Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

None None None None None None None White Black Black Red Red Red Black Black Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Plug connector HDA-CTH (Made by Hirose Electric) Red Connector HAD-15S (Made by Hirose Electric) Terminal no. 2 x M2.6 x 0.45 Terminal no.

LV50-OMQ0002

When the value exceeds 9l, the higher 3 digits(15s) and lower 6 digits(3s) are displayed alternately. When 9L is reached, the display stops with [9] flashing. Accumulation will start automatically in measurement mode after the power is supplied. (When the option to memorize the cumulated value is selected, it will start from the memorized value.)

smcmaintenancepartslist

Description Part number Note 3 4 7, 13 4 7, 13 6, 12 8 9 14 V band for replacement O-ring O-ring O-ring O-ring Quick plug Upper element holder Lower element holder Intermediate holder JIS B2401-1A-P85 JIS B2401-1A-P11 JIS B2401-4D-P85 JIS B2401-4D-P11 KT-FQ1-N FKM KT-FQ1-V Stainless steel 303 Stainless steel 304 Stainless steel 304 Stainless steel 304 AG-9S L-131S L-135S FQ-OP001 BP-13S BP-14S BP-15S

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

Table of Contents

Specifications Dot marking Lead wire color Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink None None None None None None None White Black Black Red Red Red Black Black AXT100-DS151 to 3 Multi-core vinyl cable VVRF 0.3 mm2 x 15C 9 Plug connector HDA-CTH (Made by Hirose Electric) Red Connector HDA-15S

Filter for Cleaning Solvent Quick Change Filter Series FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

LEC-OM02704CN

(FR-BSF01FR-BLF()) 13 21 13 (2) (a) () TDKZCAT3035-1330NECESD-SR-25 ZCAT3035-1330(TDK) [] [mm] 10100MHz 100500MHz 391 131 341 80 150 301 TDK (ZCAT3035-1330) (b) () ACACAC MC 20cm ()972A-2003 50411 (AC200V) AC[V] C[F] R[] [mm] AC[V] 200 0.5 50(1W) T-C 181.5 1000(15s) 6 10 10 103 103 4 151 31.51 200 200 481.5 DCDC 4 2 RA 13 22 13 (c) AERSBAN-SET SD ( A B ) 40 2-5 17.5

MU

Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

This is a legacy product, and replaced byMXH6-5Z-M9PL, CYL, COMPACT SLIDE TABLE, ACTUATOR, MXH HIGH RIGIDITY GUIDE CYL, CE, 6MM MXH DBL-ACT AUTO-SW, .27557 lb, ModelBore size (mm)Standard stroke (mm)Made to Order 51015202530405060MXH66------------------XB13 : Low-speed cylinder (5 to 50 mm/s)XC3 : Special port positionsXC19 : Intermediate stroke (Spacer type)XC22 : Fluororubber

This is a legacy product, and replaced byMDUB40-40DZ-M9PL

This is a legacy product, and replaced byNCDQ2A63-25DCZ-M9PL

Air-Actuated Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 25, Seal Type: Bellows Seal, Valve Type: Angle type, Indicator: No indicator, Pilot Port Direction: Flange side, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9PL

Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: NW, Flange Size Nominal: 25, Seal Type: Bellows Seal, Valve Type: In-line type, Indicator: No indicator, Pilot Port Direction: Flange surface, back, Temperature Range(°C): 5 to 60, Switch Part Number: D-M9PL

Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.

Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: Yes (Cable Length 0.3m), Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.

Ball Screw Lead: 6mm, Stroke: 75mm, Origin Switch: Yes (Cable Length 0.3m), Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 1 pc.

Ball Screw Lead: 12mm, Stroke: 25mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 3 pcs.

Ball Screw Lead: 12mm, Stroke: 50mm, Origin Switch: None, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Quantity 1: 2 pcs.

Motor: 5-Phase Stepping Motor, Thread Lead: 2mm, Stroke: 50mm, Origin Switch: Yes (Cable Length 0.3m), Brake: No, Auto Switch: M9PL--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, 3M, Number: 2 pcs.