Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Spring return Model C Mounting bolt Model C Mounting bolt D 35 40 40 45 40 45 40 45 40 45 45 50 55 65 D 40 45 40 45 40 45 40 45 40 45 45 50 55 65 CDQ2B12-5S -10S CDQ2B16-5S -10S CDQ2B20-5S -10S CDQ2B25-5S -10S CDQ2B32-5S -10S CDQ2B40-5S -10S CDQ2B50-10S -20S CDQ2B12-5T -10T CDQ2B16-5T -10T CDQ2B20-5T -10T CDQ2B25-5T -10T CDQ2B32-5T -10T CDQ2B40-5T -10T CDQ2B50-10T -20T M3 x 35l x 40l M3 x

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

Compact Cylinder

Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B32-5 -

10

49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 CS1 CS2 D-X Technical Data 427 A MB Series Minimum Stroke for Auto Switch Mounting Mounting Brackets Except Center Trunnion n: Number of auto switches [mm] Auto switch model Number of auto switches 32, 40, 50, 63 80, 100

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

MY1

Refer to page 8-11-59. 1500 Max. operating frequency (cycle/min) 70 80 10 25 45 1.96 4.22 6.86 8.34 8.83 Extended Spring force (N) 4.22 6.86 15.98 20.50 20.01 Retracted Operating temperature range (C) 5 to 60 Made to Order Specifications (For details, refer to page 8-31-1.)

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ8-10Z 25 15 21 9 25 19 37 10 26.5 68.5 4 2 51 61 MXQ8-20Z 25 22 22 16 28 28 40 14 32.5 78.5 4 2 61 71 MXQ8-30Z 26 33 26 27 40 14.5 42 88.5 6 3 71 81 MXQ8-40Z 32 14 45 27 31 31 55 20 52.5 104.5 6 3 87 97 MXQ8-50Z 46 16 45 54 29 58 55 37 62.5 131.5 6 4 114 124 MXQ8-75Z 50 15 45 56 30 60 55 10 91.5 156.5 6 4 116 126 93 Air Slide Table

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

ISO Standard Hydraulic Cylinder

80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18 113 16 M42 x 2 M16 x 1.5 10 162 56 97 56 200 50 25 52 72 22 20 19 45 101 3/4 40 Bore size (mm) RD ZZ S Y Z V SS -0.025 -0.064 32 42 5.5 153.5 93 60 128 35 40 62 6.5 185 118 62 153 35 -0.030 -0.076 50 74 7 199 118 67 159 41 63 82 12 216 120 71

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

50 55 60 35 40 45 50 55 60 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L

CLS

45 50 60 60 80 36 36 45 45 45 55 20 30 25 30 30 40 164 98 30 30 30 383 40 40 40 45 45 55 30 to 1400 75 133 406 Up to 1400 98 298 383 393 433 507 532 406 416 454 525 550 M30 x 1.5 8 9 0.2 stroke 184 98 393 30 to 1400 75 133 416 98 298 Up to 1400 M30 x 1.5 0.2 stroke 204 106 433 75 141 454 106 338 30 to 1400 Up to 1400 M36 x 1.5 25 31 41 0.2 stroke 228 111 503 85 153 521 115 402 30 to

MHZ

2@0 Piston assembly MHZJ2-DW MHZJ2-K MHZJ2-M MHZJ2-E Main body of adaptor Mounting screw for adaptor Seal kit End boss assembly Material of packing NBR = Nitrile rubber, FKM = Fluoro rubber Material of dust cover CR = Chloroprene rubber, FKM = Fluoro rubber, Si = Silicon rubber End boss type H = With hose nipple, K = With One-touch fitting, M = With M3 port, E = Side ported 12-2-45 45

MHZ

2@0 Piston assembly MHZJ2-DW MHZJ2-K MHZJ2-M MHZJ2-E Main body of adaptor Mounting screw for adaptor Seal kit End boss assembly Material of packing NBR = Nitrile rubber, FKM = Fluoro rubber Material of dust cover CR = Chloroprene rubber, FKM = Fluoro rubber, Si = Silicon rubber End boss type H = With hose nipple, K = With One-touch fitting, M = With M3 port, E = Side ported 12-2-45 45

XM, XY

(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Nil XL H0 Solid state auto switch y Number of auto switches/Detecting position XLQ Quantity Without auto switch 2 pcs. 1 pc. 1 pc.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

High Vacuum Angle Valve

(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) * Standard lead wire length is 0.5 m.

JIS Standard Hydraulic Cylinder

42 35.5 13 30 80 346 M24 x 1.5 35 32 28 11 24 70 326 0.030 0.076 0.036 0.090 80 65 55 M39 x 1.5 60 57 45 15 41 95 392 M30 x 1.5 45 42 35.5 13 30 80 362 0.030 0.076 100 80 65 M48 x 1.5 75 72 56 16 50 115 442 M39 x 1.5 60 57 45 15 41 100 412 393

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 85 90 105 110 115 20 100 D-Y7BA 85 + 45 (n 4)/2 n = 4, 8, 12, 16 105 + 45 (n 4)/2 n = 4, 8, 12, 16 110 + 45 (n 4)/2 n = 4, 8, 12, 16 115 + 45 (n 4)/2 n = 4, 8, 12, 16 20 + 45 (n 2)/2 n = 2, 4, 6, 8 100 + 45 (n 4)/2 n = 4, 8, 12, 16 90 + 45 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

117 29 1/8 44 111 27 1/8 38 104 26 21 18 15 32 24 22 18 6.6, 11 counterbore depth 7 9, 14 counterbore depth 9 11, 17.5 counterbore depth 12 38 32 46 41 50 1/4 64 161 63 Up to 300 35 32 32 27 20 11 45 2 7 72 76.6 50 Up to 300 35 32 30 12 12 27 20 45 11 2 7 39 33 18 18 58 64.5 M18 x 1.5 M18 x 1.5 44 1/4 12 12 114 108 62 19 17 155 14, 20 counterbore depth 14 18, 26 counterbore depth 18 (mm)