SMC Pneumatic Clean Series

Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes

SMC Pneumatic Clean Series

Manufacturer Clean bench (Class M3.5) 5min 55min 75l Sampling time Interval time Setting conditions Supply rate 15l/min Sampling air flow Exhausted from relief port Laser dust monitor (Suction flow rate 15l/min) Particle generation measuring circuit Evaluation method To obtain the measured values of particle concentration, the accumulated value Note 1) of particles captured every 5 minutes

CQ2

X 80l X 85l X 90l X 95l M5 X 40l M5 X 45l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l 15 10.5 7.5 X 100 l X 105 l X 130 l X 155 l M10 X 75l M5 X 40l X 115 l X 140 l X 80l X 85l X 90l X 95l X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l M6 X 55l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90

Compact Cylinder with Air Cushion

x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l M8 x 90l x 100l x 110l x 135l x 160l M10 x 105l x 115l x 140l x 165l M10 x 120l x 130l x 155l x 180l M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l 9 8 9.5 13.5 15.5 10 15 17.5 3 Compact Cylinder with Air Cushion Series RQ Replacement Parts/Seal Kits

RSQ

M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20 RSQB40-20 -25 -30 RSQB50-20 -25 -30 Note) CX Round bar, Chamfered, Roller 1.03 1.07 1.11 50 Lever with built-in shock absorber 1.26 1.30 1.34 CY 7 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

RQ

90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 M5 x 50l x 55l x 60l x 65l x 75l

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Mounting bolt Mounting bolt diagram C D Mounting bolts D Model C Mounting bolt Model C D Mounting bolt M8 x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 160l x 185l CHQWB63 10D (M) CHQWB20 M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 70l x 80l x 85l x 90l x 95l x 100l

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

A

AL With One Unit A & One Unit L each AH With One Unit A & One Unit H each LH With One Unit L & One Unit H each ACCESSORIES AUTO SWITCHES Note: Pre-wired Switches with 3/4 Pin Connectors available Bore Size Model Switch Type Load Voltage Load Current Power Internal Voltage Indicator Grommet Connector Source Drop Lamp 16 & 20 D-A90L Reed 24 V/48V/100 V AC/DC 50mA/40mA/20mA None 16 & 20 D-A93L

CATALOG

Thrust energy E2 Fs Fs+Mgs Fs-Mgs Absorption energy E3 ACCESSORIES AUTO SWITCHES E1+E2 Note: Pre-wired Switches with 3/4 Pin Connectors available, please consult SMC Customer Service Bore Model Switch Load Load Power Internal Indicator Size Grommet Connector Type Voltage Current Source Voltage drop Lamp 16 & 20 D-A90L Reed 24V AC/DC 50 mA None 48V AC/DC 40mA 100V AC/DC 20 mA 16 & 20 D-A93L

Table of Contents

Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) M9NZ Refer to page 8-28-27 for additional details and applicable auto switches other than the above types.

Microspeed Cylinder

L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches with a "" symbol are produced upon receipt of order.

MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

Rotary Table/

A93 A93L F9NWZ (Example) (Example) (Example) 13 Rotary Table Series MSQ Specifications 10 20 30 50 70 100 200 Size Air (non-lube) Fluid Maximum operating pressure Minimum operating pressure 1MPa With adjustment bolt Note 1) 0.6MPa With internal shock absorber 0.1MPa Basic type 0.2MPa 0.1MPa High precision type 0 to 60C (with no condensation) Ambient and fluid temperature Rubber bumper With

MXS

NPN) F9NV F9N 3 wire(NPN) Diagnostic indication (2 color) F9PV F9P 3 wire(PNP) P.5.3-39 F9BV F9B 2 wire Relay, PLC 24V Yes Grommet 12V F9NWV F9NW 3 wire(NPN) F9PWV F9PW P.5.3-66 3 wire(PNP) F9BWV F9BW 2 wire PLC: Programmable Logic Controller *Lead wire length 0.5m (Ex.) 3m L A93 A93L Specifications Specifications are same as the standard style.

Mounting: Direct Mount Rod Side Tapped, Bore Size: 20mm equiv., Stroke: 100mm, Connector: w/Connector, Sensor Cable Length: 0.5m, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Specification: Built-in magnet, Auto Switches: A93, Lead

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Specification: Built-in magnet, Auto Switches: A93, Lead

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 75, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Others, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): 0～60, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～1.0, Specification: Built-in magnet, Auto Switches: A93, Lead