PFA/PFW

/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa (0 to 72psi) 1.0MPa (145psi) 3kPa (50l/min) [0.44psi (1.77SCFM)] 0 to 9l (0 to 35,300 ft3) 0 to 50C (32 to 122F) with no condensation 5% F.S. or less 1% F.S. or less Operating pressure range Withstanding pressure Pressure loss Cumulative flow

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

PA3000/5000/PAX1000

Since the marked point is below the curve for 50l/min (ANR), the maximum rate will be about 50l/min (ANR).

Digital Flow Switches, Series PF2A, Series PF2W

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

Table of Contents

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Electric Actuators

Suction at both ends. 50l/min (ANR) 100l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 106 Made to Order/Clean Room Specification Series LJ1H20 Dimensions/LJ1H202 (X60) Scale: 15% When two dimensions are shown, the top dimension is for 100 to 600mm strokes, and the

LJ1H

Vacuum suction port 50l/min (ANR) Suction flow rate For basic specifications such as allowable moment, refer to the "Standard motor" pages for equivalent products listed on Features pages 1 and 2. 104 105 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Made to Order

Hydraulic

Example: M5 x 50l 4pcs.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Compact Cylinder with Air Cushion Series RQ

Example) Bolt M5 x 50l 4pcs.

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Cushion: Without cushion, Operating Pressure(MPa): 0.07 to 1.0, Specification: -, Auto Switches: M9B, Lead Wire Length(m):

Mounting: B (Tapped on Both Sides), Bore Size: 12mm, Stroke: 50mm, Cushion: 40~63 Bore-Cushion Both Sides; 12~32 Bore-No Cushion, Connector: Connector, Cable Length: 0.5m, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, 0.5M

Cylinder (Tube) Inner Diameter(φ): 12, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard / With rod detent function, Environment, Applications: Standard, Cushion: Without cushion, Operating Pressure(MPa): 0.07 to 1.0, Specification: -, Auto Switches: M9B, Lead Wire Length(m):

Mounting: B (Through Hole Both Ends Tapped Common), Bore Size: 50 mm, Cylinder Port: M Thread: 20, 25 Bore; Rc: 32 to 63 Bore, Stroke: 50 mm, Rotation: L (Left Rotation), Body Option: Standard (Female Thread), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal

Pressure(MPa): 1, Additional Function: No (Standard), Rotating Direction: Left, Rod Motion: Double Acting Piece Rod, Operating Temperature Range(°C): -10～60, Auto Switches: M9B, Lead Wire Length(m): 0.5, The number of the switches: 2, Specification: Built-in magnet, Port Screw Type: Rc, Made to order specifications: None

Battery-less

. *3 Position after returning to origin *4 [ ] for when the direction of return to origin has changed Dimensions [mm] Model L A B n D E F Without lock With lock LEFS25El-50l 285.5 330.5 56 160 4 20 LEFS25El-100l 335.5 380.5 106 210 4 LEFS25El-150l 385.5 430.5 156 260 4 LEFS25El-200l 435.5 480.5 206 310 6 2 240 LEFS25El-250l 485.5 530.5 256 360 6 2 240 LEFS25El-300l 535.5 580.5 306 410

4-channel Flow Monitor ( compatible)

Item Display Content Setting of connection product [4L] 4 L range [16L] 16 L range [40L] 40 L range [PFW] is selected [100L] 100 L range [250L] 250 L range [10L] 10 L range [rAnG] [50L] 50 L range Selection of flow range [100L] 100 L range [PFA] is selected [200L] 200 L range [500L] 500 L range [4L] 4 L range [PFd] is selected [16L] 16 L range [40L] 40 L range Press the SET button to set.