Aluminum High Vacuum Angle Valve

0 o 83 0.2 2-1 112 q 114 90 O-ring Part No.

ISO Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Band mounting Rail mounting 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Perpendicular In-line Perpendicular In-line Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N M9NV M9N V V V v v IC circuit 3-wire (NPN) 5 V, 12 V 3-wire (PNP) M9PV M9P M9PV M9P V V V v v Grommet Solid

Smooth Cylinder/Low Speed Cylinder

95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L

5

90 15 158 132 184 26 13.5 24 17 75 100 129 25+0.084 0 Double clevis pivot bracket B DX Z + Stroke DD DB B 90 4 x DT B A DS DH DE DC DO DO 4 x DR DA DL DU DU (mm) Part no.

Electric Actuator/Slider Type

torque should be set to 90% or less.

Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 42 42 42 64 63 62 130 129 127 248 243 238 465 454 443 58 59 71 74 145 168 268 288 478 524 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster unit 30 47 90 150 203 30 47 90 150

Air Cylinder

115 140 165 32 32 36 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 40 41 46 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 54 67 79 92 117 142 167 Bore size Female Rod End (mm) With Air Cushion With Rod Boot (mm) (mm) ZZ JH JW 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 158 171 183 196 221 246 271 23.5 10.5 25 162 175 187

Made to Order

Q 506 S 227 SS 269 Z 496 ZZ 528 Model CX2N15-225 CX2N15-250 CX2N15-275 CX2N15-300 102 263 15.5 90 556 252 294 546 578 288 15.5 90 606 277 319 596 628 114.5 313 15.5 90 656 302 344 646 678 127 Model F 96 L 241 K 20.5 P 90 Q 525 S 227 SS 282 Z 509 ZZ 553 CX2N25-225 CX2N25-250 CX2N25-275 CX2N25-300 108.5 266 20.5 90 575 252 307 559 603 121 291 20.5 90 625 277 332 609 653 133.5 316 20.5 90 675

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

100 0 60 30 120 90 0 60 30 120 90 Torque limit/Command value [%] Torque limit/Command value [%] Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 Torque limit/Command value [%] Duty ratio [%] Continuous pushing time [minute] 75 or less 100 90 60 1.5 LEY63l (Motor mounting position: Top/Parallel, In-line) 3500 Lead 2.86: LEY63L (Top/

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB12-5DC -10DC

Air Cylinder

Locking type manual release While pushing the M/O knob, turn it 90 counterclockwise. The lock is released (and remains in a released state) by aligning the mark on the cap with the OFF mark on the M/O knob. When locking is desired, turn the M/O knob 90 clockwise while pushing completely down, and align the mark on the cap with the ON mark on the M/O knob.

15

300 200 Lead 8: LEY32DB 200 100 Lead 16: LEY32DA 100 Lead 20: LEY32A 0 60 30 120 90 0 60 30 120 90 Ratio to rated torque [%] Ratio to rated torque [%] * When using the force control or speed control, set the maximum value to be no more than 90% of the rated torque.

High Vacuum Angle Valve

5 XLAV16-90-2 (XLAV63-90-1 only for XLFV-50-2) XLAV63-90-1 * The -mm at the end of the solenoid valve part number is the selection symbol for voltage, electrical entry, and other specifications.

Integrated Controller

)[88]4 13 (86) 86 (175.8) 88[(90)]4 Communication cable connector (M12) Origin end3 [Opposite end]4 Opposite end [Origin end]4 2[(4)]4 (90) Parallel I/O connector (M12) 61 (4)[2]4 27.8 20.1 68 8 31 Power supply connector (M12) 39.3 22 Auto switch groove (1 row per side) M4 x 0.7 thread depth 8 (F.G. terminal) 8 53.8 68 Motor option: With lock (220.8) (16) D x 150 (=E) B + Stroke 15 60 150

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

A A 16 25 Angle type M9N In-line type 1 5 6 2 3 4 7 2.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt D 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 Model C D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 Model C Model C D 65 70 75 80 85 90 95 100 105 130 155 70 75 80 85 90 95 100 105 110 135 160 80 85 90 95 100 105 110 115 120 145 170 Bolt CDQ2WB32-5D -10D

XM, XY

A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Magnet: D (Magnet), Shaft Type: S (Single Shaft), Size: 20, Thread Type: TN (NPT 1/8), Rotation Angle: 90 (80° to 100°), Air Cushion: C (Air Cushion), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal

Magnet: Magnet, Shaft Type: Single Shaft, Size: 20, Thread Type: NPT 1/8, Rotation Angle: 80° to 100°, Air Cushion: Air Cushion, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: -, Number: -