Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

. : Angular acceleration 1 2 3 7 10 20 30 50 70 100 200 41 41 0.56 31 41 41 0.84 31 . 2 = (rad/s 2) Load 45 45 32 45 45 0.82 32 1.2 t 2 : Rotation angle (rad) 48 48 33 48 48 1.1 33 1.6 t: Rotation time (s) 71 71 54 71 71 1.5 54 2.2 74 107 86 74 78 2.4 78 2.9 Rotary actuator 137 166 197 137 137 4.0 147 4.8 197 233 398 197 363 5.3 196 6.4 296 378 517 296 451 9.7 314 12.0 296 476 12.0 333 493

MY1

Refer to page 8-11-59. 1500 Max. operating frequency (cycle/min) 70 80 10 25 45 1.96 4.22 6.86 8.34 8.83 Extended Spring force (N) 4.22 6.86 15.98 20.50 20.01 Retracted Operating temperature range (C) 5 to 60 Made to Order Specifications (For details, refer to page 8-31-1.)

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

MHZ

2@0 Piston assembly MHZJ2-DW MHZJ2-K MHZJ2-M MHZJ2-E Main body of adaptor Mounting screw for adaptor Seal kit End boss assembly Material of packing NBR = Nitrile rubber, FKM = Fluoro rubber Material of dust cover CR = Chloroprene rubber, FKM = Fluoro rubber, Si = Silicon rubber End boss type H = With hose nipple, K = With One-touch fitting, M = With M3 port, E = Side ported 12-2-45 45

MHZ

2@0 Piston assembly MHZJ2-DW MHZJ2-K MHZJ2-M MHZJ2-E Main body of adaptor Mounting screw for adaptor Seal kit End boss assembly Material of packing NBR = Nitrile rubber, FKM = Fluoro rubber Material of dust cover CR = Chloroprene rubber, FKM = Fluoro rubber, Si = Silicon rubber End boss type H = With hose nipple, K = With One-touch fitting, M = With M3 port, E = Side ported 12-2-45 45

Air Slide Table

Dimensions [mm] Model F G GA GB H HA HB I J M N NN Z ZZ MXQ8-10Z 25 15 21 9 25 19 37 10 26.5 68.5 4 2 51 61 MXQ8-20Z 25 22 22 16 28 28 40 14 32.5 78.5 4 2 61 71 MXQ8-30Z 26 33 26 27 40 14.5 42 88.5 6 3 71 81 MXQ8-40Z 32 14 45 27 31 31 55 20 52.5 104.5 6 3 87 97 MXQ8-50Z 46 16 45 54 29 58 55 37 62.5 131.5 6 4 114 124 MXQ8-75Z 50 15 45 56 30 60 55 10 91.5 156.5 6 4 116 126 93 Air Slide Table

CHKD/CHKG

CHKGB50 CHKGB20 -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 10 XLF/XLFV Series Air Operated, With Solenoid Valve Solenoid valve How to Order [Option] w XLFV 16 2 G M9N A y 1 G q e i r t u o !

ISO Standard Hydraulic Cylinder

80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18 113 16 M42 x 2 M16 x 1.5 10 162 56 97 56 200 50 25 52 72 22 20 19 45 101 3/4 40 Bore size (mm) RD ZZ S Y Z V SS -0.025 -0.064 32 42 5.5 153.5 93 60 128 35 40 62 6.5 185 118 62 153 35 -0.030 -0.076 50 74 7 199 118 67 159 41 63 82 12 216 120 71

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.1 to 1.0, Specification: Built-in magnet, Support bracket: Through-hole

Magnet: D (Built-in), Mounting: B [Through Hole (Standard)], Bore Size: Ø63 mm, Port Thread: M Thread [ø12-ø25]; Rc [ø32-ø100], Stroke: 45 mm

Cylinder (Tube) Inner Diameter(φ): 63, Stroke(mm): 45, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.1 to 1.0, Specification: Built-in magnet, Support bracket: Through-hole

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(different sides) D-M9N/M9P/M9B 15 3 3 3.5 2 pcs. (same side) D-F9NW/F9PW/F9BW 55 5 5 4.5 D-M9N/M9P/M9B 1 or 2 pcs. (different sides) D-F9BAL 15 5 6 5 2 pcs. (same side) The operating range for the MGZP series is under examination. 55 Solid state switch D-F9NW/F9PW/F9BW 1 or 2 pcs. (different sides) 15 2 pcs. (same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs.

SMC

55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 FF 40 40 40 50 35 60 70 75 80 F 50 50 50 60 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 NA 2 2 2 2 2 2 4 4 4 G 22 22 22 22 20 26 32 40 30 KA 162 218 258 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 13-/22-MXS25-10 13-/22-MXS25-20 13-/22-MXS25-30

MXQ

Symmetric type is also the same. 8-5-44 45 Air Slide Table Series MXQ Construction !1 !9 !0 i !4 o !8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

2

(C) Correction factor 1.21 1.10 1 0.87 0.76 0.74 0.72 0.70 IDG 5 to 30 35 40 45 50 55 60 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 30 35 40 45 50 5 to 45 50 55 60 65 70 75 80 5 to 45 50 55 60 65 70 75 80 Data B: Ambient Temperature Note) Series IDF IDF1E to 75E Series IDU IDU3E to IDU37E IDU55E, 75E IDF100F to 150F IDF190D to 240D Ambient temp.

JIS Standard Hydraulic Cylinder

42 35.5 13 30 80 346 M24 x 1.5 35 32 28 11 24 70 326 0.030 0.076 0.036 0.090 80 65 55 M39 x 1.5 60 57 45 15 41 95 392 M30 x 1.5 45 42 35.5 13 30 80 362 0.030 0.076 100 80 65 M48 x 1.5 75 72 56 16 50 115 442 M39 x 1.5 60 57 45 15 41 100 412 393

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Different surfaces, Same surface) With 1 pc. 85 90 105 110 115 20 100 D-Y7BA 85 + 45 (n 4)/2 n = 4, 8, 12, 16 105 + 45 (n 4)/2 n = 4, 8, 12, 16 110 + 45 (n 4)/2 n = 4, 8, 12, 16 115 + 45 (n 4)/2 n = 4, 8, 12, 16 20 + 45 (n 2)/2 n = 2, 4, 6, 8 100 + 45 (n 4)/2 n = 4, 8, 12, 16 90 + 45 (n 4)/2 n = 4, 8, 12, 16 With n pcs. With 2 pcs.

Tie-rod Type Hydraulic Cylinder

40 32 8 110 90 26 42 20 M27 x 2 27.5 5 5 x 40AW l 45 160 all types 160 43 50 44 36 10 120 100 30 50 22 M33 x 2 34 5 5 x 50AW 10 K C F B A H 0 0.2 Material: Carbon steel Y-type knuckle d (H8) A B C D G L F E K J H N M Spring pin Applicable cylinder type Order no.