I, ,,"slroke 322 ..
Release valve: None Valve configuration6 Pilot operated dual 2-port Pilot operated 2-port Operating pressure range 0.3 to 0.6 MPa Valve construction Poppet seal Manual override Push type Rated voltage 24 VDC, 12 VDC Power consumption 0.4 W Lead wire (ZK2-LV-A) Cross section: 0.2 mm2 (AWG24) Insulator O.D.: 1.4 mm Vibration resistance1 30 m/s2 Without pressure sensor/switch With pressure sensor
(Not available in this product) Trigger LV Pushing speed Can be set in units of 1mm/s. (Not available in this product) Moving force 100% at step motor, 250% at servo motor (Not changeable). Area output Can be set in units of 0.01mm. In position During positioning operation: Width to the target position. It should be set to LEFS:0.5 or more.
Movement mode Movement mode 3 ABS 1 () INC 2 Speed Speed *1 (mm/s) Position Position (-) (+) [mm] 1 (mm/s 2) Accelerati on Accelerati on Decelerati on Decelerati on 1 (mm/s 2) 100% (%) * Pushing force Pushing force *1 0 1100 (1100 ) INP ON INP ON (:%) Trigger LV Trigger LV *1 -42- (1100 ) ( mm/s) * Pushing speed Pushing speed *1 Moving force Moving force *1 (%) (mm/s)
When the pushing force exceeds the value set in the step data Trigger LV. Caution After pushing operation is finished, even if controller changes to energy saving mode, INP signal status maintains to ON.
EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas Features 1 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely
For such circuits, consider using a product from the LV series.
The LV series catalog can be found here.
This is a legacy product, and replaced byMXH6-5Z-M9PL, CYL, COMPACT SLIDE TABLE, ACTUATOR, MXH HIGH RIGIDITY GUIDE CYL, CE, 6MM MXH DBL-ACT AUTO-SW, .27557 lb, ModelBore size (mm)Standard stroke (mm)Made to Order 51015202530405060MXH66------------------XB13 : Low-speed cylinder (5 to 50 mm/s)XC3 : Special port positionsXC19 : Intermediate stroke (Spacer type)XC22 : Fluororubber
This is a legacy product, and replaced byMDUB40-40DZ-M9PL
This is a legacy product, and replaced byNCDQ2A63-25DCZ-M9PL
Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 25, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9PL
Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 25, Seal Type: Bellows Seal, Valve Type: In-line type, Indicator: No indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9PL
Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.
Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: Yes (Cable Length 0.3m), Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.
Ball Screw Lead: 6mm, Stroke: 75mm, Origin Switch: Yes (Cable Length 0.3m), Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 1 pc.
Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 3 pcs.
Ball Screw Lead: 12mm, Stroke: 50mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.
Motor: 5-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 50mm, Origin Switch: Yes (Cable Length 0.3m), Brake: No, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 2 pcs.